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Showing 1 to 2 of 2 for “"Cathode sputtering"”.
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Hollow cathode sputtering system - installation, operation and theoretical background
… was to assemble, install and operate a hollow cathode sputtering system (HCSS). Therefore a complex vacuum system was built to create the right sputtering environment. The purpose of the HCSS is to develop advanced thin conducting oxides (TCOs) as well as high resistivity transparent (HRT) …