Lithium Debris Removal by Sputtering and Evaporation for EUV Optics and Applications
type: CreativeWork
description: 238 p.
abstract: 238 p.
author: Neumann, Martin John
language: eng
keywords: Physics, Fluid and Plasma
date published: 2015-09-28T14:51:07Z
date modified: 2026-07-22T22:26:26Z
provider: University of Illinois - Urbana-Champaign
publisher: Networked Digital Library of Theses and Dissertations
type: WebPage
source organization: University of Illinois at Urbana-Champaign

PropertyValue
property ID: Handle
value: http://hdl.handle.net/2142/85914