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Showing 1 to 4 of 4 for “"surface wave plasma"”.
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Hydrogen surface wave plasma cleaning of the EUV collector
… pattern or immersion lithography to reduce the wavelength and size of the features on the transistor. Going forward, a new technique, extreme ultraviolet (EUV) lithography, is being developed to replace existing technology. EUV light is generated by a laser-produced plasma as opposed to an …
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Tin etching in an EUV source by inherent and surface wave plasma
Submission original under an indefinite embargo labeled 'Open Access'. The submission was exported from vireo on 2022-11-11 without embargo terms
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Modeling and experimental process optimization for a SiH4 + H2 surface wave plasma discharge for silicon photovoltaics
A surface wave plasma source was used for the deposition of amorphous (a-Si) and nanocrystalline (nc-Si) silicon thin films for the manufacture of silicon solar cells. This source was optimized for 900 MHz microwave excitation. The process gases used were silane (SiH4) and hydrogen (H2). The plasma …
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Depositing highly crystalline thin film silicon for photovoltaic solar cells utilizing metal surface wave plasmas
… thesis aims to explore the ability of the Metal Surface Wave Plasma (MSWP) to create low damage, high speed deposited silicon thin films for solar photovoltaics. Studies characterizing thin films have been performed in the past, but very few utilizing the MSWP. Due to the high electron densities …