{"id":{"repo_id":"uiuc","oai_identifier":"oai:www.ideals.illinois.edu:2142/87883"},"canonical_url":"https://search.dev.ndltd.org/etd/uiuc/oai:www.ideals.illinois.edu:2142/87883","repository":{"repo_id":"uiuc","name":"University of Illinois - Urbana-Champaign","base_url":"https://www.ideals.illinois.edu/oai-pmh"},"display":{"title":"Deposition of Metal Oxides and Metal Carbonyls on Silicon Surfaces Using Solution Chemistry","abstract":"The Si-H bonds on the H-Si(111) surface and Co2(CO)8 in n-heptane solution reacted to form a well defined submonolayer coverage of Co(CO)4 above the surface plane of Si(111). Transmission Fourier-transform infrared spectroscopy analysis of (OC) 4Co-Si(111) yielded structural and geometric information about the adsorbate. Accurate quantitative areal concentrations of cobalt deposited on the surface were obtained using Rutherford backscattering spectrometry. X-ray photoelectron spectroscopy analysis furnished the chemical state of the adsorbates as well as quantitative information. Static secondary ion mass spectrometry analysis detected the presence of the desired product and trace amounts of byproducts on the surface. Finally, numerical simulations of irreversible adsorption were used to calculate theoretical yields for comparisons to the experimental coverage values.","abstract_html":"The Si-H bonds on the H-Si(111) surface and Co2(CO)8 in n-heptane solution reacted to form a well defined submonolayer coverage of Co(CO)4 above the surface plane of Si(111). Transmission Fourier-transform infrared spectroscopy analysis of (OC) 4Co-Si(111) yielded structural and geometric information about the adsorbate. Accurate quantitative areal concentrations of cobalt deposited on the surface were obtained using Rutherford backscattering spectrometry. X-ray photoelectron spectroscopy analysis furnished the chemical state of the adsorbates as well as quantitative information. Static secondary ion mass spectrometry analysis detected the presence of the desired product and trace amounts of byproducts on the surface. Finally, numerical simulations of irreversible adsorption were used to calculate theoretical yields for comparisons to the experimental coverage values.","abstract_has_math":false,"creators":["Lee, Jason"],"institution":"University of Illinois at Urbana-Champaign","degree_name":"Ph.D.","degree_level":"Dissertation","degree_discipline":null,"degree_department":null,"school":null,"contributors":["Klemperer, Walter G."],"advisors":[],"committee_chairs":[],"committee_members":[],"year":2015,"date_issued":"2015-09-28T21:57:26Z","date_published":"2015-09-28T21:57:26Z","updated_at":"2026-07-22T22:26:31Z","subjects":["Engineering, Materials Science"],"languages":["eng"],"rights":[],"rights_urls":[],"identifier_entries":[{"key":"dc:identifier","label":"Identifier","values":["(MiAaPQ)AAI3044155"],"render_values":[{"text":"(MiAaPQ)AAI3044155","href":null,"code":true}]}]},"links":{"outbound_url":"http://hdl.handle.net/2142/87883","outbound_label":"Handle","outbound_source":"dc:identifier"},"metadata_groups":[{"id":"people","label":"People","entries":[{"key":"dc:contributor","label":"Contributor","values":["Klemperer, Walter G."]},{"key":"dc:creator","label":"Author","values":["Lee, Jason"]}]},{"id":"academic_context","label":"Academic Context","entries":[{"key":"dc:date","label":"Dc Date","values":["2015-09-28T21:57:26Z","10000-01-01","2002"]},{"key":"dc:type","label":"Dc Type","values":["text"]},{"key":"thesis:degree_level","label":"Degree Level","values":["Dissertation"]},{"key":"thesis:degree_name","label":"Degree Name","values":["Ph.D."]},{"key":"thesis:institution_name","label":"Thesis Institution Name","values":["University of Illinois at Urbana-Champaign"]}]},{"id":"subjects_keywords","label":"Subjects and Keywords","entries":[{"key":"dc:subject","label":"Dc Subject","values":["Engineering, Materials Science"]}]},{"id":"language_rights","label":"Language and Rights","entries":[{"key":"dc:language","label":"Dc Language","values":["eng"]}]},{"id":"identifiers","label":"Identifiers","entries":[{"key":"dc:identifier","label":"Identifier","values":["http://hdl.handle.net/2142/87883","(MiAaPQ)AAI3044155"]}]},{"id":"additional","label":"Additional Metadata","entries":[{"key":"dc:description","label":"Description","values":["The Si-H bonds on the H-Si(111) surface and Co2(CO)8 in n-heptane solution reacted to form a well defined submonolayer coverage of Co(CO)4 above the surface plane of Si(111). Transmission Fourier-transform infrared spectroscopy analysis of (OC) 4Co-Si(111) yielded structural and geometric information about the adsorbate. Accurate quantitative areal concentrations of cobalt deposited on the surface were obtained using Rutherford backscattering spectrometry. X-ray photoelectron spectroscopy analysis furnished the chemical state of the adsorbates as well as quantitative information. Static secondary ion mass spectrometry analysis detected the presence of the desired product and trace amounts of byproducts on the surface. Finally, numerical simulations of irreversible adsorption were used to calculate theoretical yields for comparisons to the experimental coverage values.","Made available in DSpace on 2015-09-28T21:57:26Z (GMT). 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Transmission Fourier-transform infrared spectroscopy analysis of (OC) 4Co-Si(111) yielded structural and geometric information about the adsorbate. Accurate quantitative areal concentrations of cobalt deposited on the surface were obtained using Rutherford backscattering spectrometry. X-ray photoelectron spectroscopy analysis furnished the chemical state of the adsorbates as well as quantitative information. Static secondary ion mass spectrometry analysis detected the presence of the desired product and trace amounts of byproducts on the surface. Finally, numerical simulations of irreversible adsorption were used to calculate theoretical yields for comparisons to the experimental coverage values.","Made available in DSpace on 2015-09-28T21:57:26Z (GMT). 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