Interfacial Study of Copper Electrodeposition with the Electrochemical Quartz Crystal Microbalance (EQCM)

The electrochemical quartz crystal microbalance (EQCM) has been proven an effective mean of monitoring up to nano-scale mass changes related to electrode potential variations at its surface. The principles of operation are based on the converse piezoelectric response of quartz crystals to mass variations on the crystal surface. In this work, principles and operations of the EQCM and piezo-electrodes are discussed. A conductive oxide, ruthenium oxide (RuO2) is a promising material to be used as a diffusion barrier for metal interconnects. Characterization of copper underpotential deposition (UPD) on ruthenium and RuO2 electrodes by means of electrochemical methods and other spectroscopic methods is presented. Copper electrodeposition in platinum and ruthenium substrates is investigated at pH values higher than zero. In pH=5 solutions, the rise in local pH caused by the reduction of oxygen leads to the formation of a precipitate, characterized as posnjakite or basic copper sulfate by means of X-ray electron spectroscopy and X-ray diffraction. The mechanism of formation is studied by means of the EQCM, presenting this technique as a powerful in-situ sensing device.

Grantor dc:publisher

University of North Texas

Year dc:date

2005

Author dc:creator

• Ojeda Mota, Oscar Ulises

Contributors dc:contributor

• Chyan, Oliver M. R.
• Golden, Teresa D.

• Quartz crystal microbalances.
• Copper.
• Electroplating.
• ruthenium
• electrochemical quartz crystal microbalance
• EQCM
• patina
• copper plating

Statement dc:rights

• Public
• Copyright
• Ojeda Mota, Oscar Ulises
• Copyright is held by the author, unless otherwise noted. All rights reserved.

Language dc:language

English

Identifier

oclc: 62153171
https://digital.library.unt.edu/ark:/67531/metadc4755/
ark: ark:/67531/metadc4755

OAI identifier oai:identifier

info:ark/67531/metadc4755