{"id":{"repo_id":"aachen","oai_identifier":"oai:publications.rwth-aachen.de:59775"},"canonical_url":"https://search.dev.ndltd.org/etd/aachen/oai:publications.rwth-aachen.de:59775","repository":{"repo_id":"aachen","name":"RWTH Aachen University","base_url":"https://publications.rwth-aachen.de/oai2d"},"display":{"title":"Ferroelektrische Eigenschaften von Kondensatoren mit epitaktischen BaTiO3-Dünnschichten","abstract":"Abstract Epitaxial BaTiO3 films are interesting for the integration into microelectronics due to the ferroelectric properties and high permittivity. In this work epitaxial BaTiO3 thin-films were grown on conductive layers, SrRuO3 und La2/3Ca1/3MnO3, by pulsed laser deposition. The growth on different single crystalline substrates resulted in BaTiO3 films with high structural perfection and c-axis orientation. An effect of the substrate due to different misfit strain was not observed. For the electrical characterization of the BaTiO3 films in a thin film capacitor structure, Pt top electrodes were deposited by e-beam evaporation. The influence of the BaTiO3 film thickness (100 - 400nm) on the polarization (size effect) was studied. Surprisingly the thinner films show a higher spontaneous polarization. Moreover, the coercive voltage of the films is independent of the film thickness. A correlation between the spontaneous polarization and the misfit strain was not observed. The ferroelectric behavior of the BaTiO3 capacitors was explained qualitatively by a model using an interfacial layer between the bottom electrode and the BaTiO3.","abstract_html":"Abstract Epitaxial BaTiO3 films are interesting for the integration into microelectronics due to the ferroelectric properties and high permittivity. In this work epitaxial BaTiO3 thin-films were grown on conductive layers, SrRuO3 und La2/3Ca1/3MnO3, by pulsed laser deposition. The growth on different single crystalline substrates resulted in BaTiO3 films with high structural perfection and c-axis orientation. An effect of the substrate due to different misfit strain was not observed. For the electrical characterization of the BaTiO3 films in a thin film capacitor structure, Pt top electrodes were deposited by e-beam evaporation. The influence of the BaTiO3 film thickness (100 - 400nm) on the polarization (size effect) was studied. Surprisingly the thinner films show a higher spontaneous polarization. Moreover, the coercive voltage of the films is independent of the film thickness. A correlation between the spontaneous polarization and the misfit strain was not observed. The ferroelectric behavior of the BaTiO3 capacitors was explained qualitatively by a model using an interfacial layer between the bottom electrode and the BaTiO3.","abstract_has_math":false,"creators":["Trithaveesak, Opas"],"institution":"Publikationsserver der RWTH Aachen University","degree_name":null,"degree_level":null,"degree_discipline":null,"degree_department":null,"school":null,"contributors":["Waser, Rainer"],"advisors":[],"committee_chairs":[],"committee_members":[],"year":2004,"date_issued":"2004","date_published":"2004","updated_at":"2026-07-30T19:42:48Z","subjects":["info:eu-repo/classification/ddc/620","Schichtkondensator","Dünne Schicht","Bariumtitanat","Ferroelektrikum","Ingenieurwissenschaften","Epitaktische BaTiO3-Dünnschichten"],"languages":["ger"],"rights":["info:eu-repo/semantics/openAccess"],"rights_urls":[],"identifier_entries":[{"key":"dc:identifier","label":"Identifier","values":["https://publications.rwth-aachen.de/search?p=id:%22RWTH-CONV-121529%22"],"render_values":[{"text":"https://publications.rwth-aachen.de/search?p=id:%22RWTH-CONV-121529%22","href":"https://publications.rwth-aachen.de/search?p=id:%22RWTH-CONV-121529%22","code":true}]}]},"links":{"outbound_url":"https://publications.rwth-aachen.de/record/59775","outbound_label":"Repository record","outbound_source":"dc:identifier"},"metadata_groups":[{"id":"people","label":"People","entries":[{"key":"dc:contributor","label":"Contributor","values":["Waser, Rainer"]},{"key":"dc:creator","label":"Author","values":["Trithaveesak, Opas"]}]},{"id":"academic_context","label":"Academic Context","entries":[{"key":"dc:coverage","label":"Dc Coverage","values":["DE"]},{"key":"dc:date","label":"Dc Date","values":["2004"]},{"key":"dc:publisher","label":"Institution","values":["Publikationsserver der RWTH Aachen University"]},{"key":"dc:relation","label":"Dc Relation","values":["info:eu-repo/semantics/altIdentifier/urn/urn:nbn:de:hbz:82-opus-9995"]},{"key":"dc:type","label":"Dc Type","values":["info:eu-repo/semantics/doctoralThesis","info:eu-repo/semantics/publishedVersion"]}]},{"id":"subjects_keywords","label":"Subjects and Keywords","entries":[{"key":"dc:subject","label":"Dc Subject","values":["info:eu-repo/classification/ddc/620","Schichtkondensator","Dünne Schicht","Bariumtitanat","Ferroelektrikum","Ingenieurwissenschaften","Epitaktische BaTiO3-Dünnschichten"]}]},{"id":"language_rights","label":"Language and Rights","entries":[{"key":"dc:language","label":"Dc Language","values":["ger"]},{"key":"dc:rights","label":"Dc Rights","values":["info:eu-repo/semantics/openAccess"]}]},{"id":"identifiers","label":"Identifiers","entries":[{"key":"dc:identifier","label":"Identifier","values":["https://publications.rwth-aachen.de/record/59775","https://publications.rwth-aachen.de/search?p=id:%22RWTH-CONV-121529%22"]}]},{"id":"additional","label":"Additional Metadata","entries":[{"key":"dc:description","label":"Description","values":["Abstract Epitaxial BaTiO3 films are interesting for the integration into microelectronics due to the ferroelectric properties and high permittivity. In this work epitaxial BaTiO3 thin-films were grown on conductive layers, SrRuO3 und La2/3Ca1/3MnO3, by pulsed laser deposition. The growth on different single crystalline substrates resulted in BaTiO3 films with high structural perfection and c-axis orientation. An effect of the substrate due to different misfit strain was not observed. For the electrical characterization of the BaTiO3 films in a thin film capacitor structure, Pt top electrodes were deposited by e-beam evaporation. The influence of the BaTiO3 film thickness (100 - 400nm) on the polarization (size effect) was studied. Surprisingly the thinner films show a higher spontaneous polarization. Moreover, the coercive voltage of the films is independent of the film thickness. A correlation between the spontaneous polarization and the misfit strain was not observed. The ferroelectric behavior of the BaTiO3 capacitors was explained qualitatively by a model using an interfacial layer between the bottom electrode and the BaTiO3."]},{"key":"dc:source","label":"Dc Source","values":["Aachen : Publikationsserver der RWTH Aachen University II, 113 S. : Ill., graph. Darst. (2004). = Aachen, Techn. Univ., Diss., 2004"]},{"key":"dc:title","label":"Title","values":["Ferroelektrische Eigenschaften von Kondensatoren mit epitaktischen BaTiO3-Dünnschichten"]}]}],"canonical_facts":{"dc:contributor":["Waser, Rainer"],"dc:coverage":["DE"],"dc:creator":["Trithaveesak, Opas"],"dc:date":["2004"],"dc:description":["Abstract Epitaxial BaTiO3 films are interesting for the integration into microelectronics due to the ferroelectric properties and high permittivity. In this work epitaxial BaTiO3 thin-films were grown on conductive layers, SrRuO3 und La2/3Ca1/3MnO3, by pulsed laser deposition. The growth on different single crystalline substrates resulted in BaTiO3 films with high structural perfection and c-axis orientation. An effect of the substrate due to different misfit strain was not observed. For the electrical characterization of the BaTiO3 films in a thin film capacitor structure, Pt top electrodes were deposited by e-beam evaporation. The influence of the BaTiO3 film thickness (100 - 400nm) on the polarization (size effect) was studied. Surprisingly the thinner films show a higher spontaneous polarization. Moreover, the coercive voltage of the films is independent of the film thickness. A correlation between the spontaneous polarization and the misfit strain was not observed. 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