{"id":{"repo_id":"uiuc","oai_identifier":"oai:www.ideals.illinois.edu:2142/31048"},"canonical_url":"https://search.dev.ndltd.org/etd/uiuc/oai:www.ideals.illinois.edu:2142/31048","repository":{"repo_id":"uiuc","name":"University of Illinois - Urbana-Champaign","base_url":"https://www.ideals.illinois.edu/oai-pmh"},"display":{"title":"Impact of silicon nitride thickness on the infrared sensitivity of silicon nitride-aluminum microcantilevers","abstract":"This thesis investigates how silicon nitride thickness impacts the performance of silicon nitride - aluminum bimaterial cantilever infrared sensors. A model predicts cantilever behavior by considering heat transfer within and from the cantilever, cantilever optical properties, cantilever bending mechanics, and thermomechanical noise. Silicon nitride-aluminum bimaterial cantilevers of different thicknesses were designed and fabricated. Cantilever sensitivity and noise were measured when exposed to infrared laser radiation. For cantilever thickness up to 1200 nm, thicker silicon nitride results in improved signal to noise ratio due to increased absorptivity and decreased noise. The best cantilever had an incident flux sensitivity of 2.1 × 10^-3 V W^-1 m^2 and an incident flux signal to noise ratio of 406 Hz^(1/2) W^-1 m^2, which is more than an order of magnitude improvement compared to the best commercial cantilever.","abstract_html":"This thesis investigates how silicon nitride thickness impacts the performance of silicon nitride - aluminum bimaterial cantilever infrared sensors. A model predicts cantilever behavior by considering heat transfer within and from the cantilever, cantilever optical properties, cantilever bending mechanics, and thermomechanical noise. Silicon nitride-aluminum bimaterial cantilevers of different thicknesses were designed and fabricated. Cantilever sensitivity and noise were measured when exposed to infrared laser radiation. For cantilever thickness up to 1200 nm, thicker silicon nitride results in improved signal to noise ratio due to increased absorptivity and decreased noise. The best cantilever had an incident flux sensitivity of 2.1 × 10^-3 V W^-1 m^2 and an incident flux signal to noise ratio of 406 Hz^(1/2) W^-1 m^2, which is more than an order of magnitude improvement compared to the best commercial cantilever.","abstract_has_math":false,"creators":["Rosenberger, Matthew"],"institution":"University of Illinois at Urbana-Champaign","degree_name":"M.S.","degree_level":"Thesis","degree_discipline":"Mechanical Engineering","degree_department":null,"school":null,"contributors":["King, William P."],"advisors":[],"committee_chairs":[],"committee_members":[],"year":2012,"date_issued":"2012-05-22T00:24:16Z","date_published":"2012-05-22T00:24:16Z","updated_at":"2026-07-22T22:25:29Z","subjects":["bimaterial cantilever","thermomechanical","thermometer","infrared sensor"],"languages":["en"],"rights":["Copyright 2012 Matthew Rosenberger"],"rights_urls":[],"identifier_entries":[]},"links":{"outbound_url":"http://hdl.handle.net/2142/31048","outbound_label":"Handle","outbound_source":"dc:identifier"},"metadata_groups":[{"id":"people","label":"People","entries":[{"key":"dc:contributor","label":"Contributor","values":["King, William P."]},{"key":"dc:creator","label":"Author","values":["Rosenberger, Matthew"]}]},{"id":"academic_context","label":"Academic Context","entries":[{"key":"dc:date","label":"Dc Date","values":["2012-05-22T00:24:16Z","2012-05"]},{"key":"dc:type","label":"Dc Type","values":["text"]},{"key":"thesis:degree_discipline","label":"Discipline","values":["Mechanical Engineering"]},{"key":"thesis:degree_level","label":"Degree Level","values":["Thesis"]},{"key":"thesis:degree_name","label":"Degree Name","values":["M.S."]},{"key":"thesis:institution_name","label":"Thesis Institution Name","values":["University of Illinois at Urbana-Champaign"]}]},{"id":"subjects_keywords","label":"Subjects and Keywords","entries":[{"key":"dc:subject","label":"Dc Subject","values":["bimaterial cantilever","thermomechanical","thermometer","infrared sensor"]}]},{"id":"language_rights","label":"Language and Rights","entries":[{"key":"dc:language","label":"Dc Language","values":["en"]},{"key":"dc:rights","label":"Dc Rights","values":["Copyright 2012 Matthew Rosenberger"]}]},{"id":"identifiers","label":"Identifiers","entries":[{"key":"dc:identifier","label":"Identifier","values":["http://hdl.handle.net/2142/31048"]}]},{"id":"additional","label":"Additional Metadata","entries":[{"key":"dc:description","label":"Description","values":["This thesis investigates how silicon nitride thickness impacts the performance of silicon nitride - aluminum bimaterial cantilever infrared sensors. A model predicts cantilever behavior by considering heat transfer within and from the cantilever, cantilever optical properties, cantilever bending mechanics, and thermomechanical noise. Silicon nitride-aluminum bimaterial cantilevers of different thicknesses were designed and fabricated. Cantilever sensitivity and noise were measured when exposed to infrared laser radiation. For cantilever thickness up to 1200 nm, thicker silicon nitride results in improved signal to noise ratio due to increased absorptivity and decreased noise. The best cantilever had an incident flux sensitivity of 2.1 × 10^-3 V W^-1 m^2 and an incident flux signal to noise ratio of 406 Hz^(1/2) W^-1 m^2, which is more than an order of magnitude improvement compared to the best commercial cantilever.","Item withdrawn by Mark Zulauf (zulauf@illinois.edu) on 2012-04-21T15:54:05Z Item was in collections: University of Illinois Theses & Dissertations (ID: 1) No. of bitstreams: 2 Rosenberger_Matthew.docx: 964060 bytes, checksum: b58cb664f239b088b041c56a014c2df6 (MD5) Rosenberger_Matthew.pdf: 3502602 bytes, checksum: ce6d40f7ae8f6bf4c6a1534c793aa9ba (MD5)","Made available in DSpace on 2012-05-22T00:24:16Z (GMT). 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Silicon nitride-aluminum bimaterial cantilevers of different thicknesses were designed and fabricated. Cantilever sensitivity and noise were measured when exposed to infrared laser radiation. For cantilever thickness up to 1200 nm, thicker silicon nitride results in improved signal to noise ratio due to increased absorptivity and decreased noise. The best cantilever had an incident flux sensitivity of 2.1 × 10^-3 V W^-1 m^2 and an incident flux signal to noise ratio of 406 Hz^(1/2) W^-1 m^2, which is more than an order of magnitude improvement compared to the best commercial cantilever.","Item withdrawn by Mark Zulauf (zulauf@illinois.edu) on 2012-04-21T15:54:05Z Item was in collections: University of Illinois Theses & Dissertations (ID: 1) No. of bitstreams: 2 Rosenberger_Matthew.docx: 964060 bytes, checksum: b58cb664f239b088b041c56a014c2df6 (MD5) Rosenberger_Matthew.pdf: 3502602 bytes, checksum: ce6d40f7ae8f6bf4c6a1534c793aa9ba (MD5)","Made available in DSpace on 2012-05-22T00:24:16Z (GMT). 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