{"id":{"repo_id":"uiuc","oai_identifier":"oai:www.ideals.illinois.edu:2142/83753"},"canonical_url":"https://search.dev.ndltd.org/etd/uiuc/oai:www.ideals.illinois.edu:2142/83753","repository":{"repo_id":"uiuc","name":"University of Illinois - Urbana-Champaign","base_url":"https://www.ideals.illinois.edu/oai-pmh"},"display":{"title":"Theory, Fabrication and Characterization of Micromachined Electrolytic Solution Conductivity Sensors","abstract":"Thin-film nickel RTD has a thickness dependent temperature coefficient that is lower than the bulk material due to free electron boundary scattering. Four-wire resistance measurements are used to eliminate the effect of lead resistance for the RTD fabricated on the probe tip. The RTD integrated on the probe tip achieved an accuracy of +/-0.5% from 0 to 100°C with a parabolic correlation. A 200 mum probe gave a thermal resistance of 553°C/W during self-heating in water. With a RTD integrated on the sensor tip, temperature correction for conductivity can be made so that concentration could be measured locally in media with non-uniform temperature and concentration distributions. Finally, challenges to reduce the microprobe tip size further are discussed with respect to fabrication, measurement, and the underlying physics.","abstract_html":"Thin-film nickel RTD has a thickness dependent temperature coefficient that is lower than the bulk material due to free electron boundary scattering. Four-wire resistance measurements are used to eliminate the effect of lead resistance for the RTD fabricated on the probe tip. The RTD integrated on the probe tip achieved an accuracy of +/-0.5% from 0 to 100°C with a parabolic correlation. A 200 mum probe gave a thermal resistance of 553°C/W during self-heating in water. With a RTD integrated on the sensor tip, temperature correction for conductivity can be made so that concentration could be measured locally in media with non-uniform temperature and concentration distributions. Finally, challenges to reduce the microprobe tip size further are discussed with respect to fabrication, measurement, and the underlying physics.","abstract_has_math":false,"creators":["He, Dongming"],"institution":"University of Illinois at Urbana-Champaign","degree_name":"Ph.D.","degree_level":"Dissertation","degree_discipline":"Mechanical Engineering","degree_department":null,"school":null,"contributors":["Shannon, Mark A."],"advisors":[],"committee_chairs":[],"committee_members":[],"year":2015,"date_issued":"2015-09-25T21:11:52Z","date_published":"2015-09-25T21:11:52Z","updated_at":"2026-07-22T22:26:21Z","subjects":["Engineering, Mechanical"],"languages":["eng"],"rights":[],"rights_urls":[],"identifier_entries":[{"key":"dc:identifier","label":"Identifier","values":["(MiAaPQ)AAI3017094"],"render_values":[{"text":"(MiAaPQ)AAI3017094","href":null,"code":true}]}]},"links":{"outbound_url":"http://hdl.handle.net/2142/83753","outbound_label":"Handle","outbound_source":"dc:identifier"},"metadata_groups":[{"id":"people","label":"People","entries":[{"key":"dc:contributor","label":"Contributor","values":["Shannon, Mark A."]},{"key":"dc:creator","label":"Author","values":["He, Dongming"]}]},{"id":"academic_context","label":"Academic Context","entries":[{"key":"dc:date","label":"Dc Date","values":["2015-09-25T21:11:52Z","10000-01-01","2001"]},{"key":"dc:type","label":"Dc Type","values":["text"]},{"key":"thesis:degree_discipline","label":"Discipline","values":["Mechanical Engineering"]},{"key":"thesis:degree_level","label":"Degree Level","values":["Dissertation"]},{"key":"thesis:degree_name","label":"Degree Name","values":["Ph.D."]},{"key":"thesis:institution_name","label":"Thesis Institution Name","values":["University of Illinois at Urbana-Champaign"]}]},{"id":"subjects_keywords","label":"Subjects and Keywords","entries":[{"key":"dc:subject","label":"Dc Subject","values":["Engineering, Mechanical"]}]},{"id":"language_rights","label":"Language and Rights","entries":[{"key":"dc:language","label":"Dc Language","values":["eng"]}]},{"id":"identifiers","label":"Identifiers","entries":[{"key":"dc:identifier","label":"Identifier","values":["http://hdl.handle.net/2142/83753","(MiAaPQ)AAI3017094"]}]},{"id":"additional","label":"Additional Metadata","entries":[{"key":"dc:description","label":"Description","values":["Thin-film nickel RTD has a thickness dependent temperature coefficient that is lower than the bulk material due to free electron boundary scattering. 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Four-wire resistance measurements are used to eliminate the effect of lead resistance for the RTD fabricated on the probe tip. The RTD integrated on the probe tip achieved an accuracy of +/-0.5% from 0 to 100°C with a parabolic correlation. A 200 mum probe gave a thermal resistance of 553°C/W during self-heating in water. With a RTD integrated on the sensor tip, temperature correction for conductivity can be made so that concentration could be measured locally in media with non-uniform temperature and concentration distributions. Finally, challenges to reduce the microprobe tip size further are discussed with respect to fabrication, measurement, and the underlying physics.","Made available in DSpace on 2015-09-25T21:11:52Z (GMT). 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