Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 20 of 33 for “"Sub-100 nm"”.
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Device design and process technology for sub-100 nm SOI MOSFET's
… alternative to bulk-silicon MOSFET's in the sub-100 nm gate length regime due to improved performance and/or scalability. The SOI layer thickness in SOI MOSFET's can be sized so that the channel is either partially- or fully-depleted-of majority carriers. Partially-depleted (PD) SOI MOSFET's …
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Modeling of electron transport in sub-100 nm channel length silicon MOSFETs
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1995.
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A new inverse-modeling-based technique for sub-100-nm MOSFET characterization
… As MOSFET transistor gates are scaled to the sub- I 00 nm regime, however, subtle details of the two-dimensional (2D) and three-dimensional (3D) redistribution of dopants, due to thermal diffusion during the fabrication process, strongly determine the short channel effects, which ultimately …
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Trade-offs between performance and reliability of sub 100-nm RF-CMOS technologies
… between performance and reliability in sub 100-nm silicon-on-insulator (SOI) CMOS technologies. Such trade-offs can be used to demonstrate high performance reliable circuits in scaled technologies. Several CMOS reliability concerns such as hot-carrier stress, ionizing irradiation damage, …
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Design and characterization of Si/SiGe heterostructure sub-100 nm bulk p-MOSFET
… gate length of CMOS device is scaled down to the sub-100 nanometer node, the development of devices faces many technological challenges, which are related to material and process integration. As a new channel material, compressively strained SiGe layer grown directly on the bulk Si is attractive …
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Magnetostatic interaction in nanowires
… on the field driven domain wall statistics in sub-100 nm wide nanowires made from Co films of 8 nm thickness made by an electron beam lithography and etching process that minimizes edge roughness.
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Elastomeric contact printing for sub-micron patterning of organic films
… stamps, organic films can be patterned at a sub-100 nm length scale. Among other features, this patterning process has enabled patterning of Organic Light Emitting Diodes on a wavelength scale to reduce total internal reflection and thereby enhance the outcoupling of light from the device.
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Toward the end of the MOSFET roadmap : investigating fundamental transport limits and device architecture alternatives
… for electrostatically sound devices reaching 30 nm or below: near the prospective scaling limits for traditional bulk MOSFETs. This work investigates several key issues for this "end of roadmap" regime. Focus is on understanding the limitations to carrier velocity in MOSFET inversion layers as …
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Nanostructuring magnetic thin films using interference lithography
… is examined in the context of patterning ~100 nm size features. An interferometer is designed and built which will allow exposure of gratings and grids with a minimum spatial period of ~ 170 nm. Etching methods, especially ion-beam etching, or ion milling, is investigated as the optimal …
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High-speed modulation of resonant CMOS photonic modulators in deep-submicron CMOS
… monolithically-integrated modulator in a sub-100 nm CMOS process.
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Fabrication and characterization of nanofluidic channels for studying molecular dynamics in confined environments
… and limitation of PDMS micromolding and the substrate bonding techniques including both anodic (Si-glass) and thermal fusion (glass-glass) bonding, in fabricating sub-100-nm thick nanofluidic channels, which will be used for a controlled experimental study of molecular and fluidic transport …
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Development of nanoparticles for oral delivery of insulin
… GI tract must have (1) high insulin loading, (2) sub-100 nm size, (3) ability to release insulin before opsonization by macrophages and (4) the ability to be surface-functionalized with ligands that facilitate transport across the epithelium. This work presents a detailed study on mechanistic …
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Exploration of disruptive technologies for low cost RFID manufacturing
… with participation from 5 universities and over 100 industry partners. The primary focus of these efforts has been in developing a standard which minimizes the logic capability of on chip circuitry and using radical innovations to reduce the cost of assembly of the RFID tags. Various disruptive …
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Multimaterial multifunctional fiber devices
… complex geometries with small feature sizes (sub 100 nm), while maintaining high quality interfaces. Sophisticated logic and detection functions are realized through the integration of many such devices onto a chip. Conventional optical fibers have been restricted to insulating materials, much …
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Airborne Nanoparticles: Generation, Characterization, and Occupational Exposure
… is known about the unintended health or environmental effects of manufactured nanomaterials. The development of nanotechnology risk assessments and regulations requires quantitative information on the potential for exposure to nanomaterials. In addition, to facilitate life-cycle assessments and …
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Batch and continuous production of stable dense suspensions of drug nanoparticles in a wet stirred media mill
… production of truly nanosized drug particles (10-100 nm) with acceptable physical stability and minimal contamination with the media. Recirculation mode of milling operation, where the drug suspension in a holding tank continuously circulates through the stirred media mill, has been commonly used …
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Fabrication process changes for performance improvement of an RF MEMS resonator : conformable contact lithography, Moiré alignment, and chlorine dry etching
… fine-feature patterning and Moiré -based alignment techniques to allow for a non-self-aligned process. The resulting control over feature size and structure are expected to improve Q and enable higher frequency resonators. A CCL process utilizing moir6 alignment marks is described. An …
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Fabrication of Zeolite MFI Membranes on Low Cost Polymer Supports
… °C and UV/ozone treatment, were identified with sub-100 nm MFI membranes supported on quartz supports. These two methods were then applied to MFI membranes supported on mesh-polyethersulfone (PES) supports and MFI membranes supported on mesh-polybenzimidazole supports. However, cracks formed …
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Probing the formation of mammalian cell lipid microdomains with nanometer-scale imaging secondary ion mass spectrometry
… of a homogeneous to a more heterogenous environment of proteins and lipids. The complexity of living cells have made for difficulties in obtaining a complete understanding of the plasma membrane, especially that of the sphingolipids’ organization. The recent application of imaging mass …
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Addressing performance bottlenecks for top-down engineered nanowire transistors
… as the scaling dimensions shrink down to the sub-100 nm regime, immense physical challenges make the use of conventional scaling techniques alone insufficient. Novel one-dimensional (1D) structures such as semiconductor nanowires (NWs) are considered to be promising structures for nanoscale …
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