Development of high-Q micromechanical cell mass sensor (optimizing parameters for in-plane mass sensors)
There exists a strong correlation between the behavior of a cell, its physical properties, and its surrounding environment. Biomechanics has led to an improved understanding of the way diseases evolve and their progression cycle, providing methods targeted towards curing these diseases. Moreover, many studies have been carried out on the progression that occur to cell biophysics. More particularly, these studies on the mechanics of individual cells have pointed to their coordination and cycle, which helps us understand cellular metabolic and physiological process better. Development of more precise, versatile and reliable measurement tools and techniques will provide a greater understanding of cellular behavior and biophysical properties. Micromechanical systems (MEMS) technology can provide these tools – for analyzing single cells and give important and useful information about their biophysical properties. In modern research, the ability to reliably investigate and understand these cellular properties requires measurement devices that provide high sensitivity, high throughput, and adaptability to include multiple on-chip functionalities. Many MEMS-based resonant sensors have been extensively studied and used as biological and chemical sensors. However, previous works have shown that there are several technology limitations that inhibit application of various mass sensors to mass measurement and analysis, including insufficient cell capture efficiency, media perfusion for long term growth, cell adhesion and cell movement/spreading. The primary objective of this work is to theoretically characterize and compare the characteristics of resonant sensors vibrating in-plane (lateral mode) and out-of-plane (transversal) and note the improvement when the microcantilever is excited in the in-plane direction. Our current out-of-plane resonant sensor while more effective than regular micro cantilevers, are less efficient as a sensing platform due to an additional liquid resistance exerted by the surrounding liquid. This work highlights the design of a relatively high-Q (quality factor) laterally vibrating mass sensor. It includes a review of other sensor geometries iteratively considered. A theoretical analysis and modelling of our optimal in-plane mass sensors are carried out.
Micromechanical systems (MEMS), Microcantilevers, Biomechanics, Resonant Cell Mass Sensors
University of Illinois - Urbana-Champaign
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University of Illinois at Urbana-Champaign