Interface circuits for readout and control of a micro-hemispherical resonating gyroscope

Gyroscopes are inertial sensors that measure the rate or angle of rotation. One of the most promising technologies for reaching a high-performance MEMS gyroscope has been development of the micro-hemispherical shell resonator. (μHSR) This thesis presents the electronic control and read-out interface that has been developed to turn the μHSR into a fully functional micro-hemispherical resonating gyroscope (μHRG) capable of measuring the rate of rotation. First, the μHSR was characterized, which both enabled the design of the interface and led to new insights into the linearity and feed-through characteristics of the μHSR. Then a detailed analysis of the rate mode interface including calculations and simulations was performed. This interface was then implemented on custom printed circuit boards for both the analog front-end and analog back-end, along with a custom on-board vacuum chamber and chassis to house the μHSR and interface electronics. Finally the performance of the rate mode gyroscope interface was characterized, showing a linear scale factor of 8.57 mv/deg/s, an angle random walk (ARW) of 34 deg/sqrt(hr) and a bias instability of 330 deg/hr.

Level thesis:degree_level

Masters

Department dc:contributor.department

Electrical and Computer Engineering

Grantor dc:publisher

Georgia Institute of Technology

Year dc:date.issued

2014

Author dc:creator

• Mayberry, Curtis Lee

Advisor dc:contributor.advisor

• Ayazi, Farrokh

Committee members dc:contributor.committeemember

• Ghovanloo, Maysam
• Wang, Hua

• uHRG
• µHRG
• MEMS
• CVG
• Coriolis
• TIA
• AM
• FM
• Micro-hemispherical resonating gyroscope
• 3D-HARPSS
• High-Q
• Gyroscopes
• Gyroscopic instruments
• Gyroscope
• Vibratory
• Coriolis vibratory gyroscope
• Interface
• Circuits
• Transimpedance amplifier
• Rate integrating
• Inertial sensor
• Sensor
• Oscillator
• Analog
• Control
• Electrostatic
• Capacitive
• Noise
• Characterization
• Mode-matching
• Wine-glass
• Duffing
• Non-linearity
• Feed-through cancellation
• Vibratory gyroscopes
• Polysilicon

Language dc:language.iso

en_US

Handle dc:identifier.uri

http://hdl.handle.net/1853/53116

OAI identifier oai:identifier

oai:repository.gatech.edu:1853/53116