Structure-property correlations in fluoroaryl functionalized inorganic-organic hybrid polymers for telecom applications
The development and in-depth characterization of new fluoroaryl functionalized ORMOCER® materials (inorganic-organic hybrid polymers) for optical waveguide applications in telecommunication is presented. The preparation of the materials included precursor silane synthesis, hydrolysis/polycondensation of organoalkoxysilane mixtures, and photolithographic processing of the resulting oligosiloxane resins in order to establish the inorganic-organic hybrid network. During all stages of ORMOCER® preparation, structure-property relations were deduced from characterization data, particularly with respect to low optical loss in the important near-infrared spectral region as well as refractive index. With the aid of molecular modeling, structural characteristics of oligomeric intermediates were visualized, which was found valuable in the fundamental understanding of the material class. The material development started with the syntheses of a variety of commercially unavailable fluorinated and unfluorinated arylalkoxysilanes by means of Grignard and hydrosilylation pathways, respectively. A survey of silane optical properties, particularly their absorptions at the telecom wavelengths 1310 nm and 1550 nm, gave an impulse to the choice of suitable precursors for the preparation of low-loss ORMOCER® resins. Accordingly, precursor silane mixtures and hydrolysis/polycondensation reaction conditions were chosen and optimized with regard to low contents of C-H and Si-OH functions. Thus, absorptions as low as 0.04 dB/cm at 1310 nm and 0.18 dB/cm at 1550 nm, respectively, could be obtained from an oligosiloxane resin based on pentafluorophenyltrimethoxysilane (1) mixed with pentafluorophenyl(vinyl)-dimethoxysilane (5). In order to improve the organic crosslinkability under photolithographic processing conditions, further resins on the basis of the aforementioned were prepared, which additionally incorporated the styrene-analogous precursor 4-vinyltetrafluorophenyl-trimethoxysilane (4). Thus, ORMOCER® resins with low optical losses of 0.28 dB/cm at 1310 nm and 0.42 dB/cm at 1550 nm, respectively, were prepared, which exhibited excellent photopatternability. The manufacture of micropatterns such as optical waveguide structures by UV-photolithography under clean room conditions was the final stage of material synthesis. The optimization of processing parameters allowed the preparation of test patterns for the determination of optical, dielectrical and mechanical properties. A low optical loss of 0.51 dB/cm at 1550 nm could be measured on a waveguide manufactured from a photopatternable fluoroaryl functionalized ORMOCER®. The structural characterization of liquid resins as well as cured ORMOCER® samples was accomplished chiefly with solution and solid state 29Si-NMR spectroscopy, respectively. Particularly for polycondensates incorporating species based on more than one precursor silane, the spectra showed a high degree of complexity. An additional challenge arouse from the partial loss of fluoroaryl groups during ORMOCER® condensation and curing, which resulted in even more condensation products. Thus, in order to provide a basis for resin analysis, first the hydrolysis/condensation reactions of the isolated precursors were investigated under reaction time-resolution with NMR spectroscopy at low temperature. Backed by signal assignments in these single-precursor systems, the respective species could also be identified in the complex resin spectra, allowing for their quantitative interpretation. The structural characterization was rounded out by IR spectroscopy and SAXS analyses. With the help of molecular modeling, the experimental data were finally transferred into a three-dimensional image of an organosiloxane oligomer, which is representative for a photopatternable fluoroaryl functionalized ORMOCER® resin. The combination of low-temperature NMR, which made the characterization of polycondensates possible, with oligomer modeling paved the way to a further understanding of ORMOCER® resin systems. On the basis of this visualization of structural characteristics, e.g. properties such as organic crosslinkability of oligomers were discussed in the light of steric features within the molecular structure. Thus, new possibilities were established for the systematic optimization of ORMOCER® formulations. Structure-property relations with respect to optical loss and refraction, as determined within this work, follow trends, which are in accordance with the literature. Particularly the direct comparison of data derived from analogous fluorinated and unfluorinated ORMOCER® resins showed that fluorination results in significant decrease in NIR optical loss. Additionally, different unfluorinated aryl functionalized systems with varying aliphatic C-H content were compared. In case of a lower aliphatic content, a widening effect on the 1310 nm window was found. This is due to a shift of arylic C-H vibrations (1145 nm) towards lower wavelengths compared to aliphatic C-H (1188 nm). Finally, on the basis of NIR spectra of analogous fluorinated resins with low and high silanol content, respectively, a significant impact of (Si)O-H groups on the 1550 nm window was demonstrated, while the 1310 nm window was unaffected. This is due to O-H vibrations with a maximum at 1387 nm and further bands at higher wavelength. The index of refraction was drastically lowered due to fluorination. Thus, the analogous fluorinated and unfluorinated ORMOCER® resins had indices of 1.497 and 1.570, respectively, in the VIS region. For the fluorinated systems, refraction did not change significantly during organic cross-connection and hardbake. In conclusion, the new fluoroaryl functionalized ORMOCER® systems represent low-loss materials for telecom applications. In addition, in-depth characterization during material development allowed the proposal of structure-property relations, particularly with respect to optical properties, which are of considerable importance for future developments.
ORMOCER, Hybridpolymer, Sol-Gel, Photolithographie, 29Si-NMR, Hybrid Polymer, Photolithography
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