{"id":{"repo_id":"uiuc","oai_identifier":"oai:www.ideals.illinois.edu:2142/83813"},"canonical_url":"https://search.dev.ndltd.org/etd/uiuc/oai:www.ideals.illinois.edu:2142/83813","repository":{"repo_id":"uiuc","name":"University of Illinois - Urbana-Champaign","base_url":"https://www.ideals.illinois.edu/oai-pmh"},"display":{"title":"Compliant Meso-Scale Grinding of Silicon","abstract":"To further improve form accuracy obtained on the compliant grinding apparatus, a normal grinding force model and a depth of cut model were developed to account for the large compliance in the grinding system. Numerical simulation was performed to predict actual depths of cut and the results were within 6% of the measured/actual depths.","abstract_html":"To further improve form accuracy obtained on the compliant grinding apparatus, a normal grinding force model and a depth of cut model were developed to account for the large compliance in the grinding system. Numerical simulation was performed to predict actual depths of cut and the results were within 6% of the measured/actual depths.","abstract_has_math":false,"creators":["Jiang, Bo"],"institution":"University of Illinois at Urbana-Champaign","degree_name":"Ph.D.","degree_level":"Dissertation","degree_discipline":"Mechanical Engineering","degree_department":null,"school":null,"contributors":["Philpott, Michael L.","Shannon, Mark A."],"advisors":[],"committee_chairs":[],"committee_members":[],"year":2015,"date_issued":"2015-09-25T21:12:16Z","date_published":"2015-09-25T21:12:16Z","updated_at":"2026-07-22T22:26:22Z","subjects":["Engineering, Materials Science"],"languages":["eng"],"rights":[],"rights_urls":[],"identifier_entries":[{"key":"dc:identifier","label":"Identifier","values":["(MiAaPQ)AAI3153333"],"render_values":[{"text":"(MiAaPQ)AAI3153333","href":null,"code":true}]}]},"links":{"outbound_url":"http://hdl.handle.net/2142/83813","outbound_label":"Handle","outbound_source":"dc:identifier"},"metadata_groups":[{"id":"people","label":"People","entries":[{"key":"dc:contributor","label":"Contributor","values":["Philpott, Michael L.","Shannon, Mark A."]},{"key":"dc:creator","label":"Author","values":["Jiang, Bo"]}]},{"id":"academic_context","label":"Academic Context","entries":[{"key":"dc:date","label":"Dc Date","values":["2015-09-25T21:12:16Z","10000-01-01","2004"]},{"key":"dc:type","label":"Dc Type","values":["text"]},{"key":"thesis:degree_discipline","label":"Discipline","values":["Mechanical Engineering"]},{"key":"thesis:degree_level","label":"Degree Level","values":["Dissertation"]},{"key":"thesis:degree_name","label":"Degree Name","values":["Ph.D."]},{"key":"thesis:institution_name","label":"Thesis Institution Name","values":["University of Illinois at Urbana-Champaign"]}]},{"id":"subjects_keywords","label":"Subjects and Keywords","entries":[{"key":"dc:subject","label":"Dc Subject","values":["Engineering, Materials Science"]}]},{"id":"language_rights","label":"Language and Rights","entries":[{"key":"dc:language","label":"Dc Language","values":["eng"]}]},{"id":"identifiers","label":"Identifiers","entries":[{"key":"dc:identifier","label":"Identifier","values":["http://hdl.handle.net/2142/83813","(MiAaPQ)AAI3153333"]}]},{"id":"additional","label":"Additional Metadata","entries":[{"key":"dc:description","label":"Description","values":["To further improve form accuracy obtained on the compliant grinding apparatus, a normal grinding force model and a depth of cut model were developed to account for the large compliance in the grinding system. Numerical simulation was performed to predict actual depths of cut and the results were within 6% of the measured/actual depths.","Made available in DSpace on 2015-09-25T21:12:16Z (GMT). No. of bitstreams: 2 license.txt: 4848 bytes, checksum: 96035ab3f5e1c23cc7138a224ce498bd (MD5) 3153333.pdf: 13163289 bytes, checksum: e35c91eed7885090fce2addbf16ab149 (MD5) Previous issue date: 2004","Embargo set by: Seth Robbins for item 85094 Lift date: Forever Reason: Restricted to the U of I community idenfinitely during batch ingest of legacy ETDs","Restricted to the U of I community idenfinitely during batch ingest of legacy ETDs","U of I Only","186 p.","Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2004."]},{"key":"dc:title","label":"Title","values":["Compliant Meso-Scale Grinding of Silicon"]}]}],"canonical_facts":{"dc:contributor":["Philpott, Michael L.","Shannon, Mark A."],"dc:creator":["Jiang, Bo"],"dc:date":["2015-09-25T21:12:16Z","10000-01-01","2004"],"dc:description":["To further improve form accuracy obtained on the compliant grinding apparatus, a normal grinding force model and a depth of cut model were developed to account for the large compliance in the grinding system. Numerical simulation was performed to predict actual depths of cut and the results were within 6% of the measured/actual depths.","Made available in DSpace on 2015-09-25T21:12:16Z (GMT). No. of bitstreams: 2 license.txt: 4848 bytes, checksum: 96035ab3f5e1c23cc7138a224ce498bd (MD5) 3153333.pdf: 13163289 bytes, checksum: e35c91eed7885090fce2addbf16ab149 (MD5) Previous issue date: 2004","Embargo set by: Seth Robbins for item 85094 Lift date: Forever Reason: Restricted to the U of I community idenfinitely during batch ingest of legacy ETDs","Restricted to the U of I community idenfinitely during batch ingest of legacy ETDs","U of I Only","186 p.","Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2004."],"dc:identifier":["http://hdl.handle.net/2142/83813","(MiAaPQ)AAI3153333"],"dc:language":["eng"],"dc:subject":["Engineering, Materials Science"],"dc:title":["Compliant Meso-Scale Grinding of Silicon"],"dc:type":["text"],"thesis:degree_discipline":["Mechanical Engineering"],"thesis:degree_level":["Dissertation"],"thesis:degree_name":["Ph.D."],"thesis:institution_name":["University of Illinois at Urbana-Champaign"]},"updated_at":"2026-07-22T22:26:22Z"}