Synthesis and characterization of nitrogen-rich chemical vapor deposition precursors
Submission published under a 24 month embargo labeled 'U of I Access', the embargo will last until 2027-08-01
Azides, Triazenides, Silatetrazolines, Silicon-nitrides, Transition Metal-nitrides, Chemical Vapor Deposition (cvd)
University of Illinois - Urbana-Champaign
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