{"id":{"repo_id":"uiuc","oai_identifier":"oai:www.ideals.illinois.edu:2142/22523"},"canonical_url":"https://search.dev.ndltd.org/etd/uiuc/oai:www.ideals.illinois.edu:2142/22523","repository":{"repo_id":"uiuc","name":"University of Illinois - Urbana-Champaign","base_url":"https://www.ideals.illinois.edu/oai-pmh"},"display":{"title":"Self-consistent Monte Carlo simulations of plasma processing reactors","abstract":"When the fractional ionization of a plasma exceeds 10$\\sp{-5}- 10\\sp{-4}$, electron-electron (e-e) collisions become important. These collisions cause the electron energy distribution (EED) to approach a Maxwellian distribution. Electron cyclotron resonance (ECR) reactors for etching and deposition have a high plasma density and fall into the category of devices for which e-e collisions must be considered. In this thesis, a self-consistent Monte Carlo (MC) simulation for low-temperature partially ionized plasmas is presented. In this simulation, the effects of electron-electron collisions are taken into account. Electron-electron collisions are treated as being functionally equivalent to electron-neutral collisions. That is, instead of having an electron collide with an individual electron, the electrons collide with an energy-resolved electron fluid. The modified null-cross-sectional technique is employed, making the MC simulation computationally tractable. The model is used to study ECR reactors and is a hybrid MC fluid model. The MC simulation generates details of the EED and the fluid model generates the ambipolar fields. The MC and fluid models are iterated to obtain a converged solution. The model has been utilized to investigate electron swarm parameters in ECR reactors for Ar and N$\\sb2$ plasmas at different pressures and different input microwave powers. The parameters investigated are the EED, electron impact rate coefficients, average electron energy, plasma potential, and power deposition. The results are in general agreement with experiment.","abstract_html":"When the fractional ionization of a plasma exceeds 10$\\sp{-5}- 10\\sp{-4}$, electron-electron (e-e) collisions become important. These collisions cause the electron energy distribution (EED) to approach a Maxwellian distribution. Electron cyclotron resonance (ECR) reactors for etching and deposition have a high plasma density and fall into the category of devices for which e-e collisions must be considered. In this thesis, a self-consistent Monte Carlo (MC) simulation for low-temperature partially ionized plasmas is presented. In this simulation, the effects of electron-electron collisions are taken into account. Electron-electron collisions are treated as being functionally equivalent to electron-neutral collisions. That is, instead of having an electron collide with an individual electron, the electrons collide with an energy-resolved electron fluid. The modified null-cross-sectional technique is employed, making the MC simulation computationally tractable. The model is used to study ECR reactors and is a hybrid MC fluid model. The MC simulation generates details of the EED and the fluid model generates the ambipolar fields. The MC and fluid models are iterated to obtain a converged solution. The model has been utilized to investigate electron swarm parameters in ECR reactors for Ar and N$\\sb2$ plasmas at different pressures and different input microwave powers. The parameters investigated are the EED, electron impact rate coefficients, average electron energy, plasma potential, and power deposition. The results are in general agreement with experiment.","abstract_has_math":true,"creators":["Weng, Yilin"],"institution":"University of Illinois at Urbana-Champaign","degree_name":"Ph.D.","degree_level":"Dissertation","degree_discipline":"Electrical and Computer Engineering","degree_department":null,"school":null,"contributors":["Kushner, Mark J."],"advisors":[],"committee_chairs":[],"committee_members":[],"year":1991,"date_issued":"1991","date_published":"1991","updated_at":"2026-07-22T22:25:20Z","subjects":["Engineering, Electronics and Electrical"],"languages":["eng"],"rights":["Copyright 1991 Weng, Yilin"],"rights_urls":[],"identifier_entries":[{"key":"dc:identifier","label":"Identifier","values":["AAI9211028","(UMI)AAI9211028"],"render_values":[{"text":"AAI9211028","href":null,"code":true},{"text":"(UMI)AAI9211028","href":null,"code":true}]}]},"links":{"outbound_url":"http://hdl.handle.net/2142/22523","outbound_label":"Handle","outbound_source":"dc:identifier"},"metadata_groups":[{"id":"people","label":"People","entries":[{"key":"dc:contributor","label":"Contributor","values":["Kushner, Mark J."]},{"key":"dc:creator","label":"Author","values":["Weng, Yilin"]}]},{"id":"academic_context","label":"Academic Context","entries":[{"key":"dc:date","label":"Dc Date","values":["1991","2011-05-07T13:42:34Z","10000-01-01"]},{"key":"dc:type","label":"Dc Type","values":["text"]},{"key":"thesis:degree_discipline","label":"Discipline","values":["Electrical and Computer Engineering"]},{"key":"thesis:degree_level","label":"Degree Level","values":["Dissertation"]},{"key":"thesis:degree_name","label":"Degree Name","values":["Ph.D."]},{"key":"thesis:institution_name","label":"Thesis Institution Name","values":["University of Illinois at Urbana-Champaign"]}]},{"id":"subjects_keywords","label":"Subjects and Keywords","entries":[{"key":"dc:subject","label":"Dc Subject","values":["Engineering, Electronics and Electrical"]}]},{"id":"language_rights","label":"Language and Rights","entries":[{"key":"dc:language","label":"Dc Language","values":["eng"]},{"key":"dc:rights","label":"Dc Rights","values":["Copyright 1991 Weng, Yilin"]}]},{"id":"identifiers","label":"Identifiers","entries":[{"key":"dc:identifier","label":"Identifier","values":["AAI9211028","(UMI)AAI9211028","http://hdl.handle.net/2142/22523"]}]},{"id":"additional","label":"Additional Metadata","entries":[{"key":"dc:description","label":"Description","values":["When the fractional ionization of a plasma exceeds 10$\\sp{-5}- 10\\sp{-4}$, electron-electron (e-e) collisions become important. These collisions cause the electron energy distribution (EED) to approach a Maxwellian distribution. Electron cyclotron resonance (ECR) reactors for etching and deposition have a high plasma density and fall into the category of devices for which e-e collisions must be considered. In this thesis, a self-consistent Monte Carlo (MC) simulation for low-temperature partially ionized plasmas is presented. In this simulation, the effects of electron-electron collisions are taken into account. Electron-electron collisions are treated as being functionally equivalent to electron-neutral collisions. That is, instead of having an electron collide with an individual electron, the electrons collide with an energy-resolved electron fluid. The modified null-cross-sectional technique is employed, making the MC simulation computationally tractable. The model is used to study ECR reactors and is a hybrid MC fluid model. The MC simulation generates details of the EED and the fluid model generates the ambipolar fields. The MC and fluid models are iterated to obtain a converged solution. The model has been utilized to investigate electron swarm parameters in ECR reactors for Ar and N$\\sb2$ plasmas at different pressures and different input microwave powers. The parameters investigated are the EED, electron impact rate coefficients, average electron energy, plasma potential, and power deposition. The results are in general agreement with experiment.","Made available in DSpace on 2011-05-07T13:42:34Z (GMT). No. of bitstreams: 2 license.txt: 4922 bytes, checksum: 910b249b4beec47e7ab768910c8f966f (MD5) 9211028.pdf: 2927591 bytes, checksum: 34d0821c04926d6c626748f4fe8d002c (MD5) Previous issue date: 1991","Item marked as restricted to the 'UIUC Users [automated]' Group (id=2) by Howard Ding (hding2@illinois.edu) on 2011-05-07T14:58:12Z Item is restricted indefinitely.","Restriction data tranferred 2014-07-01T11:27:21-05:00 Original Data Group with Access UIUC Users [automated] Release Date: none Reason: ETDs are only available to UIUC Users without author permission","ETDs are only available to UIUC Users without author permission","U of I Only"]},{"key":"dc:title","label":"Title","values":["Self-consistent Monte Carlo simulations of plasma processing reactors"]}]}],"canonical_facts":{"dc:contributor":["Kushner, Mark J."],"dc:creator":["Weng, Yilin"],"dc:date":["1991","2011-05-07T13:42:34Z","10000-01-01"],"dc:description":["When the fractional ionization of a plasma exceeds 10$\\sp{-5}- 10\\sp{-4}$, electron-electron (e-e) collisions become important. These collisions cause the electron energy distribution (EED) to approach a Maxwellian distribution. Electron cyclotron resonance (ECR) reactors for etching and deposition have a high plasma density and fall into the category of devices for which e-e collisions must be considered. In this thesis, a self-consistent Monte Carlo (MC) simulation for low-temperature partially ionized plasmas is presented. In this simulation, the effects of electron-electron collisions are taken into account. Electron-electron collisions are treated as being functionally equivalent to electron-neutral collisions. That is, instead of having an electron collide with an individual electron, the electrons collide with an energy-resolved electron fluid. The modified null-cross-sectional technique is employed, making the MC simulation computationally tractable. The model is used to study ECR reactors and is a hybrid MC fluid model. The MC simulation generates details of the EED and the fluid model generates the ambipolar fields. The MC and fluid models are iterated to obtain a converged solution. The model has been utilized to investigate electron swarm parameters in ECR reactors for Ar and N$\\sb2$ plasmas at different pressures and different input microwave powers. The parameters investigated are the EED, electron impact rate coefficients, average electron energy, plasma potential, and power deposition. The results are in general agreement with experiment.","Made available in DSpace on 2011-05-07T13:42:34Z (GMT). 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