Synthesis, Microstructural Evolution, and Properties of Polycrystalline and Epitaxial Metastable Titanium Tungsten Nitride Alloy Layers
Epitaxial TiN/Ti0.53W0.47N superlattices with periods Lambda ranging from 16 to 205 A were also grown on MgO(001) substrates at 600°C. The superlattices were single crystals exhibiting coherent interfaces and nearly fully strained. All samples showed metallic behavior while resistivities decrease with period Lambda, reaching the level expected for bulk parallel layers at Lambda ≥ 70 A. TCR decreased with Lambda but remained positive. Tc is 7.8 K at Lambda = 16 A, decreasing to 5.4 K at Lambda = 205 A.
University of Illinois - Urbana-Champaign
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University of Illinois at Urbana-Champaign