{"id":{"repo_id":"uiuc","oai_identifier":"oai:www.ideals.illinois.edu:2142/82757"},"canonical_url":"https://search.dev.ndltd.org/etd/uiuc/oai:www.ideals.illinois.edu:2142/82757","repository":{"repo_id":"uiuc","name":"University of Illinois - Urbana-Champaign","base_url":"https://www.ideals.illinois.edu/oai-pmh"},"display":{"title":"Reaction Path and Crystallograpy of Cobalt Silicide Formation on Silicon(001) by Reaction Deposition Epitaxy","abstract":"I show that high-flux low-energy Ar+ ion irradiation during RDE growth dramatically increases the area fraction of untwinned regions from 0.17 in films grown under standard magnetically balanced conditions in which the ratio JAr+/JCo of the incident Ar> to Co fluxes is 1.4 to 0.72 with JAr+/JCo= 13.3. TEM analyses reveal that increasing JAr+/J Co results in larger values of both the number density and area of untwinned islands. The intense Ar+ ion bombardment under high-ion-flux conditions creates additional low-energy adsorption sites that favor the nucleation of untwinned islands and collisionally enhances the Co adatom surface mobility which, in turn, increases the probability of itinerant Co adatoms reaching these sites.","abstract_html":"I show that high-flux low-energy Ar+ ion irradiation during RDE growth dramatically increases the area fraction of untwinned regions from 0.17 in films grown under standard magnetically balanced conditions in which the ratio JAr+/JCo of the incident Ar> to Co fluxes is 1.4 to 0.72 with JAr+/JCo= 13.3. TEM analyses reveal that increasing JAr+/J Co results in larger values of both the number density and area of untwinned islands. The intense Ar+ ion bombardment under high-ion-flux conditions creates additional low-energy adsorption sites that favor the nucleation of untwinned islands and collisionally enhances the Co adatom surface mobility which, in turn, increases the probability of itinerant Co adatoms reaching these sites.","abstract_has_math":false,"creators":["Lim, Chong Wee"],"institution":"University of Illinois at Urbana-Champaign","degree_name":"Ph.D.","degree_level":"Dissertation","degree_discipline":"Materials Science and Engineering","degree_department":null,"school":null,"contributors":["Greene, Joseph E."],"advisors":[],"committee_chairs":[],"committee_members":[],"year":2015,"date_issued":"2015-09-25T20:52:53Z","date_published":"2015-09-25T20:52:53Z","updated_at":"2026-07-22T22:26:18Z","subjects":["Engineering, Materials Science"],"languages":["eng"],"rights":[],"rights_urls":[],"identifier_entries":[{"key":"dc:identifier","label":"Identifier","values":["(MiAaPQ)AAI3160917"],"render_values":[{"text":"(MiAaPQ)AAI3160917","href":null,"code":true}]}]},"links":{"outbound_url":"http://hdl.handle.net/2142/82757","outbound_label":"Handle","outbound_source":"dc:identifier"},"metadata_groups":[{"id":"people","label":"People","entries":[{"key":"dc:contributor","label":"Contributor","values":["Greene, Joseph E."]},{"key":"dc:creator","label":"Author","values":["Lim, Chong Wee"]}]},{"id":"academic_context","label":"Academic Context","entries":[{"key":"dc:date","label":"Dc Date","values":["2015-09-25T20:52:53Z","10000-01-01","2004"]},{"key":"dc:type","label":"Dc Type","values":["text"]},{"key":"thesis:degree_discipline","label":"Discipline","values":["Materials Science and Engineering"]},{"key":"thesis:degree_level","label":"Degree Level","values":["Dissertation"]},{"key":"thesis:degree_name","label":"Degree Name","values":["Ph.D."]},{"key":"thesis:institution_name","label":"Thesis Institution Name","values":["University of Illinois at Urbana-Champaign"]}]},{"id":"subjects_keywords","label":"Subjects and Keywords","entries":[{"key":"dc:subject","label":"Dc Subject","values":["Engineering, Materials Science"]}]},{"id":"language_rights","label":"Language and Rights","entries":[{"key":"dc:language","label":"Dc Language","values":["eng"]}]},{"id":"identifiers","label":"Identifiers","entries":[{"key":"dc:identifier","label":"Identifier","values":["http://hdl.handle.net/2142/82757","(MiAaPQ)AAI3160917"]}]},{"id":"additional","label":"Additional Metadata","entries":[{"key":"dc:description","label":"Description","values":["I show that high-flux low-energy Ar+ ion irradiation during RDE growth dramatically increases the area fraction of untwinned regions from 0.17 in films grown under standard magnetically balanced conditions in which the ratio JAr+/JCo of the incident Ar> to Co fluxes is 1.4 to 0.72 with JAr+/JCo= 13.3. TEM analyses reveal that increasing JAr+/J Co results in larger values of both the number density and area of untwinned islands. The intense Ar+ ion bombardment under high-ion-flux conditions creates additional low-energy adsorption sites that favor the nucleation of untwinned islands and collisionally enhances the Co adatom surface mobility which, in turn, increases the probability of itinerant Co adatoms reaching these sites.","Made available in DSpace on 2015-09-25T20:52:53Z (GMT). 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TEM analyses reveal that increasing JAr+/J Co results in larger values of both the number density and area of untwinned islands. The intense Ar+ ion bombardment under high-ion-flux conditions creates additional low-energy adsorption sites that favor the nucleation of untwinned islands and collisionally enhances the Co adatom surface mobility which, in turn, increases the probability of itinerant Co adatoms reaching these sites.","Made available in DSpace on 2015-09-25T20:52:53Z (GMT). No. of bitstreams: 2 license.txt: 4848 bytes, checksum: 96035ab3f5e1c23cc7138a224ce498bd (MD5) 3160917.pdf: 5550550 bytes, checksum: 1b158d644c640b5fb5a7012e93b85058 (MD5) Previous issue date: 2004","Embargo set by: Seth Robbins for item 84038 Lift date: Forever Reason: Restricted to the U of I community idenfinitely during batch ingest of legacy ETDs","Restricted to the U of I community idenfinitely during batch ingest of legacy ETDs","U of I Only","108 p.","Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2004."],"dc:identifier":["http://hdl.handle.net/2142/82757","(MiAaPQ)AAI3160917"],"dc:language":["eng"],"dc:subject":["Engineering, Materials Science"],"dc:title":["Reaction Path and Crystallograpy of Cobalt Silicide Formation on Silicon(001) by Reaction Deposition Epitaxy"],"dc:type":["text"],"thesis:degree_discipline":["Materials Science and Engineering"],"thesis:degree_level":["Dissertation"],"thesis:degree_name":["Ph.D."],"thesis:institution_name":["University of Illinois at Urbana-Champaign"]},"updated_at":"2026-07-22T22:26:18Z"}