Virginia Tech
Nanopore/Nanotube Pattern Formation through Focused Ion Beam Guided Anodization
Abstract
dc:description.abstractAnodization is a kind of method that can produce oxide layer in a large area and on flexible shaped metals. In some specific conditions, anodic oxide layers exhibit interesting nanopore/nanotube structures. In this work, focused ion beam patterning method is introduced to general anodization, aiming to make highly ordered anodic porous alumina and titania nanotubes. Focused ion beam guided porous anodic alumina is carried out by pre-designing hexagonal and square guiding patterns with different interpore distances on well electropolished Al foil before anodization. After anodization, the guiding interpore distance is found to affect the new pores' locations and shapes. Two important elements, electrical field and mechanical stress, are discussed for the development of the guiding pores and the generation of new pores. Based on the proposed pore growth mechanism, novel patterns, non-spherical pores, and large patterns across the grain boundaries are successfully produced. The research on focused ion beam guided anodic titania nanotubes begins with surface polishing. The influence of four polishing conditions, as-received, chemically polished, mechanically polished, and electropolished samples, are investigated. A polished smooth sample provides a desired surface for focused ion beam guided anodization. Hexagonal guiding patterns with different interpore distances are created on Ti surface. Ordered nanotube arrays are produced, and the structure of the anodized guiding pattern is identified.
Degree
thesis:*- Name thesis:degree_name
- Master of Science
- Level thesis:degree_level
- masters
- Discipline thesis:degree_discipline
- Materials Science and Engineering
- Department dc:contributor.department
- Materials Science and Engineering
- Grantor dc:publisher
- Virginia Tech
- Year dc:date.issued
- 2010
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Tian, Zhipeng
- Chair dc:contributor.committeechair
-
- Lu, P. Kathy
- Committee members dc:contributor.committeemember
-
- Aning, Alexander O.
- Clark, David E.
Subjects
dc:subject × 5Rights
dc:rights- Statement dc:rights
-
- In Copyright
- Licence dc:rights.uri
Identifiers
dc:identifier.*- Dc Identifier Other
- etd-12142010-150936
- OAI identifier oai:identifier
- oai:vtechworks.lib.vt.edu:10919/46207