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West Virginia University
Electrical characterization of thin film nanostructure templates
Abstract
dc:description.abstractAn improved apparatus for anodizing aluminum films on Si substrates is presented. In addition, an explanation is given for adapting the system to SiC and glass substrates. The system presented is optimized for throughput and safety to focus on volume production. MOS capacitors created with the system are analyzed with capacitance-voltage measurement techniques to provide insight into device operation. Ni is deposited into porous alumina templates to create Ni nanostructures.
Degree
thesis:*- Name thesis:degree_name
- MS
- Level thesis:degree_level
- Thesis
- Discipline thesis:degree_discipline
- Lane Department of Computer Science and Electrical Engineering
- Year dc:date.available
- 2001
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Garman, Christopher James
- Contributors dc:contributor
-
- Biswajit Das.
Subjects
dc:subject × 1Identifiers
dc:identifier.*- Identifier
- https://researchrepository.wvu.edu/etd/1191
- OAI identifier oai:identifier
- oai:researchrepository.wvu.edu:etd-2194