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University of Illinois at Urbana-Champaign

Metal-assisted chemical etching as a disruptive platform for multi-dimensional semiconductor sculpting

dc:creator Balasundaram, Karthik

thesis:degree_name Ph.D.

dc:date2015

Abstract

dc:description

The student, Karthik Balasundaram, submitted this Dissertation for approval on 2015-06-18 at 16:07.

Degree

thesis:*

Name thesis:degree_name: Ph.D.
Level thesis:degree_level: Dissertation
Discipline thesis:degree_discipline: Electrical & Computer Engr
Grantor: University of Illinois at Urbana-Champaign
Year dc:date: 2015

Author and committee

dc:creator, dc:contributor.*

Author dc:creator: Balasundaram, Karthik
Contributors dc:contributor: Li, Xiuling
Eden, Gary J.
Ferreira, Placid M.
Ruzic, David N.

Subjects

dc:subject × 3

Rights

dc:rights

Statement dc:rights: Copyright 2015 Karthik Balasundaram
Language dc:language: en

Identifiers

dc:identifier.*

Handle dc:identifier: http://hdl.handle.net/2142/87969
OAI identifier oai:identifier: oai:www.ideals.illinois.edu:2142/87969

Chain of custody

source

Harvested from: University of Illinois - Urbana-Champaign
Base URL: www.ideals.illinois.edu/oai-pmh
Last updated: 2026-07-22
Source record: OAI-PMH GetRecord

related terms

citation

Balasundaram, Karthik. Metal-assisted chemical etching as a disruptive platform for multi-dimensional semiconductor sculpting. Dissertation thesis, University of Illinois at Urbana-Champaign, 2015. http://hdl.handle.net/2142/87969

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