Modeling and simulation of sputter-ion pump performances

Ferretti, Alessandro; Isoardi, Tiziano

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Università degli Studi di Torino

Modeling and simulation of sputter-ion pump performances

dc:creator Ferretti, Alessandro; Isoardi, Tiziano

dc:date2023

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Grantor dc:publisher: Università degli Studi di Torino
Year dc:date: 2023

Author and committee

dc:creator, dc:contributor.*

Authors dc:creator: Ferretti, Alessandro
Isoardi, Tiziano

Subjects

dc:subject × 1

Settore FIS/04 - Fisica Nucleare e Subnucleare

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Statement dc:rights: info:eu-repo/semantics/openAccess
Language dc:language: eng

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Handle dc:identifier: https://hdl.handle.net/2318/2017207
OAI identifier oai:identifier: oai:iris.unito.it:2318/2017207

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Harvested from: Università di Torino
Base URL: iris.unito.it/oai/driver
Last updated: 2026-07-24
Source record: OAI-PMH GetRecord

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citation

Ferretti, Alessandro; Isoardi, Tiziano. Modeling and simulation of sputter-ion pump performances. Università degli Studi di Torino, 2023. https://hdl.handle.net/2318/2017207

Modeling and simulation of sputter-ion pump performances

Degree

Author and committee

Subjects

Rights

Identifiers

Chain of custody

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