{"id":{"repo_id":"uiuc","oai_identifier":"oai:www.ideals.illinois.edu:2142/78549"},"canonical_url":"https://search.dev.ndltd.org/etd/uiuc/oai:www.ideals.illinois.edu:2142/78549","repository":{"repo_id":"uiuc","name":"University of Illinois - Urbana-Champaign","base_url":"https://www.ideals.illinois.edu/oai-pmh"},"display":{"title":"Silicon nano-structure fabrication and application for surface-enhanced Raman spectroscopy","abstract":"We demonstrated fabrication of black silicon with slanted nano-pillar array on both planar and 3D micro- and mesoscale structures produced by a high-throughput lithography-free oblique-angle plasma etching process. Nano-pillars with gradual change in height were created on the same piece of silicon. The relation between the slant angle of nano-pillars and incident angle of directional plasma is experimentally investigated. In order to demonstrate the monolithic integration of nano-structures on micro- and mesoscale nonplanar surfaces, a nano-pillar forest is fabricated on nonplanar silicon surfaces in various morphologies such as silicon atomic force microscopy (AFM) tips and pyramidal pits. By integrating nano-pillars on inverse silicon micro-pyramid array devices, we further improved the surface-enhanced Raman scattering (SERS) enhancement property of this optimized commercial SERS substrate by severalfold even when using 66% less noble metal coating. We investigated the length gradient dependence and asymmetric properties of SERS effects for slanted nano-pillar with polarized excitation. This versatile and angle-controllable nano-pillar fabrication and monolithic 3D nano–micro–meso integration method provides new dimensions for production and optimization of SERS and other nano-photonic sensors.","abstract_html":"We demonstrated fabrication of black silicon with slanted nano-pillar array on both planar and 3D micro- and mesoscale structures produced by a high-throughput lithography-free oblique-angle plasma etching process. Nano-pillars with gradual change in height were created on the same piece of silicon. The relation between the slant angle of nano-pillars and incident angle of directional plasma is experimentally investigated. In order to demonstrate the monolithic integration of nano-structures on micro- and mesoscale nonplanar surfaces, a nano-pillar forest is fabricated on nonplanar silicon surfaces in various morphologies such as silicon atomic force microscopy (AFM) tips and pyramidal pits. By integrating nano-pillars on inverse silicon micro-pyramid array devices, we further improved the surface-enhanced Raman scattering (SERS) enhancement property of this optimized commercial SERS substrate by severalfold even when using 66% less noble metal coating. We investigated the length gradient dependence and asymmetric properties of SERS effects for slanted nano-pillar with polarized excitation. This versatile and angle-controllable nano-pillar fabrication and monolithic 3D nano–micro–meso integration method provides new dimensions for production and optimization of SERS and other nano-photonic sensors.","abstract_has_math":false,"creators":["Jiang, Jing"],"institution":"University of Illinois at Urbana-Champaign","degree_name":"M.S.","degree_level":"Thesis","degree_discipline":"Electrical & Computer Engr","degree_department":null,"school":null,"contributors":[],"advisors":[],"committee_chairs":[],"committee_members":[],"year":2015,"date_issued":"2015-07-22T22:18:09Z","date_published":"2015-07-22T22:18:09Z","updated_at":"2026-07-22T22:26:11Z","subjects":["nano","fabrication","Raman","spectroscopy","silicon"],"languages":["en"],"rights":["Copyright 2015 Jing Jiang"],"rights_urls":[],"identifier_entries":[]},"links":{"outbound_url":"http://hdl.handle.net/2142/78549","outbound_label":"Handle","outbound_source":"dc:identifier"},"metadata_groups":[{"id":"people","label":"People","entries":[{"key":"dc:creator","label":"Author","values":["Jiang, Jing"]}]},{"id":"academic_context","label":"Academic Context","entries":[{"key":"dc:date","label":"Dc Date","values":["2015-07-22T22:18:09Z","2015-05","2015-04-30","2015-5"]},{"key":"dc:type","label":"Dc Type","values":["text"]},{"key":"thesis:degree_discipline","label":"Discipline","values":["Electrical & Computer Engr"]},{"key":"thesis:degree_level","label":"Degree Level","values":["Thesis"]},{"key":"thesis:degree_name","label":"Degree Name","values":["M.S."]},{"key":"thesis:institution_name","label":"Thesis Institution Name","values":["University of Illinois at Urbana-Champaign"]}]},{"id":"subjects_keywords","label":"Subjects and Keywords","entries":[{"key":"dc:subject","label":"Dc Subject","values":["nano","fabrication","Raman","spectroscopy","silicon"]}]},{"id":"language_rights","label":"Language and Rights","entries":[{"key":"dc:language","label":"Dc Language","values":["en"]},{"key":"dc:rights","label":"Dc Rights","values":["Copyright 2015 Jing Jiang"]}]},{"id":"identifiers","label":"Identifiers","entries":[{"key":"dc:identifier","label":"Identifier","values":["http://hdl.handle.net/2142/78549"]}]},{"id":"additional","label":"Additional Metadata","entries":[{"key":"dc:description","label":"Description","values":["We demonstrated fabrication of black silicon with slanted nano-pillar array on both planar and 3D micro- and mesoscale structures produced by a high-throughput lithography-free oblique-angle plasma etching process. Nano-pillars with gradual change in height were created on the same piece of silicon. The relation between the slant angle of nano-pillars and incident angle of directional plasma is experimentally investigated. In order to demonstrate the monolithic integration of nano-structures on micro- and mesoscale nonplanar surfaces, a nano-pillar forest is fabricated on nonplanar silicon surfaces in various morphologies such as silicon atomic force microscopy (AFM) tips and pyramidal pits. By integrating nano-pillars on inverse silicon micro-pyramid array devices, we further improved the surface-enhanced Raman scattering (SERS) enhancement property of this optimized commercial SERS substrate by severalfold even when using 66% less noble metal coating. We investigated the length gradient dependence and asymmetric properties of SERS effects for slanted nano-pillar with polarized excitation. This versatile and angle-controllable nano-pillar fabrication and monolithic 3D nano–micro–meso integration method provides new dimensions for production and optimization of SERS and other nano-photonic sensors.","Submission original under an indefinite embargo labeled 'Open Access'. The submission was exported from vireo on 2015-07-22 without embargo terms","The student, Jing Jiang, accepted the attached license on 2015-04-29 at 14:28.","The student, Jing Jiang, submitted this Thesis for approval on 2015-04-29 at 14:33.","This Thesis was approved for publication on 2015-04-30 at 07:49.","DSpace SAF Submission Ingestion Package generated from Vireo submission #8191 on 2015-07-22 at 10:34:55","Made available in DSpace on 2015-07-22T22:18:09Z (GMT). No. of bitstreams: 2 JIANG-THESIS-2015.pdf: 1915207 bytes, checksum: 55105b87da97493238f49139dca7eb26 (MD5) LICENSE.txt: 4207 bytes, checksum: bf3a220d49637e23447577dc59cedb17 (MD5) Previous issue date: 2015-04-30"]},{"key":"dc:format","label":"Dc Format","values":["application/pdf"]},{"key":"dc:title","label":"Title","values":["Silicon nano-structure fabrication and application for surface-enhanced Raman spectroscopy"]}]}],"canonical_facts":{"dc:creator":["Jiang, Jing"],"dc:date":["2015-07-22T22:18:09Z","2015-05","2015-04-30","2015-5"],"dc:description":["We demonstrated fabrication of black silicon with slanted nano-pillar array on both planar and 3D micro- and mesoscale structures produced by a high-throughput lithography-free oblique-angle plasma etching process. Nano-pillars with gradual change in height were created on the same piece of silicon. The relation between the slant angle of nano-pillars and incident angle of directional plasma is experimentally investigated. In order to demonstrate the monolithic integration of nano-structures on micro- and mesoscale nonplanar surfaces, a nano-pillar forest is fabricated on nonplanar silicon surfaces in various morphologies such as silicon atomic force microscopy (AFM) tips and pyramidal pits. By integrating nano-pillars on inverse silicon micro-pyramid array devices, we further improved the surface-enhanced Raman scattering (SERS) enhancement property of this optimized commercial SERS substrate by severalfold even when using 66% less noble metal coating. We investigated the length gradient dependence and asymmetric properties of SERS effects for slanted nano-pillar with polarized excitation. This versatile and angle-controllable nano-pillar fabrication and monolithic 3D nano–micro–meso integration method provides new dimensions for production and optimization of SERS and other nano-photonic sensors.","Submission original under an indefinite embargo labeled 'Open Access'. The submission was exported from vireo on 2015-07-22 without embargo terms","The student, Jing Jiang, accepted the attached license on 2015-04-29 at 14:28.","The student, Jing Jiang, submitted this Thesis for approval on 2015-04-29 at 14:33.","This Thesis was approved for publication on 2015-04-30 at 07:49.","DSpace SAF Submission Ingestion Package generated from Vireo submission #8191 on 2015-07-22 at 10:34:55","Made available in DSpace on 2015-07-22T22:18:09Z (GMT). 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