{"id":{"repo_id":"vt","oai_identifier":"oai:vtechworks.lib.vt.edu:10919/34628"},"canonical_url":"https://search.dev.ndltd.org/etd/vt/oai:vtechworks.lib.vt.edu:10919/34628","repository":{"repo_id":"vt","name":"Virginia Tech","base_url":"https://vtechworks.lib.vt.edu/oai/request"},"display":{"title":"Modeling and characterization of nanoelectromechanical systems","abstract":"Microelectromechanical structures (MEMS) are used commercially in sensor applications and in recent years much research effort has been done to implement them in wireless communication. Electron beam lithography and other advancements in fabrication technology allowed to shrink the size of MEMS to nanomechanical systems (NEMS). Since NEMS are just a couple of 100 nm in size, highly integrated sensor applications are possible. Since NEMS consume only little energy, this will allow continuous monitoring of all the important functions in hospitals, in manufacturing plants, on aircrafts, or even within the human body. This thesis discusses the modeling of NEM resonators. Loss mechanisms of macroscale resonators, and how they apply to NEM resonators, will be reviewed. Electron beam lithography and the fabrication process of Silicon NEM resonator will be described. The emphasis of this work was to build a test setup for temperature dependant measurements. Therefore different feasible techniques to detect nanoscale vibration will be compared and the setup used in this work will be discussed. The successful detection of nanoscale vibration and preliminary results of the temperature dependence of the quality factor of a paddle resonator will be reported. A new approach to fabricate NEM resonator using electrofluidic assembly will be introduced.","abstract_html":"Microelectromechanical structures (MEMS) are used commercially in sensor applications and in recent years much research effort has been done to implement them in wireless communication. Electron beam lithography and other advancements in fabrication technology allowed to shrink the size of MEMS to nanomechanical systems (NEMS). Since NEMS are just a couple of 100 nm in size, highly integrated sensor applications are possible. Since NEMS consume only little energy, this will allow continuous monitoring of all the important functions in hospitals, in manufacturing plants, on aircrafts, or even within the human body. This thesis discusses the modeling of NEM resonators. Loss mechanisms of macroscale resonators, and how they apply to NEM resonators, will be reviewed. Electron beam lithography and the fabrication process of Silicon NEM resonator will be described. The emphasis of this work was to build a test setup for temperature dependant measurements. Therefore different feasible techniques to detect nanoscale vibration will be compared and the setup used in this work will be discussed. The successful detection of nanoscale vibration and preliminary results of the temperature dependence of the quality factor of a paddle resonator will be reported. A new approach to fabricate NEM resonator using electrofluidic assembly will be introduced.","abstract_has_math":false,"creators":["Duemling, Martin"],"institution":"Virginia Tech","degree_name":"Master of Science","degree_level":"masters","degree_discipline":"Materials Science and Engineering","degree_department":"Materials Science and Engineering","school":null,"contributors":[],"advisors":[],"committee_chairs":["Evoy, Stephane"],"committee_members":["Reynolds, William T. Jr.","Heflin, James R."],"year":2002,"date_issued":"2002-08-15","date_published":"2002-08-15","updated_at":"2026-07-22T22:19:06Z","subjects":["Nanomechanical resonator","NEMS","Nanotechnology"],"languages":[],"rights":["In Copyright"],"rights_urls":["http://rightsstatements.org/vocab/InC/1.0/"],"identifier_entries":[{"key":"dc:identifier.other","label":"Dc Identifier Other","values":["etd-08192002-161831"],"render_values":[{"text":"etd-08192002-161831","href":null,"code":true}]}]},"links":{"outbound_url":"http://hdl.handle.net/10919/34628","outbound_label":"Handle","outbound_source":"dc:identifier.uri"},"metadata_groups":[{"id":"people","label":"People","entries":[{"key":"dc:contributor.committeechair","label":"Committee Chair","values":["Evoy, Stephane"]},{"key":"dc:contributor.committeemember","label":"Committee Member","values":["Reynolds, William T. Jr.","Heflin, James R."]},{"key":"dc:contributor.department","label":"Department","values":["Materials Science and Engineering"]},{"key":"dc:creator","label":"Author","values":["Duemling, Martin"]}]},{"id":"academic_context","label":"Academic Context","entries":[{"key":"dc:date.accessioned","label":"Dc Date Accessioned","values":["2014-03-14T20:43:44Z"]},{"key":"dc:date.available","label":"Dc Date Available","values":["2014-03-14T20:43:44Z","2003-09-09"]},{"key":"dc:date.issued","label":"Date","values":["2002-08-15"]},{"key":"dc:publisher","label":"Institution","values":["Virginia Tech"]},{"key":"dc:type","label":"Dc Type","values":["Thesis"]},{"key":"thesis:degree_discipline","label":"Discipline","values":["Materials Science and Engineering"]},{"key":"thesis:degree_level","label":"Degree Level","values":["masters"]},{"key":"thesis:degree_name","label":"Degree Name","values":["Master of Science"]},{"key":"thesis:institution_name","label":"Thesis Institution Name","values":["Virginia Polytechnic Institute and State University"]}]},{"id":"subjects_keywords","label":"Subjects and Keywords","entries":[{"key":"dc:subject","label":"Dc Subject","values":["Nanomechanical resonator","NEMS","Nanotechnology"]}]},{"id":"language_rights","label":"Language and Rights","entries":[{"key":"dc:rights","label":"Dc Rights","values":["In Copyright"]},{"key":"dc:rights.uri","label":"Rights URI","values":["http://rightsstatements.org/vocab/InC/1.0/"]}]},{"id":"identifiers","label":"Identifiers","entries":[{"key":"dc:identifier.other","label":"Dc Identifier Other","values":["etd-08192002-161831"]},{"key":"dc:identifier.uri","label":"Identifier URI","values":["http://hdl.handle.net/10919/34628"]}]},{"id":"additional","label":"Additional Metadata","entries":[{"key":"dc:description.abstract","label":"Abstract","values":["Microelectromechanical structures (MEMS) are used commercially in sensor applications and in recent years much research effort has been done to implement them in wireless communication. Electron beam lithography and other advancements in fabrication technology allowed to shrink the size of MEMS to nanomechanical systems (NEMS). Since NEMS are just a couple of 100 nm in size, highly integrated sensor applications are possible. Since NEMS consume only little energy, this will allow continuous monitoring of all the important functions in hospitals, in manufacturing plants, on aircrafts, or even within the human body. This thesis discusses the modeling of NEM resonators. Loss mechanisms of macroscale resonators, and how they apply to NEM resonators, will be reviewed. Electron beam lithography and the fabrication process of Silicon NEM resonator will be described. The emphasis of this work was to build a test setup for temperature dependant measurements. Therefore different feasible techniques to detect nanoscale vibration will be compared and the setup used in this work will be discussed. The successful detection of nanoscale vibration and preliminary results of the temperature dependence of the quality factor of a paddle resonator will be reported. A new approach to fabricate NEM resonator using electrofluidic assembly will be introduced."]},{"key":"dc:description.degree","label":"Dc Description Degree","values":["Master of Science"]},{"key":"dc:title","label":"Title","values":["Modeling and characterization of nanoelectromechanical systems"]}]}],"canonical_facts":{"dc:contributor.committeechair":["Evoy, Stephane"],"dc:contributor.committeemember":["Reynolds, William T. Jr.","Heflin, James R."],"dc:contributor.department":["Materials Science and Engineering"],"dc:creator":["Duemling, Martin"],"dc:date.accessioned":["2014-03-14T20:43:44Z"],"dc:date.available":["2014-03-14T20:43:44Z","2003-09-09"],"dc:date.issued":["2002-08-15"],"dc:description.abstract":["Microelectromechanical structures (MEMS) are used commercially in sensor applications and in recent years much research effort has been done to implement them in wireless communication. Electron beam lithography and other advancements in fabrication technology allowed to shrink the size of MEMS to nanomechanical systems (NEMS). Since NEMS are just a couple of 100 nm in size, highly integrated sensor applications are possible. Since NEMS consume only little energy, this will allow continuous monitoring of all the important functions in hospitals, in manufacturing plants, on aircrafts, or even within the human body. This thesis discusses the modeling of NEM resonators. Loss mechanisms of macroscale resonators, and how they apply to NEM resonators, will be reviewed. Electron beam lithography and the fabrication process of Silicon NEM resonator will be described. The emphasis of this work was to build a test setup for temperature dependant measurements. Therefore different feasible techniques to detect nanoscale vibration will be compared and the setup used in this work will be discussed. The successful detection of nanoscale vibration and preliminary results of the temperature dependence of the quality factor of a paddle resonator will be reported. A new approach to fabricate NEM resonator using electrofluidic assembly will be introduced."],"dc:description.degree":["Master of Science"],"dc:identifier.other":["etd-08192002-161831"],"dc:identifier.uri":["http://hdl.handle.net/10919/34628"],"dc:publisher":["Virginia Tech"],"dc:rights":["In Copyright"],"dc:rights.uri":["http://rightsstatements.org/vocab/InC/1.0/"],"dc:subject":["Nanomechanical resonator","NEMS","Nanotechnology"],"dc:title":["Modeling and characterization of nanoelectromechanical systems"],"dc:type":["Thesis"],"thesis:degree_discipline":["Materials Science and Engineering"],"thesis:degree_level":["masters"],"thesis:degree_name":["Master of Science"],"thesis:institution_name":["Virginia Polytechnic Institute and State University"]},"updated_at":"2026-07-22T22:19:06Z"}