{"id":{"repo_id":"uiuc","oai_identifier":"oai:www.ideals.illinois.edu:2142/99446"},"canonical_url":"https://search.dev.ndltd.org/etd/uiuc/oai:www.ideals.illinois.edu:2142/99446","repository":{"repo_id":"uiuc","name":"University of Illinois - Urbana-Champaign","base_url":"https://www.ideals.illinois.edu/oai-pmh"},"display":{"title":"Super-high-frequency lithium niobate microelectromechanical system resonators","abstract":"Recently, the rapid growth of super-high-frequency (SHF) applications has fueled the development of wideband filters and multiplexers. To achieve the desired performance, the building blocks of these filters, namely the acoustic resonators, must feature resonances at SHF, and high figure of merit (FOM) for minimal insertion loss and enhanced out-of-band rejection. This thesis reports on the demonstration of a new class of SHF microelectromechanical system (MEMS) resonators operating in the 5 GHz range. The SHF resonances have been achieved by employing the first order antisymmetric (A1) mode in ion-sliced and suspended Z-cut lithium niobate (LiNbO3) thin films, which feature a phase velocity exceeding 10,000 m/s. The fabricated device has demonstrated a high electromechanical coupling (kt2) of 29% and a high quality factor (Q) of 527 simultaneously. Hence, this work marks the first time that MEMS resonators at SHF were demonstrated with an extremely high figure of merit (FoM= kt2Q) of 153. The SHF operation and high FoM of these A1 mode devices have proven their potential as the key building blocks for future SHF front-end filters and multiplexers. This thesis is organized as follows. In Chapter 1, the background of RF-MEMS filters and resonators will be reviewed and the motivation of developing SHF MEMS resonators is clarified. Chapter 2 will introduce fundamentals and materials of piezoelectric MEMS resonators. Chapter 3 will discuss characteristics of Lamb wave modes and detail the first-order antisymmetric (A1) Lamb wave mode which can be employed in designs of SHF LiNbO3 MEMS resonators. Chapter 4 will present and describe the microfabrication process of the SHF LiNbO3 MEMS resonators. Finally, Chapter 5 will conclude this research work and suggest some potential future research directions.","abstract_html":"Recently, the rapid growth of super-high-frequency (SHF) applications has fueled the development of wideband filters and multiplexers. To achieve the desired performance, the building blocks of these filters, namely the acoustic resonators, must feature resonances at SHF, and high figure of merit (FOM) for minimal insertion loss and enhanced out-of-band rejection. This thesis reports on the demonstration of a new class of SHF microelectromechanical system (MEMS) resonators operating in the 5 GHz range. The SHF resonances have been achieved by employing the first order antisymmetric (A1) mode in ion-sliced and suspended Z-cut lithium niobate (LiNbO3) thin films, which feature a phase velocity exceeding 10,000 m/s. The fabricated device has demonstrated a high electromechanical coupling (kt2) of 29% and a high quality factor (Q) of 527 simultaneously. Hence, this work marks the first time that MEMS resonators at SHF were demonstrated with an extremely high figure of merit (FoM= kt2Q) of 153. The SHF operation and high FoM of these A1 mode devices have proven their potential as the key building blocks for future SHF front-end filters and multiplexers. This thesis is organized as follows. In Chapter 1, the background of RF-MEMS filters and resonators will be reviewed and the motivation of developing SHF MEMS resonators is clarified. Chapter 2 will introduce fundamentals and materials of piezoelectric MEMS resonators. Chapter 3 will discuss characteristics of Lamb wave modes and detail the first-order antisymmetric (A1) Lamb wave mode which can be employed in designs of SHF LiNbO3 MEMS resonators. Chapter 4 will present and describe the microfabrication process of the SHF LiNbO3 MEMS resonators. Finally, Chapter 5 will conclude this research work and suggest some potential future research directions.","abstract_has_math":false,"creators":["Yang, Yansong"],"institution":"University of Illinois at Urbana-Champaign","degree_name":"M.S.","degree_level":"Thesis","degree_discipline":"Electrical & Computer Engr","degree_department":null,"school":null,"contributors":["Gong, Songbin"],"advisors":[],"committee_chairs":[],"committee_members":[],"year":2018,"date_issued":"2018-03-13T17:28:55Z","date_published":"2018-03-13T17:28:55Z","updated_at":"2026-07-22T22:24:37Z","subjects":["Super-high-frequency","Microelectromechanical system (MEMS)","Lithium niobate","Resonator"],"languages":["en"],"rights":["Copyright 2017 Yansong Yang"],"rights_urls":[],"identifier_entries":[]},"links":{"outbound_url":"http://hdl.handle.net/2142/99446","outbound_label":"Handle","outbound_source":"dc:identifier"},"metadata_groups":[{"id":"people","label":"People","entries":[{"key":"dc:contributor","label":"Contributor","values":["Gong, Songbin"]},{"key":"dc:creator","label":"Author","values":["Yang, Yansong"]}]},{"id":"academic_context","label":"Academic Context","entries":[{"key":"dc:date","label":"Dc Date","values":["2018-03-13T17:28:55Z","2020-03-14T09:15:19Z","2017-07-26","2017-12"]},{"key":"dc:type","label":"Dc Type","values":["text"]},{"key":"thesis:degree_discipline","label":"Discipline","values":["Electrical & Computer Engr"]},{"key":"thesis:degree_level","label":"Degree Level","values":["Thesis"]},{"key":"thesis:degree_name","label":"Degree Name","values":["M.S."]},{"key":"thesis:institution_name","label":"Thesis Institution Name","values":["University of Illinois at Urbana-Champaign"]}]},{"id":"subjects_keywords","label":"Subjects and Keywords","entries":[{"key":"dc:subject","label":"Dc Subject","values":["Super-high-frequency","Microelectromechanical system (MEMS)","Lithium niobate","Resonator"]}]},{"id":"language_rights","label":"Language and Rights","entries":[{"key":"dc:language","label":"Dc Language","values":["en"]},{"key":"dc:rights","label":"Dc Rights","values":["Copyright 2017 Yansong Yang"]}]},{"id":"identifiers","label":"Identifiers","entries":[{"key":"dc:identifier","label":"Identifier","values":["http://hdl.handle.net/2142/99446"]}]},{"id":"additional","label":"Additional Metadata","entries":[{"key":"dc:description","label":"Description","values":["Recently, the rapid growth of super-high-frequency (SHF) applications has fueled the development of wideband filters and multiplexers. To achieve the desired performance, the building blocks of these filters, namely the acoustic resonators, must feature resonances at SHF, and high figure of merit (FOM) for minimal insertion loss and enhanced out-of-band rejection. This thesis reports on the demonstration of a new class of SHF microelectromechanical system (MEMS) resonators operating in the 5 GHz range. The SHF resonances have been achieved by employing the first order antisymmetric (A1) mode in ion-sliced and suspended Z-cut lithium niobate (LiNbO3) thin films, which feature a phase velocity exceeding 10,000 m/s. The fabricated device has demonstrated a high electromechanical coupling (kt2) of 29% and a high quality factor (Q) of 527 simultaneously. Hence, this work marks the first time that MEMS resonators at SHF were demonstrated with an extremely high figure of merit (FoM= kt2Q) of 153. The SHF operation and high FoM of these A1 mode devices have proven their potential as the key building blocks for future SHF front-end filters and multiplexers. This thesis is organized as follows. In Chapter 1, the background of RF-MEMS filters and resonators will be reviewed and the motivation of developing SHF MEMS resonators is clarified. Chapter 2 will introduce fundamentals and materials of piezoelectric MEMS resonators. Chapter 3 will discuss characteristics of Lamb wave modes and detail the first-order antisymmetric (A1) Lamb wave mode which can be employed in designs of SHF LiNbO3 MEMS resonators. Chapter 4 will present and describe the microfabrication process of the SHF LiNbO3 MEMS resonators. Finally, Chapter 5 will conclude this research work and suggest some potential future research directions.","Submission published under a 24 month embargo labeled 'Closed Access', the embargo will last until 2019-12-01","The student, Yansong Yang, accepted the attached license on 2017-07-25 at 16:02.","The student, Yansong Yang, submitted this Thesis for approval on 2017-07-25 at 16:03.","This Thesis was approved for publication on 2017-07-26 at 16:39.","DSpace SAF Submission Ingestion Package generated from Vireo submission #11583 on 2018-03-13 at 10:32:00","Made available in DSpace on 2018-03-13T17:28:55Z (GMT). No. of bitstreams: 2 YANG-THESIS-2017.pdf: 3663783 bytes, checksum: 0b6f39e5c19f53012e178c4fd7bf1820 (MD5) LICENSE.txt: 4209 bytes, checksum: 8d2f038a95824b5c9fd65244669a1a06 (MD5) Previous issue date: 2017-07-26","Embargo set by: Seth Robbins for item 105413 Lift date: 2020-03-13T17:29:20Z Reason: Author requested closed access (OA after 2yrs) in Vireo ETD system","Embargo set by: Seth Robbins for item 105413 Lift date: 2020-03-13T17:32:30Z Reason: Author requested closed access (OA after 2yrs) in Vireo ETD system","Embargo set by: Seth Robbins for item 105413 Lift date: 2020-03-13T17:36:05Z Reason: Author requested closed access (OA after 2yrs) in Vireo ETD system","Limited Restriction Lifted for Item 105413 on 2020-03-14T09:15:19Z."]},{"key":"dc:format","label":"Dc Format","values":["application/pdf"]},{"key":"dc:title","label":"Title","values":["Super-high-frequency lithium niobate microelectromechanical system resonators"]}]}],"canonical_facts":{"dc:contributor":["Gong, Songbin"],"dc:creator":["Yang, Yansong"],"dc:date":["2018-03-13T17:28:55Z","2020-03-14T09:15:19Z","2017-07-26","2017-12"],"dc:description":["Recently, the rapid growth of super-high-frequency (SHF) applications has fueled the development of wideband filters and multiplexers. To achieve the desired performance, the building blocks of these filters, namely the acoustic resonators, must feature resonances at SHF, and high figure of merit (FOM) for minimal insertion loss and enhanced out-of-band rejection. This thesis reports on the demonstration of a new class of SHF microelectromechanical system (MEMS) resonators operating in the 5 GHz range. The SHF resonances have been achieved by employing the first order antisymmetric (A1) mode in ion-sliced and suspended Z-cut lithium niobate (LiNbO3) thin films, which feature a phase velocity exceeding 10,000 m/s. The fabricated device has demonstrated a high electromechanical coupling (kt2) of 29% and a high quality factor (Q) of 527 simultaneously. Hence, this work marks the first time that MEMS resonators at SHF were demonstrated with an extremely high figure of merit (FoM= kt2Q) of 153. The SHF operation and high FoM of these A1 mode devices have proven their potential as the key building blocks for future SHF front-end filters and multiplexers. This thesis is organized as follows. In Chapter 1, the background of RF-MEMS filters and resonators will be reviewed and the motivation of developing SHF MEMS resonators is clarified. Chapter 2 will introduce fundamentals and materials of piezoelectric MEMS resonators. Chapter 3 will discuss characteristics of Lamb wave modes and detail the first-order antisymmetric (A1) Lamb wave mode which can be employed in designs of SHF LiNbO3 MEMS resonators. Chapter 4 will present and describe the microfabrication process of the SHF LiNbO3 MEMS resonators. Finally, Chapter 5 will conclude this research work and suggest some potential future research directions.","Submission published under a 24 month embargo labeled 'Closed Access', the embargo will last until 2019-12-01","The student, Yansong Yang, accepted the attached license on 2017-07-25 at 16:02.","The student, Yansong Yang, submitted this Thesis for approval on 2017-07-25 at 16:03.","This Thesis was approved for publication on 2017-07-26 at 16:39.","DSpace SAF Submission Ingestion Package generated from Vireo submission #11583 on 2018-03-13 at 10:32:00","Made available in DSpace on 2018-03-13T17:28:55Z (GMT). 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