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Virginia Tech

Ion assisted deposition of multicomponent thin films

Abstract

dc:description.abstract

A novel in-situ stress measurement technique to study the formation kinetics of multi component oxide thin films was developed and was applied to PbTiO₃. Single phase PbTi 0₃ thin films were formed from the reaction between films in the deposited PbO ITi0₂ multilayer. The film stoichiometry was accurately controlled by depositing individual layers of the required thickness. Development of film stresses associated with the formation of the product layer at the PbO/Ti0₂ interface of the multilayers was used to monitor growth rate of the PbTiO₃ layer. It was found that growth of the PbTiO₃ phase obeyed the parabolic law and the effective activation energy was estimated to be 108 kJ/mole. It is believed that the mechanism of this reaction was dominated by grain boundary diffusion of the participating cations.

Degree

thesis:*
Name thesis:degree_name
Ph. D.
Level thesis:degree_level
doctoral
Discipline thesis:degree_discipline
Materials Engineering Science
Department dc:contributor.department
Materials Engineering Science
Grantor dc:publisher
Virginia Tech
Year dc:date.issued
1994

Author and committee

dc:creator, dc:contributor.*
Author dc:creator
  • Li, Chen-Chung
Chair dc:contributor.committeechair
  • Desu, Seshu B.
Committee members dc:contributor.committeemember
  • Dillard, John G.
  • Hendricks, Robert W.
  • Cox, David
  • Reynolds, William T. Jr.

Rights

dc:rights
Statement dc:rights
  • In Copyright
Language dc:language.iso
en

Identifiers

dc:identifier.*
Dc Identifier Other
etd-10202005-102831
OAI identifier oai:identifier
oai:vtechworks.lib.vt.edu:10919/40039

Chain of custody

source
Harvested from
Virginia Tech
Base URL
vtechworks.lib.vt.edu/oai/request
Last updated
2026-07-24
Source record
OAI-PMH GetRecord
related terms
citation

Li, Chen-Chung. Ion assisted deposition of multicomponent thin films. doctoral thesis, Virginia Tech, 1994. http://hdl.handle.net/10919/40039