Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 20 of 21 for “"zone plate"”.
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Zone plate array lithography in the deep UV
… of a new paradigm in nanolithography, zone plate array lithography (ZPAL), has yielded a clearer understanding of its operation, construction, and performance. The benefits of ZPAL as a maskless strategy to write arbitrary patterns with ~ 25 nm resolution are explored. To optimize the …
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Image grating metrology using a Fresnel zone plate
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2003.
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Zone Plate Array Lithography (ZPAL) : simulations and system design
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2000.
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Maskless parallel patterning with zone plate array lithography (ZPAL)
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2000.
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The development of a prototype Zone-Plate-Array Lithography (ZPAL) system
… research presented in this paper aims to build a Zone-Plate-Array Lithography (ZPAL) prototype tool that will demonstrate the high-resolution, parallel patterning capabilities of the architecture. The experiment will require the integration of micromechanical spatial light modulators with an …
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Development of an immersion maskless lithography system
… of a maskless lithographic technique known as Zone-Plate-Array Lithography (ZPAL). This is believed to be the first implementation of an immersion scheme in a maskless lithography system. This thesis provides a complete description of the Immersion Zone-Plate-Array Lithography (iZPAL) system. …
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Išorinio poveikio įtaka terahercų taikymams telekomunikacijose /
… very large antenna arrays might be required. The zone plate-based antennas are considered as a reduced size and cost, easy-integrated planar solution for telecommunication systems in THz bands. Therefore, the zone plate design, in which reflection-reducing and focusing features are compatible on …
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Impact of external effects on terahertz applications for telecommunications /
… very large antenna arrays might be required. The zone plate-based antennas are considered as a reduced size and cost, easy-integrated planar solution for telecommunication systems in THz bands. Therefore, the zone plate design, in which reflection-reducing and focusing features are compatible on …
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Micro-optic elements for a compact opto-electronic integrated neural coprocessor
… element based on the concept of the Fresnel Zone Plate was developed and experimentally tested. The zone plate based elements offer an easily scalable method for fabricating the COIN optical interconnects using standard lithographic processes and appear to be the best choice for the COIN …
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Instrumentation and contrast mechanisms in scanning helium microscopy
… to maximise the flux using either a pinhole or zone plate to form the beam is investigated by performing a constrained optimisation in chapter 6. The source properties must also be included due to the strong chromatic aberrations present when using a zone plate. It is shown that the pinhole …
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Characteristics of different focusing antennas in the near field region
… array antennas, reflector antennas and Fresnel zone plate (FZP) antennas have been used for these applications. Here, first, a new scheme in designing focused array antennas with desired sidelobe levels (SLLs) in the near field region is presented. The performance of the large focused array …
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Integrated diffractive optical elements for terahertz beam shaping and polarization control /
… research introduces hybrid multi-phase Fresnel zone plate (H-MPZP) lenses with reduced structural complexity and enhanced focusing performance, high contrast grating (HCG) waveplates with sinusoidal surface modulation for broadband polarization manipulation, and free-standing meta-surfaces …
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Maskless nanolithography and imaging with diffractive optical arrays
… lithography. The work presented in this thesis, Zone-Plate-Array Lithography (ZPAL), bypasses some of the most pressing problems of current lithography equipment by developing a maskless lithography tool that will be scalable, flexible and cost-effective. It is the departure from a century-old …
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Terahertz imaging arrays for room temperature operation summary of doctoral thesis /
… of imaging system up to 25 %. Also, the zone plate integration idea on the substrate of bow-tie device was presented and successfully employed by increasing the sensors signal amplitude more than 20 times.
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Diffractive optics for maskless lithography and imaging
… lithography is accessible only to a select few. Zone-plate array lithography (ZPAL) is a novel method of maskless lithography that aims to alleviate some of these issues while offering a solution that can be extended to the limits of nanolithography. In ZPAL, an array of diffractive lenses is …
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A Study of Quantum Interference and Entanglement with Negative Optics
… theory. Future applications include generalized zone plate optics, motionless heliostats, beam splitting, evasive and deceptive imaging and high precision metrology. The relevant 2D-surfaces or meta-materials (2DMM) require patterns equal to less than a few wavelengths deep hence are far …
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Optical sub-diffraction limited focusing for confined heating and lithography
… to confine light into smaller spot sizes.</p> <p>Zone plate diffraction lenses generate spots with dimensions very close to the diffraction limit. We report the fabrication of zone plates to be used in laser direct writing of silicon nanowires. We show experimentally and with numerical models that …
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Femtosekunden-Spektroskopie biologischer Systeme mittels kohärenter Kontrolle
… and theory. The novel phenomenon of a Fresnel zone plate in the time domain is first developed in theory and then successfully realised in experiment.
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Flat optics based on patterned nanostructures for concentrating light
… of planar optical components, such as a Fresnel zone plate. As a follow up to this work, we explored the possibility of extending the field enhancement associated with plasmonic bowtie nanoantennas (BNAs), which typically decays evanescently, away from the surface. Our simulation results revealed …
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High-bandwidth high-precision robust x-ray microscopy - a control systems approach
… the sensor affects the lateral position of the zone plate focusing optics in the XY plane during scanning relative to the sample stage and the relative position between the optics and sample along Z direction. This results into imaging artifacts, image ambiguity and reduced image spatial …
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