Fabrication of novel semiconductor lasers grown by metalorganic chemical vapor deposition
This work describes novel fabrication processes and the advantages of metalorganic chemical vapor deposition (MOCVD) growth on nonplanar substrates which increase the maximum output power of semiconductor lasers when limited by catastrophic optical degradation (COD). Additionally, the characteristics and properties of high energy implantations are discussed as they relate to the fabrication of optoelectronic devices.
Engineering, Electronics and Electrical, Physics, Electricity and Magnetism
University of Illinois - Urbana-Champaign
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University of Illinois at Urbana-Champaign