{"id":{"repo_id":"mit","oai_identifier":"oai:dspace.mit.edu:1721.1/89285"},"canonical_url":"https://search.dev.ndltd.org/etd/mit/oai:dspace.mit.edu:1721.1/89285","repository":{"repo_id":"mit","name":"MIT","base_url":"https://dspace.mit.edu/oai/request"},"display":{"title":"Design of a precision chemical mechanical planarization research system","abstract":"Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2000.","abstract_html":"Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2000.","abstract_has_math":false,"creators":["Hashemi, Fardad Ali, 1976-"],"institution":"Massachusetts Institute of Technology","degree_name":null,"degree_level":null,"degree_discipline":null,"degree_department":"Massachusetts Institute of Technology. Department of Mechanical Engineering.","school":null,"contributors":[],"advisors":["Ernesto E. Blanco."],"committee_chairs":[],"committee_members":[],"year":2000,"date_issued":"2000","date_published":"2000","updated_at":"2026-07-22T22:21:27Z","subjects":["Mechanical Engineering."],"languages":["eng"],"rights":["M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission."],"rights_urls":["http://dspace.mit.edu/handle/1721.1/7582"],"identifier_entries":[]},"links":{"outbound_url":"http://hdl.handle.net/1721.1/89285","outbound_label":"Handle","outbound_source":"dc:identifier.uri"},"metadata_groups":[{"id":"people","label":"People","entries":[{"key":"dc:contributor.advisor","label":"Advisor","values":["Ernesto E. Blanco."]},{"key":"dc:contributor.department","label":"Department","values":["Massachusetts Institute of Technology. Department of Mechanical Engineering."]},{"key":"dc:contributor.other","label":"Dc Contributor Other","values":["Massachusetts Institute of Technology. Department of Mechanical Engineering."]},{"key":"dc:creator","label":"Author","values":["Hashemi, Fardad Ali, 1976-"]}]},{"id":"academic_context","label":"Academic Context","entries":[{"key":"dc:date.accessioned","label":"Dc Date Accessioned","values":["2014-09-09T17:51:41Z"]},{"key":"dc:date.available","label":"Dc Date Available","values":["2014-09-09T17:51:41Z"]},{"key":"dc:date.issued","label":"Date","values":["2000"]},{"key":"dc:publisher","label":"Institution","values":["Massachusetts Institute of Technology"]},{"key":"dc:type","label":"Dc Type","values":["Thesis"]}]},{"id":"subjects_keywords","label":"Subjects and Keywords","entries":[{"key":"dc:subject","label":"Dc Subject","values":["Mechanical Engineering."]}]},{"id":"language_rights","label":"Language and Rights","entries":[{"key":"dc:language.iso","label":"Language (ISO)","values":["eng"]},{"key":"dc:rights","label":"Dc Rights","values":["M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission."]},{"key":"dc:rights.uri","label":"Rights URI","values":["http://dspace.mit.edu/handle/1721.1/7582"]}]},{"id":"identifiers","label":"Identifiers","entries":[{"key":"dc:identifier.uri","label":"Identifier URI","values":["http://hdl.handle.net/1721.1/89285"]}]},{"id":"additional","label":"Additional Metadata","entries":[{"key":"dc:description","label":"Description","values":["Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2000.","Includes bibliographical references (leaf 208)."]},{"key":"dc:description.degree","label":"Dc Description Degree","values":["S.M."]},{"key":"dc:title","label":"Title","values":["Design of a precision chemical mechanical planarization research system"]}]}],"canonical_facts":{"dc:contributor.advisor":["Ernesto E. Blanco."],"dc:contributor.department":["Massachusetts Institute of Technology. Department of Mechanical Engineering."],"dc:contributor.other":["Massachusetts Institute of Technology. Department of Mechanical Engineering."],"dc:creator":["Hashemi, Fardad Ali, 1976-"],"dc:date.accessioned":["2014-09-09T17:51:41Z"],"dc:date.available":["2014-09-09T17:51:41Z"],"dc:date.issued":["2000"],"dc:description":["Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2000.","Includes bibliographical references (leaf 208)."],"dc:description.degree":["S.M."],"dc:identifier.uri":["http://hdl.handle.net/1721.1/89285"],"dc:language.iso":["eng"],"dc:publisher":["Massachusetts Institute of Technology"],"dc:rights":["M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission."],"dc:rights.uri":["http://dspace.mit.edu/handle/1721.1/7582"],"dc:subject":["Mechanical Engineering."],"dc:title":["Design of a precision chemical mechanical planarization research system"],"dc:type":["Thesis"]},"updated_at":"2026-07-22T22:21:27Z"}