Back to results

Virginia Tech

Energetic Deposition of Niobium Thin Film in Vacuum

Abstract

dc:description.abstract

Niobium thin films are expected to be free of solid inclusions commonly seen in solid niobium. For particle accelerators, niobium thin film has the potential to replace the solid niobium in the making of the accelerating structures. In order to understand and improve the superconducting performance of niobium thin films at cryogenic temperature, an energetic vacuum deposition system has been developed to study deposition energy effects on the properties of niobium thin films on various substrates. The system directly uses microwave power to create a pure niobium plasma, which can be used to extract niobium ion flux with controllable kinetic energy for direct deposition. The ultra high vacuum avoids the gaseous inclusions in thin films. A retarding field energy analyzer is developed and used to measure the kinetic energy of niobium at the substrate location. A systematic process for thin film characterization is developed and used to analyze the niobium thin films made by this energetic condensation. The properties of niobium thin films at several deposition energies are obtained, and the results show that there exists a preferred deposition energy around 115eV.

Degree

thesis:*
Name thesis:degree_name
Ph. D.
Level thesis:degree_level
doctoral
Discipline thesis:degree_discipline
Physics
Department dc:contributor.department
Physics
Grantor dc:publisher
Virginia Tech
Year dc:date.issued
2002

Author and committee

dc:creator, dc:contributor.*
Author dc:creator
  • Wu, Genfa
Chairs dc:contributor.committeechair
  • Ficenec, John R.
  • Phillips, H. Lawrence
Committee members dc:contributor.committeemember
  • Jenkins, David A.
  • Heflin, James R.
  • Sundelin, Ronald M.

Subjects

dc:subject × 6

Rights

dc:rights
Statement dc:rights
  • In Copyright

Identifiers

dc:identifier.*
Dc Identifier Other
etd-06242002-133736
OAI identifier oai:identifier
oai:vtechworks.lib.vt.edu:10919/28110

Chain of custody

source
Harvested from
Virginia Tech
Base URL
vtechworks.lib.vt.edu/oai/request
Last updated
2026-07-22
Source record
OAI-PMH GetRecord
citation

Wu, Genfa. Energetic Deposition of Niobium Thin Film in Vacuum. doctoral thesis, Virginia Tech, 2002. http://hdl.handle.net/10919/28110