{"id":{"repo_id":"denver","oai_identifier":"oai:digitalcommons.du.edu:etd-1640"},"canonical_url":"https://search.dev.ndltd.org/etd/denver/oai:digitalcommons.du.edu:etd-1640","repository":{"repo_id":"denver","name":"University of Denver","base_url":"https://digitalcommons.du.edu/do/oai/"},"display":{"title":"MEMS Transducer for Hearing Aid Device","abstract":"<p>A study of implantable middle ear MEMS piezoelectric transducer for hearing aids was developed. The physical vibration deflection at the tip of the transducer is simulated using finite element method. Further, a study of thermoelastic damping effect of four designed MEMS mirrors used as resonators is presented. An optical measurement system based on Mach-Zehnder interferometer is</p>","abstract_html":"&lt;p&gt;A study of implantable middle ear MEMS piezoelectric transducer for hearing aids was developed. The physical vibration deflection at the tip of the transducer is simulated using finite element method. Further, a study of thermoelastic damping effect of four designed MEMS mirrors used as resonators is presented. An optical measurement system based on Mach-Zehnder interferometer is&lt;/p&gt;","abstract_has_math":false,"creators":["Tang, Houwen"],"institution":null,"degree_name":"M.S.","degree_level":"Masters Thesis","degree_discipline":null,"degree_department":null,"school":null,"contributors":["Mohamed A. Matin, Ph.D.","Yun Bo Yi, Ph.D.","Bob Whitman"],"advisors":[],"committee_chairs":[],"committee_members":[],"year":2008,"date_issued":"2008-01-01T08:00:00Z","date_published":"2008-01-01T08:00:00Z","updated_at":"2026-07-24T02:02:45Z","subjects":["Hearing aids","MEMS","Transducer","Microelectromechanical systems","Biomedical","Biomedical Engineering and Bioengineering","Electrical and Computer Engineering"],"languages":["en"],"rights":["<p>Copyright is held by the author. 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