Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 20 of 92 for “"DRIE"”.
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Analysis of DRIE uniformity for microelectromechanical systems
… density effects in Deep Reactive Ion Etch (DRIE), which are important in MEMS, is presented. Our previous work has explored the causes of wafer-level variation and demonstrated die-to-die interactions resulting from pattern density and reactant species consumption. Several reports have …
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Marktstructurering als ruimtelijkeordeningsinstrument : verkenning van drie rechtsarrangementen in de woningbouwmarkt
Contains fulltext : 91392.pdf (Publisher’s version ) (Open Access)
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Tyd as struktuurelement in speur- en misdaadfiksie met spesifieke verwysing na drie tekste deur Deon Meyer
This study explores the structure of crime and detective fiction. It takes the view that certain texts do not adopt either form specifically, but often adopts a combination thereof. It looks at the role which time plays in the structure of these forms by examining the time strategies that are …
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A process technology for realizing integrated inertial sensors using deep reactive ion etching (DRIE) and aligned wafer bonding
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1999.
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Administrasie in die maatskaplike werk met besondere verwysing na vier funksies in bestuur, naamlik beplanning, organisasie, leidinggewing en beheer, soos toegepas in drie geselekteerde projekte
… vanaf 1980 tot die begin van 1983. Dit beskryf drie maatskaplikewerkprojekte. Die skryfster gaan van die hipotese uit dat die sukses van 'n maatskaplikewerk-projek in 'n groot mate afhang van doelgerigte administrasie daarvan. Die studieveld is dus maatskaplikewerk-administrasie. Vier …
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Pleegouers : 'n ondersoek met verwysing na die omstandighede van blanke pleegsouers in Kaapstad
… in pleegsorg het ontwikkel gedurende die drie jaar wat sy as sekretaresse van die Vereniging vir Kinderbeskerming in Kaapstad werksaam was. Hoewel die ondersoeker reeds die afgelope drie jaar in 'n ander werkkring staan, word die leemtes wat in pleegsorg bestaan, maar ook die waarde wat …
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Design, fabrication, and characterization of a compact deep reactive ion etching system for MEMS processing
… equipment, a deep reactive ion etcher (DRIE). DRIE tools are used to create highly anisotropic, high aspect-ratio trenches in silicon-a crucial element in the production of many microelectromechanical systems (MEMS) devices. We are targeting the Bosch Process method of DRIE, which is a …
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Characterization and modeling of pattern dependencies and time evolution in plasma etching
… of the etch rate in Deep Reactive Ion Etching (DRIE) is presented. DRIE is a key process for pattern formation in semiconductor fabrication. Non-uniformities are caused due to microloading and aspect ratio dependencies. The etch rate varies over time and lateral etch consumes some of the etching …
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Fuzzy rough set methods for emotion detection and sentiment analysis
… learning-methoden. Voor de ABSA-taak stellen we drie pijplijnen voor met FRNN-gebaseerde methoden die een hoge nauwkeurigheid opleveren voor alle drie de stappen: aspect-, sentiment- en emotieclassificatie. Een ander belangrijk kenmerk van onze aanpak is haar uitlegbaarheid. We kunnen onze aanpak …
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Noninvasive evaluation of patients with coronary artery disease and heart failure
… en hartfalen. De thesis is onderverdeeld in drie delen: 1. Niet-invasieve inschatting van vuldrukken door middel van geavanceerde echocardiografische technieken 2. Selectie van kandidaten voor cardiale resynchronizatietherapie met echocardiografie, nucleaire technieken en multi slice CT 3. …
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Fabrication of high-throughput critical-angle X-ray transmission gratings for wavelength-dispersive spectroscopy
… a record-performance deep reactive-ion etch (DRIE) for ultra-high aspect ratio gratings. The mask is the integration of a 5 micron and 200 nanometer-pitch grating into a single layer of 300 nanometer-thick thermal silicon dioxide. It spans 5 centimeters on a side, with vertical sidewalls, and …
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Stormwatersloot
In hierdie novelle, wat oor 'n tydperk van drie dae afspeel, word drie karakters se lewens verwoes nadat hulle vroeg een oggend 'n misdaad pleeg op pad terug van 'n partytjie. Die verhaal speel af in 'n moderne stad, wat bekend voorkom dog vreemd is; asof dit 'n dekade of twee in die toekoms is, …
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A feature-to-wafer-scale model of etch-rate non-uniformity in deep reactive ion etching/
Deep Reactive Ion Etching (DRIE) is an inherently complex dry etching process commonly used in the semiconductor manufacturing industry. This work presents a new modeling approach to capture global etch rate variation in DRIE by integrating wafer- and feature-scale nonuniformity models that are …
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Fabrication of Three-Dimensionally Independent Microchannels Using a Single Mask Aimed at On-Chip Microprocessor Cooling
… using SF6 gas in a deep reactive ion etcher (DRIE) after a single etch step. The mechanism allowing for different feature depths and widths to be produced over a wafer is reactive ion etch lag, where etch rate scales with the exposed feature size in the mask. A modified Langmuir model has been …
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Die implementering van die Lewensvaardigheid Kurrikulum- en Assesseringsbeleidsverklaring vir verstandelik erg gestremde leerders in skole vir leerders met spesiale onderwysbehoeftes
… deelnemers oor die KABV vir VEG leerders en die drie verskillende Lewensvaardigheidkurrikulums ingesluit. Drie tot vier fokusgroepbesprekings is gehou by elk van die gekose skole waar die deelnemers die betekenis van hul collages bespreek het. Met die ontleding van die data is die bevindings van …
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An electrothermally-actuated bistable MEMS relay for power applications
… of a silicon wafer using deep reactive ion etch (DRIE), move laterally in the plane of the wafer. The synthesis, analysis, design, fabrication and testing of the relay are all described in this thesis. The bistable mechanism comprises two parallel cosine curved clamped-clamped beams that are also …
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Single crystal silicon as a macro-world structural material : application to compact, lightweight high pressure vessels
… pressure vessel design, identification of DRIE failure mechanisms, elucidation of the role of wafer-level strength variation related to surface morphology variation in wafer-scale structures, and identification of promising strength recovery techniques and promising avenues to explore for …
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