Ferroelektrische Eigenschaften von Kondensatoren mit epitaktischen BaTiO3-Dünnschichten

Abstract Epitaxial BaTiO3 films are interesting for the integration into microelectronics due to the ferroelectric properties and high permittivity. In this work epitaxial BaTiO3 thin-films were grown on conductive layers, SrRuO3 und La2/3Ca1/3MnO3, by pulsed laser deposition. The growth on different single crystalline substrates resulted in BaTiO3 films with high structural perfection and c-axis orientation. An effect of the substrate due to different misfit strain was not observed. For the electrical characterization of the BaTiO3 films in a thin film capacitor structure, Pt top electrodes were deposited by e-beam evaporation. The influence of the BaTiO3 film thickness (100 - 400nm) on the polarization (size effect) was studied. Surprisingly the thinner films show a higher spontaneous polarization. Moreover, the coercive voltage of the films is independent of the film thickness. A correlation between the spontaneous polarization and the misfit strain was not observed. The ferroelectric behavior of the BaTiO3 capacitors was explained qualitatively by a model using an interfacial layer between the bottom electrode and the BaTiO3.

Grantor dc:publisher

Publikationsserver der RWTH Aachen University

Year dc:date

2004

Author dc:creator

• Trithaveesak, Opas

Contributors dc:contributor

• Waser, Rainer

• info:eu-repo/classification/ddc/620
• Schichtkondensator
• Dünne Schicht
• Bariumtitanat
• Ferroelektrikum
• Ingenieurwissenschaften
• Epitaktische BaTiO3-Dünnschichten

Statement dc:rights

• info:eu-repo/semantics/openAccess

Language dc:language

ger

Identifier

https://publications.rwth-aachen.de/search?p=id:%22RWTH-CONV-121529%22

OAI identifier oai:identifier

oai:publications.rwth-aachen.de:59775