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Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 20 of 221 for “"Photolithography"”.
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Double-Exposure Gray-Scale Photolithography
… light intensity in a process termed gray-scale photolithography. Light modulation is accomplished by diffraction through sub-resolution pixels on a photomask. The number of photoresist levels is determined by the number of different pixel sizes on the mask, which is restricted by mask …
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Scaleable nanomanufacturing of metasurfaces using microsphere photolithography
… that limits their implementations. Microsphere photolithography (MPL) uses a scalable self-assembled microsphere array as an optical element to focus collimated light to nanoscale photonic jets in a photoresist layer. This dissertation investigates the fabrication capabilities, process control, …
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Functionalization of Surfaces Using Photolithography and Other Techniques
… application as a microarray was explored. Photolithography and soft lithography approaches were tested to create these amine-functionalized surfaces. In addition, silicon nitride surfaces were investigated as a suitable substrate for alkylphosphonate SAMs. A variety of surface techniques …
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Automating microscopic image analysis post-photolithography with machine learning
Submission original under an indefinite embargo labeled 'Open Access'. The submission was exported from vireo on 2024-09-16 without embargo terms
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Precision six degrees of freedom magnetically-levitated photolithography stage
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1998.
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Nodal photolithography : lithography via far-field optical nodes in the resist
In this thesis, I investigate one approach - stimulated emission depletion - to surmounting the diffraction limitation of optical lithography. This approach uses farfield optical nodes to orchestrate reversible, saturable optical transitions in certain photoresist compounds. After addressing prior …
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Development of Molecular Glasses for Solvent-Free Photolithography utilizing Combinatorial Vapor Deposition
… film deposition via PVD as well as subsequent photolithography processes. Three ternary systems were identified to accomplish the requirements (vapor depositability, formation of glassy films, photostructurability). Each of them consists of a molecule with several phenolic groups, an acid …
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Development of three-dimensional (3D) grayscale Photolithography process for microfluidic curvature Structures
… is required. To achieve such control, grayscale photolithography technique has been comprehensively studied as an alternative to the current 3D microfabrication technique. Current techniques require highly sophisticated and PTTA expensive equipments, with slow point-to-point or layer-by-layer …
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Photolithography and surface modification applications of a 172 nanometer xenon microplasma excilamp
A high power 172 nm vacuum ultraviolet (VUV) excimer lamp has been utilized in defining patterns on a photoresist. The mechanism by which the lamp works is different from conventional methods as the photoresist is removed at a rate of 3.3 nm/s from the substrate and no development is required. This …
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Reticle Stage Actuation Concepts for High Acceleration Trajectories in Next-generation Photolithography Tools
In photolithography scanning tools, the functional patterns of integrated circuit layers are defined with critical dependence on the actuation of reticle and wafer stages along precisely synchronized trajectories. Patterning throughput of such tools is limited based on the velocity and acceleration …
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Integration of pentacene-based thin film transistors via photolithography for low and high voltage applications
An organic thin film transistor (OTFT) technology platform has been developed for flexible integrated circuits applications. OTFT performance is tuned by engineering the dielectric constant of the gate insulator and the insulator/semiconductor interface. Full integration is enabled by a low …
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Ultrasonic Degradation of Link-Functionalized Polymers for the Activation of Chemical Reactions
… school students that promotes understanding of photolithography, crosslinking density, and the process of photopolymerization, while demonstrating the power of rapid prototyping used to fabricate microscale devices. The versatility of photolithography for microchip construction is exemplified by …
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Impact of Lot Dedication on the Performance of the Fab
Photolithography is the most complex of the operations involved in the fabrication of a wafer, and it requires the greatest precision. Photolithography is used to create multiple layers of circuit patterns on a chip. Traditionally, wafer fab operations, and in particular, those performed in the …
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Magnetically levitated hysteresis motor driven linear stage for in-vacuum transportation tasks
… mechanism for extreme ultraviolet (EUV) photolithography machines. In the photolithography process, the reticle is a quartz plate that contains a pattern of the integrated circuit, which needs to be transported between a storage position and the exposure stage. In next-generation EUV …
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Controlling Surface Chemistry on the Microscopic and Nanoscopic Scale through Photopatterned Self-Assembled Monolayers
… for self-assembled monolayers: SAMs) using photolithography described here allows for the production of highly functional substrates for biological applications. Photolithography methods have been developed that utilize either high or low irradiation doses of 325 nm ultraviolet light. …
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Transfer printing based microassembly and colloidal quantum dot film integration
… monolithic microfabrication relying on photolithography has been the primary method to manufacture micro / nanoscale structures and devices in place of microassembly. However, by virtue of the two-dimensional (2D) nature of photolithography, formation of complex 3D shape architectures …
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Development of photochemical etching and its application in fabrication of integrated reflector metal semiconductor metal photodetectors
"Photolithography and etching form the basis of any microfabrication process. Consequently, there is a lot of interest in the research community to improve and innovate on these crucial steps so as to realize the fabrication of complex devices. Once limited to use as physical photomasks for …
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Grafeno ant skandžio oksido fotolitografija /
… fabrication methods, such as laser photolithography and physical vapor deposition. This research was a part of a project carried out by NFTMC Vilnius University Photonics and Nanotechnology Institute (VUFNI). The research group to which I belong at the institute is the nitride …
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Photonic Crystal Enhanced-Fluorescence and Label -Free Bioimaging
… a resolution standard onto the sensor using photolithography, and excellent design control over label-free imaging resolution is demonstrated. The spectral response of a photonic crystal is optimized for improved label-free imaging of immobilized DNA microarray capture spots. Applications to …
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