{"id":{"repo_id":"uiuc","oai_identifier":"oai:www.ideals.illinois.edu:2142/82756"},"canonical_url":"https://search.dev.ndltd.org/etd/uiuc/oai:www.ideals.illinois.edu:2142/82756","repository":{"repo_id":"uiuc","name":"University of Illinois - Urbana-Champaign","base_url":"https://www.ideals.illinois.edu/oai-pmh"},"display":{"title":"Nanostructural, Surface Morphological Evolution, and Physical Properties of Sodium Chloride-Structure Titanium Nitride and Titanium Cerium Nitride Layers as a Function of Composition","abstract":"I use a combination of alloying and low-energy ion irradiation during film growth to controllably manipulate the nanostructure of TiN-based layers. Ti0.8Ce0.2N films are grown on oxidized Si(001) at 350°C using UHV reactive magnetron sputter deposition in pure N2. The N+2 to metal ratio incident at the growing film is maintained constant at 15 while the ion energy EN+2 is varied from 14 to 45 eV. Films grown with EN+2 = 14 eV consist of equiaxed nanograins with an average size of 2.0 nm while layers deposited with EN+2 = 45 eV exhibit a 2-nm-wide nanocolumnar structure. In both cases, the films are dense, atomically smooth, and have strong 002 preferred orientation with low stress.","abstract_html":"I use a combination of alloying and low-energy ion irradiation during film growth to controllably manipulate the nanostructure of TiN-based layers. Ti0.8Ce0.2N films are grown on oxidized Si(001) at 350°C using UHV reactive magnetron sputter deposition in pure N2. The N+2 to metal ratio incident at the growing film is maintained constant at 15 while the ion energy EN+2 is varied from 14 to 45 eV. Films grown with EN+2 = 14 eV consist of equiaxed nanograins with an average size of 2.0 nm while layers deposited with EN+2 = 45 eV exhibit a 2-nm-wide nanocolumnar structure. In both cases, the films are dense, atomically smooth, and have strong 002 preferred orientation with low stress.","abstract_has_math":false,"creators":["Lee, Tae-Yoon"],"institution":"University of Illinois at Urbana-Champaign","degree_name":"Ph.D.","degree_level":"Dissertation","degree_discipline":"Materials Science and Engineering","degree_department":null,"school":null,"contributors":["Greene, Joseph E."],"advisors":[],"committee_chairs":[],"committee_members":[],"year":2015,"date_issued":"2015-09-25T20:52:52Z","date_published":"2015-09-25T20:52:52Z","updated_at":"2026-07-22T22:26:18Z","subjects":["Physics, Condensed Matter"],"languages":["eng"],"rights":[],"rights_urls":[],"identifier_entries":[{"key":"dc:identifier","label":"Identifier","values":["(MiAaPQ)AAI3160913"],"render_values":[{"text":"(MiAaPQ)AAI3160913","href":null,"code":true}]}]},"links":{"outbound_url":"http://hdl.handle.net/2142/82756","outbound_label":"Handle","outbound_source":"dc:identifier"},"metadata_groups":[{"id":"people","label":"People","entries":[{"key":"dc:contributor","label":"Contributor","values":["Greene, Joseph E."]},{"key":"dc:creator","label":"Author","values":["Lee, Tae-Yoon"]}]},{"id":"academic_context","label":"Academic Context","entries":[{"key":"dc:date","label":"Dc Date","values":["2015-09-25T20:52:52Z","10000-01-01","2004"]},{"key":"dc:type","label":"Dc Type","values":["text"]},{"key":"thesis:degree_discipline","label":"Discipline","values":["Materials Science and Engineering"]},{"key":"thesis:degree_level","label":"Degree Level","values":["Dissertation"]},{"key":"thesis:degree_name","label":"Degree Name","values":["Ph.D."]},{"key":"thesis:institution_name","label":"Thesis Institution Name","values":["University of Illinois at Urbana-Champaign"]}]},{"id":"subjects_keywords","label":"Subjects and Keywords","entries":[{"key":"dc:subject","label":"Dc Subject","values":["Physics, Condensed Matter"]}]},{"id":"language_rights","label":"Language and Rights","entries":[{"key":"dc:language","label":"Dc Language","values":["eng"]}]},{"id":"identifiers","label":"Identifiers","entries":[{"key":"dc:identifier","label":"Identifier","values":["http://hdl.handle.net/2142/82756","(MiAaPQ)AAI3160913"]}]},{"id":"additional","label":"Additional Metadata","entries":[{"key":"dc:description","label":"Description","values":["I use a combination of alloying and low-energy ion irradiation during film growth to controllably manipulate the nanostructure of TiN-based layers. Ti0.8Ce0.2N films are grown on oxidized Si(001) at 350°C using UHV reactive magnetron sputter deposition in pure N2. The N+2 to metal ratio incident at the growing film is maintained constant at 15 while the ion energy EN+2 is varied from 14 to 45 eV. Films grown with EN+2 = 14 eV consist of equiaxed nanograins with an average size of 2.0 nm while layers deposited with EN+2 = 45 eV exhibit a 2-nm-wide nanocolumnar structure. In both cases, the films are dense, atomically smooth, and have strong 002 preferred orientation with low stress.","Made available in DSpace on 2015-09-25T20:52:52Z (GMT). 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Ti0.8Ce0.2N films are grown on oxidized Si(001) at 350°C using UHV reactive magnetron sputter deposition in pure N2. The N+2 to metal ratio incident at the growing film is maintained constant at 15 while the ion energy EN+2 is varied from 14 to 45 eV. Films grown with EN+2 = 14 eV consist of equiaxed nanograins with an average size of 2.0 nm while layers deposited with EN+2 = 45 eV exhibit a 2-nm-wide nanocolumnar structure. In both cases, the films are dense, atomically smooth, and have strong 002 preferred orientation with low stress.","Made available in DSpace on 2015-09-25T20:52:52Z (GMT). No. of bitstreams: 2 license.txt: 4848 bytes, checksum: 96035ab3f5e1c23cc7138a224ce498bd (MD5) 3160913.pdf: 6191582 bytes, checksum: 408acdea986508ba4b1a75f95f12c4ed (MD5) Previous issue date: 2004","Embargo set by: Seth Robbins for item 84037 Lift date: Forever Reason: Restricted to the U of I community idenfinitely during batch ingest of legacy ETDs","Restricted to the U of I community idenfinitely during batch ingest of legacy ETDs","U of I Only","121 p.","Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2004."],"dc:identifier":["http://hdl.handle.net/2142/82756","(MiAaPQ)AAI3160913"],"dc:language":["eng"],"dc:subject":["Physics, Condensed Matter"],"dc:title":["Nanostructural, Surface Morphological Evolution, and Physical Properties of Sodium Chloride-Structure Titanium Nitride and Titanium Cerium Nitride Layers as a Function of Composition"],"dc:type":["text"],"thesis:degree_discipline":["Materials Science and Engineering"],"thesis:degree_level":["Dissertation"],"thesis:degree_name":["Ph.D."],"thesis:institution_name":["University of Illinois at Urbana-Champaign"]},"updated_at":"2026-07-22T22:26:18Z"}