IMPROVED SENSITIVITY OF RESONANT MASS SENSOR BASED ON MICRO TILTING PLATE AND MICRO CANTILEVER

Song, Xiaoyu

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Michigan Technological University

IMPROVED SENSITIVITY OF RESONANT MASS SENSOR BASED ON MICRO TILTING PLATE AND MICRO CANTILEVER

dc:creator Song, Xiaoyu

thesis:degree_name Master of Science in Mechanical Engineering (MS)

Degree

thesis:*

Name thesis:degree_name: Master of Science in Mechanical Engineering (MS)
Level thesis:degree_level: Master's Thesis

Author and committee

dc:creator, dc:contributor.*

Author dc:creator: Song, Xiaoyu
Contributors dc:contributor: Michele H. Miller

Subjects

dc:subject × 3

Identifiers

dc:identifier.*

Identifier: https://digitalcommons.mtu.edu/etds/934
OAI identifier oai:identifier: oai:digitalcommons.mtu.edu:etds-1935

Chain of custody

source

Harvested from: Michigan Technological University
Base URL: digitalcommons.mtu.edu/do/oai/
Last updated: 2026-07-27
Source record: OAI-PMH GetRecord

related terms

citation

Song, Xiaoyu. IMPROVED SENSITIVITY OF RESONANT MASS SENSOR BASED ON MICRO TILTING PLATE AND MICRO CANTILEVER. Master's Thesis thesis, https://doi.org/10.37099/mtu.dc.etds/934

IMPROVED SENSITIVITY OF RESONANT MASS SENSOR BASED ON MICRO TILTING PLATE AND MICRO CANTILEVER

Degree

Author and committee

Subjects

Identifiers

Chain of custody

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