{"id":{"repo_id":"uiuc","oai_identifier":"oai:www.ideals.illinois.edu:2142/121937"},"canonical_url":"https://search.dev.ndltd.org/etd/uiuc/oai:www.ideals.illinois.edu:2142/121937","repository":{"repo_id":"uiuc","name":"University of Illinois - Urbana-Champaign","base_url":"https://www.ideals.illinois.edu/oai-pmh"},"display":{"title":"Novel nanoelectromechanical systems for probing and exploiting nanomaterial properties","abstract":"Submission original under an indefinite embargo labeled 'Open Access'. The submission was exported from vireo on 2024-03-01 without embargo terms","abstract_html":"Submission original under an indefinite embargo labeled 'Open Access'. The submission was exported from vireo on 2024-03-01 without embargo terms","abstract_has_math":false,"creators":["Furlanetto Ferrari, Paolo"],"institution":"University of Illinois at Urbana-Champaign","degree_name":"Ph.D.","degree_level":"Dissertation","degree_discipline":"Mechanical Engineering","degree_department":null,"school":null,"contributors":["van der Zande, Arend M","Tawfick, Sameh","Johnson, Harley","Fang, Kejie"],"advisors":[],"committee_chairs":[],"committee_members":[],"year":2023,"date_issued":"2023-12","date_published":"2023-12","updated_at":"2026-07-22T22:25:00Z","subjects":["Microsystems","Applied Physics","Thin Films","Metamaterials","Phonon","Phononic","Nanotechnology","Nanoscience","Graphene","Mechanics","Electromechanics","Optomechanics","Nanomechanics","Micromechanics","Vibrations","Acoustics","Nonlinear Dynamics","Mems","Nems","2d Materials","Nanomaterials"],"languages":["en","eng"],"rights":["Copyright 2023 by Paolo Furlanetto Ferrari. 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All rights reserved."]}]},{"id":"identifiers","label":"Identifiers","entries":[{"key":"dc:identifier","label":"Identifier","values":["https://hdl.handle.net/2142/121937"]}]},{"id":"additional","label":"Additional Metadata","entries":[{"key":"dc:description","label":"Description","values":["Submission original under an indefinite embargo labeled 'Open Access'. The submission was exported from vireo on 2024-03-01 without embargo terms","The student, Paolo Furlanetto Ferrari, accepted the attached license on 2023-08-21 at 11:52.","The student, Paolo Furlanetto Ferrari, submitted this Dissertation for approval on 2023-08-21 at 12:07.","This Dissertation was approved for publication on 2023-11-10 at 13:26.","DSpace SAF Submission Ingestion Package generated from Vireo submission #19811 on 2024-03-01 at 13:13:17","Micro and Nanoelectromechanical Systems (M/NEMS) have numerous applications in sensing and signal transduction. Many properties benefit from reducing the system size to the nanoscale, such as increased responsivity, enhanced tunability, lower power consumption, and higher spatial density. Two-dimensional (2D) materials represent the ultimate limit of thickness, offering unprecedented new capabilities due to their natural nanoscale dimensions, high stability, high mechanical strength and easy electronic integration. The main goal of this Thesis is to explore NEMS that either (i) exploit the exquisite properties of 2D and nano-film materials for new applications; or (ii) that can be used as a platform to probe some of these properties. With this goal in mind, first, utilizing graphene, we show how NEMS resonators can be used to probe the interlayer friction between 2D layers. We demonstrate that, even though the friction between the layers is ultimately small, it can drastically affect the dissipation. Secondly, again utilizing graphene, we show how the large nonlinear response of 2D resonators can be used to generate chaotic motion with much more tunability and frequency range compared to other MEMS-based techniques. In addition to graphene, we also explore thin-film silicon nitride for developing new NEMS. First, we show how buckling of the thin film drastically tunes the resonant frequency and nonlinear response of individual resonators. Expanding on this study, we show how buckling can be used to effectively control the transmission of waves in arrays of coupled resonators, also called a phononic waveguide. Making the analogy between metamaterials and crystalline materials, the results indicate that buckling strongly amplifies the degree of disorder in the system, resembling a phase transition. The results obtained in this Thesis can be generalized to many other NEMS platforms, expanding the range of capabilities of this technology."]},{"key":"dc:format","label":"Dc Format","values":["application/pdf"]},{"key":"dc:title","label":"Title","values":["Novel nanoelectromechanical systems for probing and exploiting nanomaterial properties"]}]}],"canonical_facts":{"dc:contributor":["van der Zande, Arend M","Tawfick, Sameh","Johnson, Harley","Fang, Kejie"],"dc:creator":["Furlanetto Ferrari, Paolo"],"dc:date":["2023-12","2023-11-10"],"dc:description":["Submission original under an indefinite embargo labeled 'Open Access'. The submission was exported from vireo on 2024-03-01 without embargo terms","The student, Paolo Furlanetto Ferrari, accepted the attached license on 2023-08-21 at 11:52.","The student, Paolo Furlanetto Ferrari, submitted this Dissertation for approval on 2023-08-21 at 12:07.","This Dissertation was approved for publication on 2023-11-10 at 13:26.","DSpace SAF Submission Ingestion Package generated from Vireo submission #19811 on 2024-03-01 at 13:13:17","Micro and Nanoelectromechanical Systems (M/NEMS) have numerous applications in sensing and signal transduction. Many properties benefit from reducing the system size to the nanoscale, such as increased responsivity, enhanced tunability, lower power consumption, and higher spatial density. Two-dimensional (2D) materials represent the ultimate limit of thickness, offering unprecedented new capabilities due to their natural nanoscale dimensions, high stability, high mechanical strength and easy electronic integration. The main goal of this Thesis is to explore NEMS that either (i) exploit the exquisite properties of 2D and nano-film materials for new applications; or (ii) that can be used as a platform to probe some of these properties. With this goal in mind, first, utilizing graphene, we show how NEMS resonators can be used to probe the interlayer friction between 2D layers. We demonstrate that, even though the friction between the layers is ultimately small, it can drastically affect the dissipation. Secondly, again utilizing graphene, we show how the large nonlinear response of 2D resonators can be used to generate chaotic motion with much more tunability and frequency range compared to other MEMS-based techniques. In addition to graphene, we also explore thin-film silicon nitride for developing new NEMS. First, we show how buckling of the thin film drastically tunes the resonant frequency and nonlinear response of individual resonators. Expanding on this study, we show how buckling can be used to effectively control the transmission of waves in arrays of coupled resonators, also called a phononic waveguide. Making the analogy between metamaterials and crystalline materials, the results indicate that buckling strongly amplifies the degree of disorder in the system, resembling a phase transition. The results obtained in this Thesis can be generalized to many other NEMS platforms, expanding the range of capabilities of this technology."],"dc:format":["application/pdf"],"dc:identifier":["https://hdl.handle.net/2142/121937"],"dc:language":["en","eng"],"dc:rights":["Copyright 2023 by Paolo Furlanetto Ferrari. All rights reserved."],"dc:subject":["Microsystems","Applied Physics","Thin Films","Metamaterials","Phonon","Phononic","Nanotechnology","Nanoscience","Graphene","Mechanics","Electromechanics","Optomechanics","Nanomechanics","Micromechanics","Vibrations","Acoustics","Nonlinear Dynamics","Mems","Nems","2d Materials","Nanomaterials"],"dc:title":["Novel nanoelectromechanical systems for probing and exploiting nanomaterial properties"],"dc:type":["text"],"thesis:degree_discipline":["Mechanical Engineering"],"thesis:degree_level":["Dissertation"],"thesis:degree_name":["Ph.D."],"thesis:institution_name":["University of Illinois at Urbana-Champaign"]},"updated_at":"2026-07-22T22:25:00Z"}