Lattice gas models and simulations of epitaxial growth
In this PhD thesis, we develop models for the numerical simulation of epitaxial crystal growth, as realized, e.g., in molecular beam epitaxy (MBE). The basic idea is to use a discrete lattice gas representation of the crystal structure, and to apply kinetic Monte Carlo (KMC) simulations for the description of the growth dynamics. The main advantage of the KMC approach is the possibility to account for atomistic details and at the same time cover MBE relevant time scales in the simulation. In chapter 1, we describe the principles of MBE, pointing out relevant physical processes and the influence of experimental control parameters. We discuss various methods used in the theoretical description of epitaxial growth. Subsequently, the underlying concepts of the KMC method and the lattice gas approach are presented. Important aspects concerning the design of a lattice gas model are considered, e.g. the solid-on-solid approximation or the choice of an appropriate lattice topology. A key element of any KMC simulation is the selection of allowed events and the evaluation of Arrhenius rates for thermally activated processes. We discuss simplifying schemes that are used to approximate the corresponding energy barriers if detailed knowledge about the barriers is not available. Finally, the efficient implementation of the MC kinetics using a rejection-free algorithm is described. In chapter 2, we present a solid-on-solid lattice gas model which aims at the description of II-VI(001) semiconductor surfaces like CdTe(001). The model accounts for the zincblende structure and the relevant surface reconstructions of Cd- and Te-terminated surfaces. Particles at the surface interact via anisotropic nearest and next nearest neighbor interactions, whereas interactions in the bulk are isotropic. The anisotropic surface interactions reflect known properties of CdTe(001) like the small energy difference between the c(2x2) and (2x1) vacancy structures of Cd-terminated surfaces. A key element of the model is the presence of additional Te atoms in a weakly bound Te* state, which is motivated by experimental observations of Te coverages exceeding one monolayer at low temperatures and high Te fluxes. The true mechanism of binding excess Te to the surface is still unclear. Here, we use a mean-field approach assuming a Te* reservoir with limited occupation. In chapter 3, we perform KMC simulations of atomic layer epitaxy (ALE) of CdTe(001). We study the self-regulation of the ALE growth rate and demonstrate how the interplay of the Te* reservoir occupation with the surface kinetics results in two different regimes: at high temperatures the growth rate is limited to one half layer of CdTe per ALE cycle, whereas at low enough temperatures each cycle adds a complete layer. The temperature where the transition between the two regimes occurs depends mainly on the particle fluxes. The temperature dependence of the growth rate and the flux dependence of the transition temperature are in good qualitative agreement with experimental results. Comparing the macroscopic activation energy for Te* desorption in our model with experimental values we find semiquantitative agreement. In chapter 4, we study the formation of nanostructures with alternating stripes during submonolayer heteroepitaxy of two different adsorbate species on a given substrate. We evaluate the influence of two mechanisms: kinetic segregation due to chemically induced diffusion barriers, and strain relaxation by alternating arrangement of the adsorbate species. KMC simulations of a simple cubic lattice gas with weak inter-species binding energy show that kinetic effects are sufficient to account for stripe formation during growth. The dependence of the stripe width on control parameters is investigated. We find an Arrhenius temperature dependence, in agreement with experimental investigations of phase separation in binary or ternary material systems. Canonical MC simulations show that the observed stripes are not stable under equilibrium conditions: the adsorbate species separate into very large domains. Off-lattice simulations which account for the lattice misfit of the involved particle species show that, under equilibrium conditions, the competition between binding and strain energy results in regular stripe patterns with a well-defined width depending on both misfit and binding energies. In KMC simulations, the stripe-formation and the experimentally reported ramification of adsorbate islands are reproduced. To clarify the origin of the island ramification, we investigate an enhanced lattice gas model whose parameters are fitted to match characteristic off-lattice diffusion barriers. The simulation results show that a satisfactory explanation of experimental observations within the lattice gas framework requires a detailed incorporation of long-range elastic interactions. In the appendix we discuss supplementary topics related to the lattice gas simulations in chapter 4.
Gittergas, Monte Carlo, Simulation, Epitaxie, Halbleiter, Lattice Gas, Epitaxy, Semiconductor
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