{"id":{"repo_id":"uiuc","oai_identifier":"oai:www.ideals.illinois.edu:2142/82832"},"canonical_url":"https://search.dev.ndltd.org/etd/uiuc/oai:www.ideals.illinois.edu:2142/82832","repository":{"repo_id":"uiuc","name":"University of Illinois - Urbana-Champaign","base_url":"https://www.ideals.illinois.edu/oai-pmh"},"display":{"title":"Dewetting and Stress Evolution in Thin Films During Ion Irradiation","abstract":"This project studies the morphology evolution of non-wetting metal films on a substrate during ion irradiation. It reveals that the mobility of the solid atoms is significantly improved during irradiation and the non-wetting films can dewet as if they are melted. The ion induced dewetting process can result into patterned nanoscale structures by self-organization. This project also investigates the stress evolution in thin films when they're bombarded with ∼1keV ions. Processes such as vacancy creation and phase transformation play important roles in the stress accumulation of the films. Meanwhile, it is discovered that atoms can be injected into deeper region from the ion bombarded layer during irradiation, inducing a compressive stress generation process. It is also noticed that despite the variance in their microstructures, the films show many common features in stress development during ion irradiation.","abstract_html":"This project studies the morphology evolution of non-wetting metal films on a substrate during ion irradiation. It reveals that the mobility of the solid atoms is significantly improved during irradiation and the non-wetting films can dewet as if they are melted. The ion induced dewetting process can result into patterned nanoscale structures by self-organization. This project also investigates the stress evolution in thin films when they're bombarded with ∼1keV ions. Processes such as vacancy creation and phase transformation play important roles in the stress accumulation of the films. Meanwhile, it is discovered that atoms can be injected into deeper region from the ion bombarded layer during irradiation, inducing a compressive stress generation process. It is also noticed that despite the variance in their microstructures, the films show many common features in stress development during ion irradiation.","abstract_has_math":false,"creators":["Zhao, Kai"],"institution":"University of Illinois at Urbana-Champaign","degree_name":"Ph.D.","degree_level":"Dissertation","degree_discipline":"Materials Science and Engineering","degree_department":null,"school":null,"contributors":["Averback, Robert"],"advisors":[],"committee_chairs":[],"committee_members":[],"year":2015,"date_issued":"2015-09-25T20:53:12Z","date_published":"2015-09-25T20:53:12Z","updated_at":"2026-07-22T22:26:20Z","subjects":["Engineering, Materials Science"],"languages":["eng"],"rights":[],"rights_urls":[],"identifier_entries":[{"key":"dc:identifier","label":"Identifier","values":["(MiAaPQ)AAI3337989"],"render_values":[{"text":"(MiAaPQ)AAI3337989","href":null,"code":true}]}]},"links":{"outbound_url":"http://hdl.handle.net/2142/82832","outbound_label":"Handle","outbound_source":"dc:identifier"},"metadata_groups":[{"id":"people","label":"People","entries":[{"key":"dc:contributor","label":"Contributor","values":["Averback, Robert"]},{"key":"dc:creator","label":"Author","values":["Zhao, Kai"]}]},{"id":"academic_context","label":"Academic Context","entries":[{"key":"dc:date","label":"Dc Date","values":["2015-09-25T20:53:12Z","10000-01-01","2008"]},{"key":"dc:type","label":"Dc Type","values":["text"]},{"key":"thesis:degree_discipline","label":"Discipline","values":["Materials Science and Engineering"]},{"key":"thesis:degree_level","label":"Degree Level","values":["Dissertation"]},{"key":"thesis:degree_name","label":"Degree Name","values":["Ph.D."]},{"key":"thesis:institution_name","label":"Thesis Institution Name","values":["University of Illinois at Urbana-Champaign"]}]},{"id":"subjects_keywords","label":"Subjects and Keywords","entries":[{"key":"dc:subject","label":"Dc Subject","values":["Engineering, Materials Science"]}]},{"id":"language_rights","label":"Language and Rights","entries":[{"key":"dc:language","label":"Dc Language","values":["eng"]}]},{"id":"identifiers","label":"Identifiers","entries":[{"key":"dc:identifier","label":"Identifier","values":["http://hdl.handle.net/2142/82832","(MiAaPQ)AAI3337989"]}]},{"id":"additional","label":"Additional Metadata","entries":[{"key":"dc:description","label":"Description","values":["This project studies the morphology evolution of non-wetting metal films on a substrate during ion irradiation. 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It reveals that the mobility of the solid atoms is significantly improved during irradiation and the non-wetting films can dewet as if they are melted. The ion induced dewetting process can result into patterned nanoscale structures by self-organization. This project also investigates the stress evolution in thin films when they're bombarded with ∼1keV ions. Processes such as vacancy creation and phase transformation play important roles in the stress accumulation of the films. Meanwhile, it is discovered that atoms can be injected into deeper region from the ion bombarded layer during irradiation, inducing a compressive stress generation process. It is also noticed that despite the variance in their microstructures, the films show many common features in stress development during ion irradiation.","Made available in DSpace on 2015-09-25T20:53:12Z (GMT). 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