Abstract
dc:description.abstract<p>A study of implantable middle ear MEMS piezoelectric transducer for hearing aids was developed. The physical vibration deflection at the tip of the transducer is simulated using finite element method. Further, a study of thermoelastic damping effect of four designed MEMS mirrors used as resonators is presented. An optical measurement system based on Mach-Zehnder interferometer is</p>
Degree
thesis:*- Name thesis:degree_name
- M.S.
- Level thesis:degree_level
- Masters Thesis
- Year dc:date.available
- 2008
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Tang, Houwen
- Contributors dc:contributor
-
- Mohamed A. Matin, Ph.D.
- Yun Bo Yi, Ph.D.
- Bob Whitman
Subjects
dc:subject × 7Rights
dc:rights- Statement dc:rights
-
- <p>Copyright is held by the author. User is responsible for all copyright compliance.</p>
- Language dc:language
- en
Identifiers
dc:identifier.*- Repository record dc:identifier
- https://digitalcommons.du.edu/etd/641
- OAI identifier oai:identifier
- oai:digitalcommons.du.edu:etd-1640