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Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 20 of 57 for “"plasma source"”.
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Characterization of a piezoelectric transformer plasma source
The piezoelectric transformer plasma source (PTPS) is a compact RF driven plasma source developed for near-space and microspacecraft propulsion. The PTPS uses the mass transfer of emitted charged particles from the plasma to produce thrust. The PTPS utilizes the piezoelectric transformer effect to …
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Development of a MeVVA based beryllium-7 plasma source
We have designed a new type of plasma gun ion source for a Malmberg-Penning trap based on Metal Vapor Vacuum Arc (MeVVA) ion source designs. Our primary intent with this MeVVA-type source is to create a confinable beryllium-7 (7-Be) plasma. 7-Be is a peculiar isotope due to its varying radioactive …
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Analysis of power balance in a helicon plasma source
… thesis analyses the Helicon Injected Inertial Plasma Electrostatic Rocket (HIIPER), a space propulsion concept consisting of a helicon source for plasma generation and an ion extraction method using a nested pair of inertial electrostatic confinement (IEC) grids that are asymmetrically …
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Design and Characterization of a Plasma Source for Ion Bombardment
Made available in DSpace on 2017-07-06T18:56:15Z (GMT). No. of bitstreams: 3 Schultz_Benjamin_J_MS.pdf: 1476291 bytes, checksum: ea900ce1e7fcb7dc660f02399e8150e4 (MD5) Schultz_Benjamin_J_MS_ABS.pdf: 50666 bytes, checksum: 49ed1e0372f7784eefbecbfd08e28eea (MD5) license.txt: 4813 bytes, checksum: …
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Power balance in a helicon plasma source for space propulsion
… of an electric thruster based on a helicon plasma source is presented. The power balance is shown to be comprised of several variables, including the RF power supplied to the system, dissipative losses in transmission hardware, losses in the neutral confinement tube, uncoupled RF radiation, …
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Computational Analysis and Design of the Electrothermal Energetic Plasma Source Concept
Electrothermal (ET) Plasma Technology has been used for many decades in a wide variety of scientific and industrial applications. Due to its numerous applications and configurations, ET plasma sources can be used in everything from small scale space propulsion thrusters to large scale material …
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Fundamental studies of the analytical applications of an inductively coupled plasma source.
Abstract not provided.
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Study of surface kinetics in PECVD chamber cleaning using remote plasma source
… to characterize the Transformer Coupled Toroidal Plasma (TCTP); to understand gas phase reactions and surface reactions of neutrals in the cleaning chamber by analyzing the concentration of neutrals in downstream cleaning process chamber; and to make a global model that predicts the partial …
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Optimization of a helicon plasma source for maximum density with minimal ion heating
… ion temperatures in an argon helicon plasma are presented for five different antennas: A Nagoya type III antenna, a double-saddle antenna, a 19 cm long m = +1 helical antenna, a 30 cm long m = +1 helical antenna and a 19 cm m = +1 helical antenna with wide straps. Electromagnetic wave …
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N2, O2, and NF3 Dissociation in a Low Frequency, High Density Plasma Source
… (4.0 Torr), inductively-coupled toroidal remote plasma source from MKS Instruments, operating at a power density of 5 – 50 W/cm3. The dissociation of O2 drops from 60% to 10% with an increase of O2 percentage. For NF3, the dissociation to form F rises with an increase of NF3 percentage from 20% …
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An analysis of energy balance in a helicon plasma source for space propulsion
… thesis covers work done on the mHTX@MIT helicon source as it relates to the analysis of power losses. A helicon plasma is a rather complex system with many potential loss mechanisms. Among the most dominant are optical radiation emission, wall losses due to poor magnetic confinement, and poor …
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Development of a plasma source ion implantation facility for the modification of materials' surfaces
In Plasma Source Ion Implantation high energy [10-50 keV] plasma ions are implanted into materials to modify surface properties, achieving surface hardening, increased wear and corrosion resistance. Plasma Source Ion Implantation is alos used for doping semiconductors and could form an essential …
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Characterization of a Magnetically Contained Hot Filament Plasma Source with a Wide-Sweeping Langmuir Probe
<p>Ionospheric plasma research in the Space and Atmospheric Instrumentation Laboratory’s Space Plasma Chamber has been hindered by the lack of a suitable plasma diagnostic instrument and understanding of its hot-filament plasma source. This thesis describes efforts made to remedy both problems. A …
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Cleaning of tin debris by reactive ion etching in a discharge-produced EUV plasma source
… can be generated by making hot (Te ∼ 30 eV) plasma, and collected by optical mirrors in vacuum. During the light generation process, energetic ions or neutral debris are emitted from the plasma in addition to the desired light. The contamination by such debris will critically affect the life …
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Development of a ferroelectric plasma source through material degradation studies and characterization of volume and surface discharges
The efficiency and lifetime of a plasma source or charged particle emitter is partially limited by the materials used. A particular case of this is a ferroelectric plasma source (FPS) or ferroelectric electron emitter (FEE), in which a strongly polarizable material, capable of generating large …
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Chemical Vapor Deposition of Transition Metal Diborides From Borohydride Precursors
… by using atomic hydrogen, produced in a remote plasma source, as the suppressor. Growth suppression by atomic nitrogen enabled bottom-up filling of a 19:1 aspect ratio trench with an Hf-B-N film.
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Two-dimensional, Hydrodynamic Modeling of Electrothermal Plasma Discharges
… have been developed to model electrothermal (ET) plasma discharges. ET plasma discharges are capillary discharges that draw tens of kA of electric current. The current heats the plasma, and the plasma radiates energy to the capillary walls. The capillary walls ablate by melting and vaporizing and …
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Empirical aspects of a Mini-Helicon Plasma Thruster Experiment (mHTX@MIT)
A helicon plasma source experiment has been developed and then constructed in the MIT Space Propulsion Laboratory (SPL) vacuum chamber. This experiment allows study of the intrinsic advantages of efficient helicon plasma production for use in space electric propulsion. Historical helicon experiment …
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Ion Transmission in the first vacuum stage of an Inductively Coupled Plasma Mass Spectrometer
The inductively coupled plasma mass spectrometer (ICP-MS) is the instrument of choice for trace and ultra-trace elemental analysis. However, the ICP-MS suffers from matrix effects. Matrix effects occur when instrument response varies as the composition of the sample matrix is changed. Matrix …
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