{"id":{"repo_id":"uiuc","oai_identifier":"oai:www.ideals.illinois.edu:2142/120560"},"canonical_url":"https://search.dev.ndltd.org/etd/uiuc/oai:www.ideals.illinois.edu:2142/120560","repository":{"repo_id":"uiuc","name":"University of Illinois - Urbana-Champaign","base_url":"https://www.ideals.illinois.edu/oai-pmh"},"display":{"title":"Non-reciprocity in piezoelectric and electrostatic microelectromechanical systems","abstract":"Submission published under a 24 month embargo labeled 'Closed Access', the embargo will last until 2025-05-01","abstract_html":"Submission published under a 24 month embargo labeled 'Closed Access', the embargo will last until 2025-05-01","abstract_has_math":false,"creators":["Zhao, Jianing"],"institution":"University of Illinois at Urbana-Champaign","degree_name":"Ph.D.","degree_level":"Dissertation","degree_discipline":"Mechanical Engineering","degree_department":null,"school":null,"contributors":["Bahl, Gaurav","von der Zande, Arend","Tawfick, Sameh","Fang, Kejie"],"advisors":[],"committee_chairs":[],"committee_members":[],"year":2023,"date_issued":"2023-05","date_published":"2023-05","updated_at":"2026-07-22T22:24:57Z","subjects":["Non-reciprocity","Piezoelectric","Electrostatic","Microelectromechanical Systems (MEMS)","Spatiotemporal Modulation"],"languages":["en","eng"],"rights":["Copyright 2023 Jianing Zhao"],"rights_urls":[],"identifier_entries":[]},"links":{"outbound_url":"https://hdl.handle.net/2142/120560","outbound_label":"Handle","outbound_source":"dc:identifier"},"metadata_groups":[{"id":"people","label":"People","entries":[{"key":"dc:contributor","label":"Contributor","values":["Bahl, Gaurav","von der Zande, Arend","Tawfick, Sameh","Fang, Kejie"]},{"key":"dc:creator","label":"Author","values":["Zhao, Jianing"]}]},{"id":"academic_context","label":"Academic Context","entries":[{"key":"dc:date","label":"Dc Date","values":["2023-05","2023-04-28"]},{"key":"dc:type","label":"Dc Type","values":["text","Thesis"]},{"key":"thesis:degree_discipline","label":"Discipline","values":["Mechanical Engineering"]},{"key":"thesis:degree_level","label":"Degree Level","values":["Dissertation"]},{"key":"thesis:degree_name","label":"Degree Name","values":["Ph.D."]},{"key":"thesis:institution_name","label":"Thesis Institution Name","values":["University of Illinois at Urbana-Champaign"]}]},{"id":"subjects_keywords","label":"Subjects and Keywords","entries":[{"key":"dc:subject","label":"Dc Subject","values":["Non-reciprocity","Piezoelectric","Electrostatic","Microelectromechanical Systems (MEMS)","Spatiotemporal Modulation"]}]},{"id":"language_rights","label":"Language and Rights","entries":[{"key":"dc:language","label":"Dc Language","values":["en","eng"]},{"key":"dc:rights","label":"Dc Rights","values":["Copyright 2023 Jianing Zhao"]}]},{"id":"identifiers","label":"Identifiers","entries":[{"key":"dc:identifier","label":"Identifier","values":["https://hdl.handle.net/2142/120560"]}]},{"id":"additional","label":"Additional Metadata","entries":[{"key":"dc:description","label":"Description","values":["Submission published under a 24 month embargo labeled 'Closed Access', the embargo will last until 2025-05-01","The student, Jianing Zhao, accepted the attached license on 2023-04-26 at 17:37.","The student, Jianing Zhao, submitted this Dissertation for approval on 2023-04-26 at 17:47.","This Dissertation was approved for publication on 2023-04-28 at 07:58.","DSpace SAF Submission Ingestion Package generated from Vireo submission #19165 on 2023-09-01 at 17:21:43","Reciprocity requires that the transmission of energy is symmetric during forward and backward wave propagation between two ports inside a material. Non-reciprocal devices, such as isolator, circulator and gyrator, are important components for manipulation and routing of signals. Application examples of non-reciprocal devices include simultaneous-transmit-and-receive (STAR) radar in state-of-the-art telecommunication systems, and noise isolation through different amplifier stages in quantum computers. Conventional non-reciprocal devices based on Faraday effect require magnetooptic materials, which are bulky, expensive and not compatible with integratedcircuits based electronic systems fabricated by modern semiconductor process. Microscale acoustic devices (such as microelectromechanical systems or MEMS) benefit smaller footprint due to the shorter acoustic wavelength, and serve as advantageous alternatives in front-end radio-frequency applications such as filters and resonators. However, there are few approaches available to make these microscale acoustic devices nonreciprocal at the mechanics level. There are grant challenges to realize non-reciprocal acoustic propagation without using of magnetic materials and making the device fabrication compatible with advanced manufacturing processes used in integrated circuits. In this research work, we present an experimental demonstration of a micro-scale non-reciprocal piezoelectric acoustic resonator system by spatiotemporal modulation. We demonstrate an isolator behaviour based on coupled piezoelectric resonators chain and the spatiotemporal modulation generates non-reciprocal transmission through the synthetic Hall effect for phonon. Frequency modulation is realized by shunting time-varying electric circuitry to piezoelectric resonator due to electromechanical coupling. Next, instead of coupling physically separate resonators, we take advantage of a typical electrostatic MEMS gyroscope resonator which supports two degenerated eigenmodes and demonstrate non-reciprocal admittance responses by the spatiotemporal modulation method. Our experimental results show high non-reciprocal contrast ratio because of strong modulation from electrostatic forces. This result is among the largest demonstrations of nonreciprocal MEMS including hybrid electronics-MEMS, acoustoelectric effect, breaking parity-time symmetry, and piezoelectric nonlinear stiffening. In addition, we extend the concept of spatiotemporal modulation to electrostatic coupling strengths instead of resonance frequency of piezoelectric resonator, and experimentally demonstrate an electrostatic gyrator on a MEMS tuning fork resonator. This method can be generalized to optimize other figure of merit for gyrator, such as bandwidth and insertion loss, by replacing a resonator to linear waveguide or cascaded resonator filters. Finally, we propose a design of circulator device by extending the idea of coupled resonator chain system and verify the directional signal flow inside the closed resonator loop by the numerical simulation of coupled mode theory. Furthermore, we reconfigure the coupled resonator chain devices to propose a design of gyration behavior when the strong modulation depth excites the mode splitting of higher order side-bands. iii"]},{"key":"dc:format","label":"Dc Format","values":["application/pdf"]},{"key":"dc:title","label":"Title","values":["Non-reciprocity in piezoelectric and electrostatic microelectromechanical systems"]}]}],"canonical_facts":{"dc:contributor":["Bahl, Gaurav","von der Zande, Arend","Tawfick, Sameh","Fang, Kejie"],"dc:creator":["Zhao, Jianing"],"dc:date":["2023-05","2023-04-28"],"dc:description":["Submission published under a 24 month embargo labeled 'Closed Access', the embargo will last until 2025-05-01","The student, Jianing Zhao, accepted the attached license on 2023-04-26 at 17:37.","The student, Jianing Zhao, submitted this Dissertation for approval on 2023-04-26 at 17:47.","This Dissertation was approved for publication on 2023-04-28 at 07:58.","DSpace SAF Submission Ingestion Package generated from Vireo submission #19165 on 2023-09-01 at 17:21:43","Reciprocity requires that the transmission of energy is symmetric during forward and backward wave propagation between two ports inside a material. Non-reciprocal devices, such as isolator, circulator and gyrator, are important components for manipulation and routing of signals. Application examples of non-reciprocal devices include simultaneous-transmit-and-receive (STAR) radar in state-of-the-art telecommunication systems, and noise isolation through different amplifier stages in quantum computers. Conventional non-reciprocal devices based on Faraday effect require magnetooptic materials, which are bulky, expensive and not compatible with integratedcircuits based electronic systems fabricated by modern semiconductor process. Microscale acoustic devices (such as microelectromechanical systems or MEMS) benefit smaller footprint due to the shorter acoustic wavelength, and serve as advantageous alternatives in front-end radio-frequency applications such as filters and resonators. However, there are few approaches available to make these microscale acoustic devices nonreciprocal at the mechanics level. There are grant challenges to realize non-reciprocal acoustic propagation without using of magnetic materials and making the device fabrication compatible with advanced manufacturing processes used in integrated circuits. In this research work, we present an experimental demonstration of a micro-scale non-reciprocal piezoelectric acoustic resonator system by spatiotemporal modulation. We demonstrate an isolator behaviour based on coupled piezoelectric resonators chain and the spatiotemporal modulation generates non-reciprocal transmission through the synthetic Hall effect for phonon. Frequency modulation is realized by shunting time-varying electric circuitry to piezoelectric resonator due to electromechanical coupling. Next, instead of coupling physically separate resonators, we take advantage of a typical electrostatic MEMS gyroscope resonator which supports two degenerated eigenmodes and demonstrate non-reciprocal admittance responses by the spatiotemporal modulation method. Our experimental results show high non-reciprocal contrast ratio because of strong modulation from electrostatic forces. This result is among the largest demonstrations of nonreciprocal MEMS including hybrid electronics-MEMS, acoustoelectric effect, breaking parity-time symmetry, and piezoelectric nonlinear stiffening. In addition, we extend the concept of spatiotemporal modulation to electrostatic coupling strengths instead of resonance frequency of piezoelectric resonator, and experimentally demonstrate an electrostatic gyrator on a MEMS tuning fork resonator. This method can be generalized to optimize other figure of merit for gyrator, such as bandwidth and insertion loss, by replacing a resonator to linear waveguide or cascaded resonator filters. Finally, we propose a design of circulator device by extending the idea of coupled resonator chain system and verify the directional signal flow inside the closed resonator loop by the numerical simulation of coupled mode theory. Furthermore, we reconfigure the coupled resonator chain devices to propose a design of gyration behavior when the strong modulation depth excites the mode splitting of higher order side-bands. iii"],"dc:format":["application/pdf"],"dc:identifier":["https://hdl.handle.net/2142/120560"],"dc:language":["en","eng"],"dc:rights":["Copyright 2023 Jianing Zhao"],"dc:subject":["Non-reciprocity","Piezoelectric","Electrostatic","Microelectromechanical Systems (MEMS)","Spatiotemporal Modulation"],"dc:title":["Non-reciprocity in piezoelectric and electrostatic microelectromechanical systems"],"dc:type":["text","Thesis"],"thesis:degree_discipline":["Mechanical Engineering"],"thesis:degree_level":["Dissertation"],"thesis:degree_name":["Ph.D."],"thesis:institution_name":["University of Illinois at Urbana-Champaign"]},"updated_at":"2026-07-22T22:24:57Z"}