{"id":{"repo_id":"uiuc","oai_identifier":"oai:www.ideals.illinois.edu:2142/45561"},"canonical_url":"https://search.dev.ndltd.org/etd/uiuc/oai:www.ideals.illinois.edu:2142/45561","repository":{"repo_id":"uiuc","name":"University of Illinois - Urbana-Champaign","base_url":"https://www.ideals.illinois.edu/oai-pmh"},"display":{"title":"Al/Al2O3 microchannel plasma chemical reactor for ozone synthesis","abstract":"Ozone is produced efficiently in arrays of linear microplasmas at low temperatures and generated within alumina (Al2O3) microchannels. The array of microchannels device is fabricated from aluminum foil by chemical processing and mechanical ablation with photolithographic steps. Channels with 3 cm in length and 250 μm in width at the aperture of the channel produce spatially-uniform glow discharges in O2 or dry air feedstock gases at a pressures of 1 atmosphere and flow rates of 0.25 – 2.5 standard liters per minute (slm). Several devices and array structures, including Al/Al2O3 or glass channels, also have been fabricated and tested. Efficiencies and O3 concentrations surpassing 104 g/kWh and 17 g/Nm3, respectively, have been measured, and arrays as large as 24 microchannels have been tested in this thesis. The results presented here suggest a new approach to plasmachemical reactors, one in which “massively parallel” processing of one or more gases in non-streamer glow discharges efficiently produces products of commercial value in thousands of microchannels fabricated in recyclable and inexpensive materials. Reductions of at least an order of magnitude in the weight and volume of microplasma-based O3 reactors, relative to conventional dielectric barrier discharge technology, appear to be feasible.","abstract_html":"Ozone is produced efficiently in arrays of linear microplasmas at low temperatures and generated within alumina (Al2O3) microchannels. The array of microchannels device is fabricated from aluminum foil by chemical processing and mechanical ablation with photolithographic steps. Channels with 3 cm in length and 250 μm in width at the aperture of the channel produce spatially-uniform glow discharges in O2 or dry air feedstock gases at a pressures of 1 atmosphere and flow rates of 0.25 – 2.5 standard liters per minute (slm). Several devices and array structures, including Al/Al2O3 or glass channels, also have been fabricated and tested. Efficiencies and O3 concentrations surpassing 104 g/kWh and 17 g/Nm3, respectively, have been measured, and arrays as large as 24 microchannels have been tested in this thesis. The results presented here suggest a new approach to plasmachemical reactors, one in which “massively parallel” processing of one or more gases in non-streamer glow discharges efficiently produces products of commercial value in thousands of microchannels fabricated in recyclable and inexpensive materials. Reductions of at least an order of magnitude in the weight and volume of microplasma-based O3 reactors, relative to conventional dielectric barrier discharge technology, appear to be feasible.","abstract_has_math":false,"creators":["Kim, Min Hwan"],"institution":"University of Illinois at Urbana-Champaign","degree_name":"M.S.","degree_level":"Thesis","degree_discipline":"Nuclear, Plasma, Radiolgc Engr","degree_department":null,"school":null,"contributors":["Eden, James G."],"advisors":[],"committee_chairs":[],"committee_members":[],"year":2013,"date_issued":"2013-08-22T16:47:52Z","date_published":"2013-08-22T16:47:52Z","updated_at":"2026-07-22T22:25:36Z","subjects":["Ozone","Micro","channel","Plasma","Alumina","Chemical"],"languages":["en"],"rights":["Copyright 2013 Min Hwan Kim"],"rights_urls":[],"identifier_entries":[]},"links":{"outbound_url":"http://hdl.handle.net/2142/45561","outbound_label":"Handle","outbound_source":"dc:identifier"},"metadata_groups":[{"id":"people","label":"People","entries":[{"key":"dc:contributor","label":"Contributor","values":["Eden, James G."]},{"key":"dc:creator","label":"Author","values":["Kim, Min Hwan"]}]},{"id":"academic_context","label":"Academic Context","entries":[{"key":"dc:date","label":"Dc Date","values":["2013-08-22T16:47:52Z","2015-08-22T10:00:57Z","2013-08"]},{"key":"dc:type","label":"Dc Type","values":["text"]},{"key":"thesis:degree_discipline","label":"Discipline","values":["Nuclear, Plasma, Radiolgc Engr"]},{"key":"thesis:degree_level","label":"Degree Level","values":["Thesis"]},{"key":"thesis:degree_name","label":"Degree Name","values":["M.S."]},{"key":"thesis:institution_name","label":"Thesis Institution Name","values":["University of Illinois at Urbana-Champaign"]}]},{"id":"subjects_keywords","label":"Subjects and Keywords","entries":[{"key":"dc:subject","label":"Dc Subject","values":["Ozone","Micro","channel","Plasma","Alumina","Chemical"]}]},{"id":"language_rights","label":"Language and Rights","entries":[{"key":"dc:language","label":"Dc Language","values":["en"]},{"key":"dc:rights","label":"Dc Rights","values":["Copyright 2013 Min Hwan Kim"]}]},{"id":"identifiers","label":"Identifiers","entries":[{"key":"dc:identifier","label":"Identifier","values":["http://hdl.handle.net/2142/45561"]}]},{"id":"additional","label":"Additional Metadata","entries":[{"key":"dc:description","label":"Description","values":["Ozone is produced efficiently in arrays of linear microplasmas at low temperatures and generated within alumina (Al2O3) microchannels. The array of microchannels device is fabricated from aluminum foil by chemical processing and mechanical ablation with photolithographic steps. Channels with 3 cm in length and 250 μm in width at the aperture of the channel produce spatially-uniform glow discharges in O2 or dry air feedstock gases at a pressures of 1 atmosphere and flow rates of 0.25 – 2.5 standard liters per minute (slm). Several devices and array structures, including Al/Al2O3 or glass channels, also have been fabricated and tested. Efficiencies and O3 concentrations surpassing 104 g/kWh and 17 g/Nm3, respectively, have been measured, and arrays as large as 24 microchannels have been tested in this thesis. The results presented here suggest a new approach to plasmachemical reactors, one in which “massively parallel” processing of one or more gases in non-streamer glow discharges efficiently produces products of commercial value in thousands of microchannels fabricated in recyclable and inexpensive materials. Reductions of at least an order of magnitude in the weight and volume of microplasma-based O3 reactors, relative to conventional dielectric barrier discharge technology, appear to be feasible.","Item withdrawn by Mark Zulauf (zulauf@illinois.edu) on 2013-07-01T19:47:24Z Item was in collections: University of Illinois Theses & Dissertations (ID: 1) No. of bitstreams: 2 Min Hwan_Kim.docx: 4563545 bytes, checksum: 6ec324b5cacd97368f0f6266b720e7de (MD5) Min Hwan_Kim.pdf: 1883544 bytes, checksum: b89e22230ee3b2fa915bf7bd492136ea (MD5)","Made available in DSpace on 2013-08-22T16:47:52Z (GMT). No. of bitstreams: 3 Min Hwan_Kim.pdf: 1883544 bytes, checksum: b89e22230ee3b2fa915bf7bd492136ea (MD5) Min Hwan_Kim.docx: 4563545 bytes, checksum: 6ec324b5cacd97368f0f6266b720e7de (MD5) license.txt: 4060 bytes, checksum: 2cfa889b383b64857068f72b25b50e65 (MD5)","Restriction data tranferred 2014-07-01T11:20:59-05:00 Original Data Group with Access UIUC Users [automated] Release Date: 2015-08-22 11:49:27 UTC Reason: Author requested U of Illinois access only (OA after 2yrs) in Vireo ETD system","Item marked as restricted to the 'UIUC Users [automated]' Group (id=2) by Seth Robbins (srobbins@illinois.edu) on 2013-08-22T16:49:35Z Item is restricted until 2015-08-22T16:49:27Z","U of I Only Restriction Lifted for Item 45543 on 2015-08-22T10:00:57Z."]},{"key":"dc:title","label":"Title","values":["Al/Al2O3 microchannel plasma chemical reactor for ozone synthesis"]}]}],"canonical_facts":{"dc:contributor":["Eden, James G."],"dc:creator":["Kim, Min Hwan"],"dc:date":["2013-08-22T16:47:52Z","2015-08-22T10:00:57Z","2013-08"],"dc:description":["Ozone is produced efficiently in arrays of linear microplasmas at low temperatures and generated within alumina (Al2O3) microchannels. The array of microchannels device is fabricated from aluminum foil by chemical processing and mechanical ablation with photolithographic steps. Channels with 3 cm in length and 250 μm in width at the aperture of the channel produce spatially-uniform glow discharges in O2 or dry air feedstock gases at a pressures of 1 atmosphere and flow rates of 0.25 – 2.5 standard liters per minute (slm). Several devices and array structures, including Al/Al2O3 or glass channels, also have been fabricated and tested. Efficiencies and O3 concentrations surpassing 104 g/kWh and 17 g/Nm3, respectively, have been measured, and arrays as large as 24 microchannels have been tested in this thesis. The results presented here suggest a new approach to plasmachemical reactors, one in which “massively parallel” processing of one or more gases in non-streamer glow discharges efficiently produces products of commercial value in thousands of microchannels fabricated in recyclable and inexpensive materials. Reductions of at least an order of magnitude in the weight and volume of microplasma-based O3 reactors, relative to conventional dielectric barrier discharge technology, appear to be feasible.","Item withdrawn by Mark Zulauf (zulauf@illinois.edu) on 2013-07-01T19:47:24Z Item was in collections: University of Illinois Theses & Dissertations (ID: 1) No. of bitstreams: 2 Min Hwan_Kim.docx: 4563545 bytes, checksum: 6ec324b5cacd97368f0f6266b720e7de (MD5) Min Hwan_Kim.pdf: 1883544 bytes, checksum: b89e22230ee3b2fa915bf7bd492136ea (MD5)","Made available in DSpace on 2013-08-22T16:47:52Z (GMT). No. of bitstreams: 3 Min Hwan_Kim.pdf: 1883544 bytes, checksum: b89e22230ee3b2fa915bf7bd492136ea (MD5) Min Hwan_Kim.docx: 4563545 bytes, checksum: 6ec324b5cacd97368f0f6266b720e7de (MD5) license.txt: 4060 bytes, checksum: 2cfa889b383b64857068f72b25b50e65 (MD5)","Restriction data tranferred 2014-07-01T11:20:59-05:00 Original Data Group with Access UIUC Users [automated] Release Date: 2015-08-22 11:49:27 UTC Reason: Author requested U of Illinois access only (OA after 2yrs) in Vireo ETD system","Item marked as restricted to the 'UIUC Users [automated]' Group (id=2) by Seth Robbins (srobbins@illinois.edu) on 2013-08-22T16:49:35Z Item is restricted until 2015-08-22T16:49:27Z","U of I Only Restriction Lifted for Item 45543 on 2015-08-22T10:00:57Z."],"dc:identifier":["http://hdl.handle.net/2142/45561"],"dc:language":["en"],"dc:rights":["Copyright 2013 Min Hwan Kim"],"dc:subject":["Ozone","Micro","channel","Plasma","Alumina","Chemical"],"dc:title":["Al/Al2O3 microchannel plasma chemical reactor for ozone synthesis"],"dc:type":["text"],"thesis:degree_discipline":["Nuclear, Plasma, Radiolgc Engr"],"thesis:degree_level":["Thesis"],"thesis:degree_name":["M.S."],"thesis:institution_name":["University of Illinois at Urbana-Champaign"]},"updated_at":"2026-07-22T22:25:36Z"}