Abstract
dc:description.abstractEngineering faculty and administration at the Virginia Polytechnic Institute and State University (Virginia Tech) have recognized the importance of producing competent scientists and engineers to work in the vast semiconductor industry, especially in the emerging technologies of microelectronics, optoelectronics, and nanotechnology. For this reason, the development of an undergraduate microelectronics minor as well as a more rigorous graduate curriculum has been actively pursued for several years. This paper details the development of an advanced semiconductor processing laboratory course, which serves as a three credit hour capstone course. The course covers circuit layout, semiconductor fabrication, and electrical testing. The following steps were taken in order to accomplish this task: choosing and customizing a computer aided design (CAD) software package for device layout, pMOS process integration on the toolset in the cleanroom facilities at Virginia Tech, and the development of a laboratory manual.
Degree
thesis:*- Name thesis:degree_name
- Master of Science
- Level thesis:degree_level
- masters
- Discipline thesis:degree_discipline
- Electrical and Computer Engineering
- Department dc:contributor.department
- Electrical and Computer Engineering
- Grantor dc:publisher
- Virginia Tech
- Year dc:date.issued
- 2005
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Bemben, Richard Matthew
- Chairs dc:contributor.committeechair
-
- Meehan, Kathleen
- Hendricks, Robert W.
- Committee member dc:contributor.committeemember
-
- Tront, Joseph G.
Subjects
dc:subject × 3Rights
dc:rights- Statement dc:rights
-
- In Copyright
- Licence dc:rights.uri
Identifiers
dc:identifier.*- Dc Identifier Other
- etd-05202005-165204
- OAI identifier oai:identifier
- oai:vtechworks.lib.vt.edu:10919/33031