{"id":{"repo_id":"uiuc","oai_identifier":"oai:www.ideals.illinois.edu:2142/127341"},"canonical_url":"https://search.dev.ndltd.org/etd/uiuc/oai:www.ideals.illinois.edu:2142/127341","repository":{"repo_id":"uiuc","name":"University of Illinois - Urbana-Champaign","base_url":"https://www.ideals.illinois.edu/oai-pmh"},"display":{"title":"Efficient fabrication of micropillars for water repellency using photolightography","abstract":"Submission published under a 24 month embargo labeled 'U of I Access', the embargo will last until 2026-12-01","abstract_html":"Submission published under a 24 month embargo labeled 'U of I Access', the embargo will last until 2026-12-01","abstract_has_math":false,"creators":["Faghihi, Parsa"],"institution":"University of Illinois at Urbana-Champaign","degree_name":"M.S.","degree_level":"Thesis","degree_discipline":"Mechanical Engineering","degree_department":null,"school":null,"contributors":["Miljkovic, Nenad"],"advisors":[],"committee_chairs":[],"committee_members":[],"year":2024,"date_issued":"2024-11-07","date_published":"2024-11-07","updated_at":"2026-07-22T22:25:03Z","subjects":["Micro Pillars","Water Repellency","Su8","Photolithography"],"languages":["eng","en"],"rights":["Copyright 2024 Parsa Faghihi"],"rights_urls":[],"identifier_entries":[]},"links":{"outbound_url":"https://hdl.handle.net/2142/127341","outbound_label":"Handle","outbound_source":"dc:identifier"},"metadata_groups":[{"id":"people","label":"People","entries":[{"key":"dc:contributor","label":"Contributor","values":["Miljkovic, Nenad"]},{"key":"dc:creator","label":"Author","values":["Faghihi, Parsa"]}]},{"id":"academic_context","label":"Academic Context","entries":[{"key":"dc:date","label":"Dc Date","values":["2024-11-07","2024-12"]},{"key":"dc:type","label":"Dc Type","values":["text","Thesis"]},{"key":"thesis:degree_discipline","label":"Discipline","values":["Mechanical Engineering"]},{"key":"thesis:degree_level","label":"Degree Level","values":["Thesis"]},{"key":"thesis:degree_name","label":"Degree Name","values":["M.S."]},{"key":"thesis:institution_name","label":"Thesis Institution Name","values":["University of Illinois at Urbana-Champaign"]}]},{"id":"subjects_keywords","label":"Subjects and Keywords","entries":[{"key":"dc:subject","label":"Dc Subject","values":["Micro Pillars","Water Repellency","Su8","Photolithography"]}]},{"id":"language_rights","label":"Language and Rights","entries":[{"key":"dc:language","label":"Dc Language","values":["eng","en"]},{"key":"dc:rights","label":"Dc Rights","values":["Copyright 2024 Parsa Faghihi"]}]},{"id":"identifiers","label":"Identifiers","entries":[{"key":"dc:identifier","label":"Identifier","values":["https://hdl.handle.net/2142/127341"]}]},{"id":"additional","label":"Additional Metadata","entries":[{"key":"dc:description","label":"Description","values":["Submission published under a 24 month embargo labeled 'U of I Access', the embargo will last until 2026-12-01","The student, Parsa Faghihi, accepted the attached license on 2024-11-07 at 11:12.","The student, Parsa Faghihi, submitted this Thesis for approval on 2024-11-07 at 11:21.","This Thesis was approved for publication on 2024-11-07 at 17:38.","DSpace SAF Submission Ingestion Package generated from Vireo submission #21299 on 2025-03-28 at 14:43:02","This study focuses on the fabrication and characterization of SU-8-based micropillars designed for water repellency and related applications. Using SU-8 photoresist, we created micropillars with various shapes and structures on silicon wafers to achieve enhanced water-repellent surfaces. Optimal baking and exposure parameters were thoroughly evaluated, revealing that efficient fabrication requires a higher exposure dose (~800 mJ/cm²) and extended baking time (~30 minutes) compared to standard recommendations. Both SU-8-2005 and SU-8-2015 were examined for their performance under these conditions. To enhance hydrophobicity and achieve superhydrophobic properties, two different hydrophobic coatings and boehmite nanostructures were applied. Surface characterization was conducted using 3D confocal microscopy and a microgoniometer, with results demonstrating that the micropillars could increase water droplet contact angles by approximately 30° on hydrophobic surfaces, reaching a contact angle of ~149° with C4F8 coating. The application potential of these micropillars for water removal in condensation conditions was explored using Environmental Scanning Electron Microscopy (ESEM). The micropillars effectively support applications in water repellency, condensation, boiling, and particularly in droplet jumping phenomena on superhydrophobic surfaces. By optimizing the fabrication recipe, this study advances the fundamental understanding of micro- and nanoscale interactions for various applications, paving the way for future studies in water-repellent surface design and heat transfer efficiency improvements."]},{"key":"dc:format","label":"Dc Format","values":["application/pdf"]},{"key":"dc:title","label":"Title","values":["Efficient fabrication of micropillars for water repellency using photolightography"]}]}],"canonical_facts":{"dc:contributor":["Miljkovic, Nenad"],"dc:creator":["Faghihi, Parsa"],"dc:date":["2024-11-07","2024-12"],"dc:description":["Submission published under a 24 month embargo labeled 'U of I Access', the embargo will last until 2026-12-01","The student, Parsa Faghihi, accepted the attached license on 2024-11-07 at 11:12.","The student, Parsa Faghihi, submitted this Thesis for approval on 2024-11-07 at 11:21.","This Thesis was approved for publication on 2024-11-07 at 17:38.","DSpace SAF Submission Ingestion Package generated from Vireo submission #21299 on 2025-03-28 at 14:43:02","This study focuses on the fabrication and characterization of SU-8-based micropillars designed for water repellency and related applications. Using SU-8 photoresist, we created micropillars with various shapes and structures on silicon wafers to achieve enhanced water-repellent surfaces. Optimal baking and exposure parameters were thoroughly evaluated, revealing that efficient fabrication requires a higher exposure dose (~800 mJ/cm²) and extended baking time (~30 minutes) compared to standard recommendations. Both SU-8-2005 and SU-8-2015 were examined for their performance under these conditions. To enhance hydrophobicity and achieve superhydrophobic properties, two different hydrophobic coatings and boehmite nanostructures were applied. Surface characterization was conducted using 3D confocal microscopy and a microgoniometer, with results demonstrating that the micropillars could increase water droplet contact angles by approximately 30° on hydrophobic surfaces, reaching a contact angle of ~149° with C4F8 coating. The application potential of these micropillars for water removal in condensation conditions was explored using Environmental Scanning Electron Microscopy (ESEM). The micropillars effectively support applications in water repellency, condensation, boiling, and particularly in droplet jumping phenomena on superhydrophobic surfaces. By optimizing the fabrication recipe, this study advances the fundamental understanding of micro- and nanoscale interactions for various applications, paving the way for future studies in water-repellent surface design and heat transfer efficiency improvements."],"dc:format":["application/pdf"],"dc:identifier":["https://hdl.handle.net/2142/127341"],"dc:language":["eng","en"],"dc:rights":["Copyright 2024 Parsa Faghihi"],"dc:subject":["Micro Pillars","Water Repellency","Su8","Photolithography"],"dc:title":["Efficient fabrication of micropillars for water repellency using photolightography"],"dc:type":["text","Thesis"],"thesis:degree_discipline":["Mechanical Engineering"],"thesis:degree_level":["Thesis"],"thesis:degree_name":["M.S."],"thesis:institution_name":["University of Illinois at Urbana-Champaign"]},"updated_at":"2026-07-22T22:25:03Z"}