{"id":{"repo_id":"uiuc","oai_identifier":"oai:www.ideals.illinois.edu:2142/26151"},"canonical_url":"https://search.dev.ndltd.org/etd/uiuc/oai:www.ideals.illinois.edu:2142/26151","repository":{"repo_id":"uiuc","name":"University of Illinois - Urbana-Champaign","base_url":"https://www.ideals.illinois.edu/oai-pmh"},"display":{"title":"Advanced control of MEMS probing devices","abstract":"This work is aimed at developing a control-system theoretic approach for addressing certain performance issues that arise in micro-electro-mechanical systems (MEMS). In particular, it focuses on applications such as nano-positioning, where control design becomes necessary to meet high resolution, bandwidth, and reliability (robustness) demands especially when there is significant model uncertainty and instrumentation noise. In this article, a systematic control design from robust control approach is demonstrated on a micro probing device with electrically separated sensing combs and driving combs. The system is identified through experimental input-output data and the hardware is setup in such a way that the resulting model is a linear time-invariant model with appropriate choice of variables even when the the underlying constitutive laws are nonlinear. Controllers are developed based on PID and H∞ control design methodologies. Control algorithms from PID control and robust control have been implemented on dSpace digital processing platform. The implemented control (H∞) design demonstrates a significant (≈ 400%) improvement in the bandwidth, where the bandwidths from the closed-loop sensitivity and complementary-sensitivity functions respectively are 68 Hz and 74 Hz. A significant improvement in reliability and repeatability (robustness to uncertainties) as well as noise attenuation is also demonstrated through this design.","abstract_html":"This work is aimed at developing a control-system theoretic approach for addressing certain performance issues that arise in micro-electro-mechanical systems (MEMS). In particular, it focuses on applications such as nano-positioning, where control design becomes necessary to meet high resolution, bandwidth, and reliability (robustness) demands especially when there is significant model uncertainty and instrumentation noise. In this article, a systematic control design from robust control approach is demonstrated on a micro probing device with electrically separated sensing combs and driving combs. The system is identified through experimental input-output data and the hardware is setup in such a way that the resulting model is a linear time-invariant model with appropriate choice of variables even when the the underlying constitutive laws are nonlinear. Controllers are developed based on PID and H∞ control design methodologies. Control algorithms from PID control and robust control have been implemented on dSpace digital processing platform. The implemented control (H∞) design demonstrates a significant (≈ 400%) improvement in the bandwidth, where the bandwidths from the closed-loop sensitivity and complementary-sensitivity functions respectively are 68 Hz and 74 Hz. A significant improvement in reliability and repeatability (robustness to uncertainties) as well as noise attenuation is also demonstrated through this design.","abstract_has_math":false,"creators":["Zhang, Xuemeng"],"institution":"University of Illinois at Urbana-Champaign","degree_name":"M.S.","degree_level":"Thesis","degree_discipline":"Mechanical Engineering","degree_department":null,"school":null,"contributors":["Salapaka, Srinivasa M."],"advisors":[],"committee_chairs":[],"committee_members":[],"year":2011,"date_issued":"2011-08-25T22:16:24Z","date_published":"2011-08-25T22:16:24Z","updated_at":"2026-07-22T22:25:26Z","subjects":["micro-electro-mechanical systems (MEMS)","electrostatic comb drive","nanopositioning","system identification","H∞ control."],"languages":["en"],"rights":["Copyright 2011 by Xuemeng Zhang. 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In this article, a systematic control design from robust control approach is demonstrated on a micro probing device with electrically separated sensing combs and driving combs. The system is identified through experimental input-output data and the hardware is setup in such a way that the resulting model is a linear time-invariant model with appropriate choice of variables even when the the underlying constitutive laws are nonlinear. Controllers are developed based on PID and H∞ control design methodologies. Control algorithms from PID control and robust control have been implemented on dSpace digital processing platform. The implemented control (H∞) design demonstrates a significant (≈ 400%) improvement in the bandwidth, where the bandwidths from the closed-loop sensitivity and complementary-sensitivity functions respectively are 68 Hz and 74 Hz. 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