{"id":{"repo_id":"mtu","oai_identifier":"oai:digitalcommons.mtu.edu:etds-1935"},"canonical_url":"https://search.dev.ndltd.org/etd/mtu/oai:digitalcommons.mtu.edu:etds-1935","repository":{"repo_id":"mtu","name":"Michigan Technological University","base_url":"https://digitalcommons.mtu.edu/do/oai/"},"display":{"title":"IMPROVED SENSITIVITY OF RESONANT MASS SENSOR BASED ON MICRO TILTING PLATE AND MICRO CANTILEVER","abstract":"","abstract_html":null,"abstract_has_math":false,"creators":["Song, Xiaoyu"],"institution":null,"degree_name":"Master of Science in Mechanical Engineering (MS)","degree_level":"Master's Thesis","degree_discipline":null,"degree_department":null,"school":null,"contributors":["Michele H. Miller"],"advisors":[],"committee_chairs":[],"committee_members":[],"year":null,"date_issued":"","date_published":null,"updated_at":"2026-07-27T20:20:59Z","subjects":["Microelectrical mechanical systems (MEMS)","COMSOL","Mechanical Engineering"],"languages":[],"rights":[],"rights_urls":[],"identifier_entries":[{"key":"dc:identifier","label":"Identifier","values":["https://digitalcommons.mtu.edu/etds/934"],"render_values":[{"text":"https://digitalcommons.mtu.edu/etds/934","href":"https://digitalcommons.mtu.edu/etds/934","code":true}]}]},"links":{"outbound_url":"https://doi.org/10.37099/mtu.dc.etds/934","outbound_label":"DOI","outbound_source":"dc:identifier"},"metadata_groups":[{"id":"people","label":"People","entries":[{"key":"dc:contributor","label":"Contributor","values":["Michele H. Miller"]},{"key":"dc:creator","label":"Author","values":["Song, Xiaoyu"]}]},{"id":"academic_context","label":"Academic Context","entries":[{"key":"thesis:degree_level","label":"Degree Level","values":["Master's Thesis"]},{"key":"thesis:degree_name","label":"Degree Name","values":["Master of Science in Mechanical Engineering (MS)"]}]},{"id":"subjects_keywords","label":"Subjects and Keywords","entries":[{"key":"dc:subject","label":"Dc Subject","values":["Microelectrical mechanical systems (MEMS)","COMSOL","Mechanical Engineering"]}]},{"id":"identifiers","label":"Identifiers","entries":[{"key":"dc:identifier","label":"Identifier","values":["10.37099/mtu.dc.etds/934","https://digitalcommons.mtu.edu/etds/934"]}]},{"id":"additional","label":"Additional Metadata","entries":[{"key":"dc:title","label":"Title","values":["IMPROVED SENSITIVITY OF RESONANT MASS SENSOR BASED ON MICRO TILTING PLATE AND MICRO CANTILEVER"]}]}],"canonical_facts":{"dc:contributor":["Michele H. Miller"],"dc:creator":["Song, Xiaoyu"],"dc:identifier":["10.37099/mtu.dc.etds/934","https://digitalcommons.mtu.edu/etds/934"],"dc:subject":["Microelectrical mechanical systems (MEMS)","COMSOL","Mechanical Engineering"],"dc:title":["IMPROVED SENSITIVITY OF RESONANT MASS SENSOR BASED ON MICRO TILTING PLATE AND MICRO CANTILEVER"],"thesis:degree_level":["Master's Thesis"],"thesis:degree_name":["Master of Science in Mechanical Engineering (MS)"]},"updated_at":"2026-07-27T20:20:59Z"}