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Massachusetts Institute of Technology
Design of a precision chemical mechanical planarization research system
Abstract
dc:descriptionThesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2000.
Degree
thesis:*- Department dc:contributor.department
- Massachusetts Institute of Technology. Department of Mechanical Engineering.
- Grantor dc:publisher
- Massachusetts Institute of Technology
- Year dc:date.issued
- 2000
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Hashemi, Fardad Ali, 1976-
- Advisor dc:contributor.advisor
-
- Ernesto E. Blanco.
Subjects
dc:subject × 1Rights
dc:rights- Statement dc:rights
-
- M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
- Licence dc:rights.uri
- Language dc:language.iso
- eng
Identifiers
dc:identifier.*- Handle dc:identifier.uri
- http://hdl.handle.net/1721.1/89285
- OAI identifier oai:identifier
- oai:dspace.mit.edu:1721.1/89285