{"id":{"repo_id":"purdue-thes","oai_identifier":"oai:docs.lib.purdue.edu:open_access_dissertations-2257"},"canonical_url":"https://search.dev.ndltd.org/etd/purdue-thes/oai:docs.lib.purdue.edu:open_access_dissertations-2257","repository":{"repo_id":"purdue-thes","name":"Purdue University","base_url":"https://docs.lib.purdue.edu/do/oai/"},"display":{"title":"Radiation Induced Surface Modification and Contamination for EUV Lithography and Fusion Applications","abstract":"","abstract_html":null,"abstract_has_math":false,"creators":["Al-Ajlony, Al-Montaser Bellah Ahmad"],"institution":null,"degree_name":"Doctor of Philosophy (PhD)","degree_level":"Dissertation","degree_discipline":"Nuclear Engineering","degree_department":null,"school":null,"contributors":["Ahmed Hassanein","Anter El-Azab","Edwin Garcia","Sivanandan Harilal","Zinetula Insepov"],"advisors":[],"committee_chairs":[],"committee_members":[],"year":2014,"date_issued":"2014-05-01T07:00:00Z","date_published":"2014-05-01T07:00:00Z","updated_at":"2026-07-24T03:54:17Z","subjects":[],"languages":[],"rights":[],"rights_urls":[],"identifier_entries":[]},"links":{"outbound_url":"https://docs.lib.purdue.edu/open_access_dissertations/1046","outbound_label":"Repository record","outbound_source":"dc:identifier"},"metadata_groups":[{"id":"people","label":"People","entries":[{"key":"dc:contributor","label":"Contributor","values":["Ahmed Hassanein","Anter El-Azab","Edwin Garcia","Sivanandan Harilal","Zinetula Insepov"]},{"key":"dc:creator","label":"Author","values":["Al-Ajlony, Al-Montaser Bellah Ahmad"]}]},{"id":"academic_context","label":"Academic Context","entries":[{"key":"thesis:degree_discipline","label":"Discipline","values":["Nuclear Engineering"]},{"key":"thesis:degree_level","label":"Degree Level","values":["Dissertation"]},{"key":"thesis:degree_name","label":"Degree Name","values":["Doctor of Philosophy (PhD)"]}]},{"id":"identifiers","label":"Identifiers","entries":[{"key":"dc:identifier","label":"Identifier","values":["https://docs.lib.purdue.edu/open_access_dissertations/1046"]}]},{"id":"additional","label":"Additional Metadata","entries":[{"key":"dc:title","label":"Title","values":["Radiation Induced Surface Modification and Contamination for EUV Lithography and Fusion Applications"]}]}],"canonical_facts":{"dc:contributor":["Ahmed Hassanein","Anter El-Azab","Edwin Garcia","Sivanandan Harilal","Zinetula Insepov"],"dc:creator":["Al-Ajlony, Al-Montaser Bellah Ahmad"],"dc:identifier":["https://docs.lib.purdue.edu/open_access_dissertations/1046"],"dc:title":["Radiation Induced Surface Modification and Contamination for EUV Lithography and Fusion Applications"],"thesis:degree_discipline":["Nuclear Engineering"],"thesis:degree_level":["Dissertation"],"thesis:degree_name":["Doctor of Philosophy (PhD)"]},"updated_at":"2026-07-24T03:54:17Z"}