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Purdue University

Radiation Induced Surface Modification and Contamination for EUV Lithography and Fusion Applications

Degree

thesis:*
Name thesis:degree_name
Doctor of Philosophy (PhD)
Level thesis:degree_level
Dissertation
Discipline thesis:degree_discipline
Nuclear Engineering
Year
2014

Author and committee

dc:creator, dc:contributor.*
Author dc:creator
  • Al-Ajlony, Al-Montaser Bellah Ahmad
Contributors dc:contributor
  • Ahmed Hassanein
  • Anter El-Azab
  • Edwin Garcia
  • Sivanandan Harilal
  • Zinetula Insepov

Identifiers

dc:identifier.*
OAI identifier oai:identifier
oai:docs.lib.purdue.edu:open_access_dissertations-2257

Chain of custody

source
Harvested from
Purdue University
Base URL
docs.lib.purdue.edu/do/oai/
Last updated
2026-07-24
Source record
OAI-PMH GetRecord
related terms
citation

Al-Ajlony, Al-Montaser Bellah Ahmad. Radiation Induced Surface Modification and Contamination for EUV Lithography and Fusion Applications. Dissertation thesis, 2014. https://docs.lib.purdue.edu/open_access_dissertations/1046