{"id":{"repo_id":"vt","oai_identifier":"oai:vtechworks.lib.vt.edu:10919/33804"},"canonical_url":"https://search.dev.ndltd.org/etd/vt/oai:vtechworks.lib.vt.edu:10919/33804","repository":{"repo_id":"vt","name":"Virginia Tech","base_url":"https://vtechworks.lib.vt.edu/oai/request"},"display":{"title":"A Manufacturing Process for Single Micron Resolution Optical Gratings Used in X-ray Computed Tomography","abstract":"X-ray Computed Tomography (CT) is a process that produces three-dimensional x-ray images, allowing for better diagnosis and analysis of complex internal medical conditions. New advances in the optical techniques used in this process promise to produce better results while reducing patient risk. One of these developments calls for precise optical gratings that can be expensive and difficult to manufacture. This paper presents a simple process developed specifically for the production of these gratings using cost effective techniques. The process uses well understood semiconductor fabrication steps including oxidation, deep reactive ion etching and electroplating. While not entirely successful, the process presented within provides a proof of concept for development of the gratings and discusses improvements that could be made to allow for success.","abstract_html":"X-ray Computed Tomography (CT) is a process that produces three-dimensional x-ray images, allowing for better diagnosis and analysis of complex internal medical conditions. New advances in the optical techniques used in this process promise to produce better results while reducing patient risk. One of these developments calls for precise optical gratings that can be expensive and difficult to manufacture. This paper presents a simple process developed specifically for the production of these gratings using cost effective techniques. The process uses well understood semiconductor fabrication steps including oxidation, deep reactive ion etching and electroplating. While not entirely successful, the process presented within provides a proof of concept for development of the gratings and discusses improvements that could be made to allow for success.","abstract_has_math":false,"creators":["Hand, Davis Kyle"],"institution":"Virginia Tech","degree_name":"Master of Science","degree_level":"masters","degree_discipline":"Electrical and Computer Engineering","degree_department":"Electrical and Computer Engineering","school":null,"contributors":[],"advisors":[],"committee_chairs":["Meehan, Kathleen"],"committee_members":["Wyatt, Christopher L.","Orlowski, Marius"],"year":2011,"date_issued":"2011-01-18","date_published":"2011-01-18","updated_at":"2026-07-22T22:19:57Z","subjects":["Computed Tomography","Photolithography","Electroplating","DRIE"],"languages":[],"rights":["In Copyright"],"rights_urls":["http://rightsstatements.org/vocab/InC/1.0/"],"identifier_entries":[{"key":"dc:identifier.other","label":"Dc Identifier Other","values":["etd-06282011-131050"],"render_values":[{"text":"etd-06282011-131050","href":null,"code":true}]}]},"links":{"outbound_url":"http://hdl.handle.net/10919/33804","outbound_label":"Handle","outbound_source":"dc:identifier.uri"},"metadata_groups":[{"id":"people","label":"People","entries":[{"key":"dc:contributor.committeechair","label":"Committee Chair","values":["Meehan, Kathleen"]},{"key":"dc:contributor.committeemember","label":"Committee Member","values":["Wyatt, Christopher L.","Orlowski, Marius"]},{"key":"dc:contributor.department","label":"Department","values":["Electrical and Computer Engineering"]},{"key":"dc:creator","label":"Author","values":["Hand, Davis Kyle"]}]},{"id":"academic_context","label":"Academic Context","entries":[{"key":"dc:date.accessioned","label":"Dc Date Accessioned","values":["2014-03-14T20:40:46Z"]},{"key":"dc:date.available","label":"Dc Date Available","values":["2014-03-14T20:40:46Z","2011-08-17"]},{"key":"dc:date.issued","label":"Date","values":["2011-01-18"]},{"key":"dc:publisher","label":"Institution","values":["Virginia Tech"]},{"key":"dc:type","label":"Dc Type","values":["Thesis"]},{"key":"thesis:degree_discipline","label":"Discipline","values":["Electrical and Computer Engineering"]},{"key":"thesis:degree_level","label":"Degree Level","values":["masters"]},{"key":"thesis:degree_name","label":"Degree Name","values":["Master of Science"]},{"key":"thesis:institution_name","label":"Thesis Institution Name","values":["Virginia Polytechnic Institute and State University"]}]},{"id":"subjects_keywords","label":"Subjects and Keywords","entries":[{"key":"dc:subject","label":"Dc Subject","values":["Computed Tomography","Photolithography","Electroplating","DRIE"]}]},{"id":"language_rights","label":"Language and Rights","entries":[{"key":"dc:rights","label":"Dc Rights","values":["In Copyright"]},{"key":"dc:rights.uri","label":"Rights URI","values":["http://rightsstatements.org/vocab/InC/1.0/"]}]},{"id":"identifiers","label":"Identifiers","entries":[{"key":"dc:identifier.other","label":"Dc Identifier Other","values":["etd-06282011-131050"]},{"key":"dc:identifier.uri","label":"Identifier URI","values":["http://hdl.handle.net/10919/33804"]}]},{"id":"additional","label":"Additional Metadata","entries":[{"key":"dc:description.abstract","label":"Abstract","values":["X-ray Computed Tomography (CT) is a process that produces three-dimensional x-ray images, allowing for better diagnosis and analysis of complex internal medical conditions. New advances in the optical techniques used in this process promise to produce better results while reducing patient risk. One of these developments calls for precise optical gratings that can be expensive and difficult to manufacture. This paper presents a simple process developed specifically for the production of these gratings using cost effective techniques. The process uses well understood semiconductor fabrication steps including oxidation, deep reactive ion etching and electroplating. While not entirely successful, the process presented within provides a proof of concept for development of the gratings and discusses improvements that could be made to allow for success."]},{"key":"dc:description.degree","label":"Dc Description Degree","values":["Master of Science"]},{"key":"dc:title","label":"Title","values":["A Manufacturing Process for Single Micron Resolution Optical Gratings Used in X-ray Computed Tomography"]}]}],"canonical_facts":{"dc:contributor.committeechair":["Meehan, Kathleen"],"dc:contributor.committeemember":["Wyatt, Christopher L.","Orlowski, Marius"],"dc:contributor.department":["Electrical and Computer Engineering"],"dc:creator":["Hand, Davis Kyle"],"dc:date.accessioned":["2014-03-14T20:40:46Z"],"dc:date.available":["2014-03-14T20:40:46Z","2011-08-17"],"dc:date.issued":["2011-01-18"],"dc:description.abstract":["X-ray Computed Tomography (CT) is a process that produces three-dimensional x-ray images, allowing for better diagnosis and analysis of complex internal medical conditions. New advances in the optical techniques used in this process promise to produce better results while reducing patient risk. One of these developments calls for precise optical gratings that can be expensive and difficult to manufacture. This paper presents a simple process developed specifically for the production of these gratings using cost effective techniques. The process uses well understood semiconductor fabrication steps including oxidation, deep reactive ion etching and electroplating. While not entirely successful, the process presented within provides a proof of concept for development of the gratings and discusses improvements that could be made to allow for success."],"dc:description.degree":["Master of Science"],"dc:identifier.other":["etd-06282011-131050"],"dc:identifier.uri":["http://hdl.handle.net/10919/33804"],"dc:publisher":["Virginia Tech"],"dc:rights":["In Copyright"],"dc:rights.uri":["http://rightsstatements.org/vocab/InC/1.0/"],"dc:subject":["Computed Tomography","Photolithography","Electroplating","DRIE"],"dc:title":["A Manufacturing Process for Single Micron Resolution Optical Gratings Used in X-ray Computed Tomography"],"dc:type":["Thesis"],"thesis:degree_discipline":["Electrical and Computer Engineering"],"thesis:degree_level":["masters"],"thesis:degree_name":["Master of Science"],"thesis:institution_name":["Virginia Polytechnic Institute and State University"]},"updated_at":"2026-07-22T22:19:57Z"}